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SPIE Quantum Technologies

Integrating superconducting NbN thin films into nanowire single-photon detectors

Hyesoo Jin, Soyun Woo, Howon Jang, Donghee Park

Published Apr 10, 2026• 0 citations
Publisher
DOI
10.1117/12.3099582

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We report on the development of superconducting nanowire single photon detectors (SNSPDs) by using NbTiN thin films on single crystal MgO substrates. NbTiN thin films showed fine crystal structure with closer lattice constant to MgO substrates than that of NbN thin films. The transition temperature of 3.5-nm-thick NbTiN films was comparable to, and the resistivity at 20 K was lower than NbN thin films. The kinetic inductance of NbTiN-SNSPDs was ∼25% lower than that of NbN-SNSPD, and system detection efficiency was 1.4% at a 1550 nm wavelength, which is comparable to NbN-SNSPDs.