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Applied Physics Letters

Submicron YBa2Cu3O7−δ grain boundary junction dc SQUIDs

M. Kawasaki, P. K. Chaudhari, T. H. Newman, Arunava Gupta

Published Jun 3, 1991• 60 citations
Publisher

Abstract

We have fabricated and measured the properties of micron-size single grain boundary junctions and dc superconducting quantum interference devices (SQUIDs). The width of the junctions was varied between 0.25 and 2 μm. The junctions were formed in c-axis oriented epitaxial films with a single 24° tilt boundary. They were fabricated using electron beam lithography and ion milling. All of the junctions operate at 77 K. The noise properties of SQUIDs made of these junctions have been characterized. They show a significant 1/f component which is comparable to published values. However, the white noise level, 3×10−31 J/Hz measured at 77 K, is the lowest ever reported.

DOI
10.1063/1.104824

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We have fabricated and measured the properties of micron-size single grain boundary junctions and dc superconducting quantum interference devices (SQUIDs). The width of the junctions was varied between 0.25 and 2 μm. The junctions were formed in c-axis oriented epitaxial films with a single 24° tilt boundary. They were fabricated using electron beam lithography and ion milling. All of the junctions operate at 77 K. The noise properties of SQUIDs made of these junctions have been characterized. They show a significant 1/f component which is comparable to published values. However, the white noise level, 3×10−31 J/Hz measured at 77 K, is the lowest ever reported.
We have studied white (high-frequency)-noise properties of YBa2Cu3O7-δ grain-boundary dc superconducting quantum interference devices (SQUIDs). Bias voltage (V) dependence of the white-noise voltage spectral density (S v) was measured for dc-SQUIDs and junctions. As a result, S v at low bias voltage can be explained by the thermal noise theory of tunnel junctions. Furthermore, the energy resolution of 1.96×10-32 J/Hz is obtained at 43 K in the white-noise region. The measured energy resolution of the dc-SQUIDs is in good agreement with the theoretical results. According to the above results, YBa2Cu3O7-δ dc-SQUIDs with a quantum noise limit might be realized at 4.2 K.
DC superconducting quantum interference devices (dc-SQUIDs) were fabricated in Co-doped BaFe 2 As 2 epitaxial films on (La, Sr)(Al, Ta)O 3 bicrystal substrates with 30° misorientation angles. The 18 × 8 µm 2 SQUID loop with an estimated inductance of 13 pH contained two 3 µm wide grain boundary junctions. The voltage–flux characteristics clearly exhibited periodic modulations with Δ V = 1.4 µV at 14 K, while the intrinsic flux noise of dc-SQUIDs was 7.8 × 10 − 5 Φ 0 Hz − 1/2 above 20 Hz. The rather high flux noise is mainly attributed to the small voltage modulation depth which results from the superconductor–normal-metal–superconductor junction nature of the bicrystal grain boundary.
YBa2_22​Cu3_33​O7_77​ 24∘^\circ∘ (30∘^\circ∘) bicrystal grain boundary junctions (GBJs), shunted with 60\,nm (20\,nm) thick Au, were fabricated by focused ion beam milling with widths 80 nm≤w≤7.8 μ80\,{\rm nm} \le w \le 7.8\,μ80nm≤w≤7.8μm. At 4.2\,K we find critical current densities jcj_cjc​ in the 105 A/cm210^5\,{\rm A/cm^2}105A/cm2 range %\dkc{\#1} (without a clear dependence on www) and an increase in resistance times junction area ρρρ with an approximate scaling ρ∝w1/2ρ\propto w^{1/2}ρ∝w1/2. For the narrowest GBJs jcρ≈100 μj_cρ\approx 100\,μjc​ρ≈100μV, which is promising for the realization of sensitive nanoSQUIDs for the detection of small spin systems. We demonstrate that our fabrication process allows the realization of sensitive nanoscale dc SQUIDs; for a SQUID with w≈100w\approx 100w≈100\,nm wide GBJs we find an rms magnetic flux noise spectral density of SΦ1/2≈4 μΦ0/Hz1/2S_Φ^{1/2}\approx 4\,μΦ_0/{\rm Hz}^{1/2}SΦ1/2​≈4μΦ0​/Hz1/2 in the white noise limit. We also derive an expression for the spin sensitivity Sμ1/2S_μ^{1/2}Sμ1/2​, which depends on SΦ1/2S_Φ^{1/2}SΦ1/2​, on the location and orientation of the magnetic moment of a magnetic particle to be detected by the SQUID, and on the SQUID geometry. For the not optimized SQUIDs presented here, we estimate Sμ1/2=390 μB/HzS_μ^{1/2}=390\,μ_B/\sqrt{\rm{Hz}}Sμ1/2​=390μB​/Hz​, which could be further improved by at least an order of magnitude.
White noise properties of YBa2Cu3O7-δ (YBCO) grain boundary Josephson devices have been studied. Bias voltage (V) dependence of the white voltage noise spectral density (SV) were measured in detail for YBCO dc-SQUIDS and single Josephson junctions on different kinds of substrates with various misorientation angles. It was found that Sv was in good agreement with the thermal noise theory hypothesizing that the device noise was only due to Johnson noise. This implies that the quantum noise can be achieved with optimized YBCO dc-SQUIDS. We have designed a YBCO dc-SQUID with a cross section of junctions as small as 0.1 μm^2. It was predicted that the minimum intrinsic white energy resolution (E””'‘) should be about Planck's constant (h) at 4.2 K. The actual minimum eW, value of 1.76 x 10^-33 J/Hz = 2.7 h was obtained. This result demonstrates that E” '”of YBCO dc-SQUID s can be minimized to the order of h.
Autonomous single-layer dc superconducting quantum interference devices (SQUIDs) have been prepared from epitaxial, laser-deposited YBa2Cu3Ox films on step edge SrTiO3 and LaAlO3 substrates. For device patterning, a SiOx inhibit technique as well as conventional ethylenediaminetetraacetic wet etch was used. The Josephson junctions are of grain boundary type. Their widths are 5 μm. The SQUID hole is a square of about 5 μm; the SQUID inductance is estimated to be about 20 pH. We obtained a very regular, nonhysteretic flux to voltage modulation over more than 100 flux quanta (Φ0). The maximum voltage signal is of the order of 15 μV peak to peak and the maximum transfer function dV/dΦ at the appropriate flux bias is 50 μV/Φ0 at 77 K. The best value of the equivalent flux noise as measured in the flux locked loop mode is 1.4×10−5 Φ0/Hz1/2 at 1 Hz and 1×10−5 Φ0/Hz1/2 in the white noise region for f≳5 Hz. This results in an energy resolution εn,w(f≳5 Hz)=1×10−29 J/Hz in the white noise region and 2×10−29 J/Hz at 1 Hz.
We have fabricated and characterized the noise performance of submicron edge junction dc superconducting quantum interference devices (SQUID’s) which exhibit excellent signal properties and extremely high flux sensitivity. At frequencies above about 3 MHz, the SQUID noise is white and is in reasonable agreement with computer simulations for a thermal noise-limited detector. In one device the measured flux energy resolution is 1.6±0.5ℏ at 1.5 K, within a factor of 2 of the quantum-limited value suggested by theoretical modeling.