Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Toward nano-process applications with laser-cooled silicon atoms
Hiroshi Kumagai, Yuichi Asakawa, Katsumi Midorikawa, Minoru Obara
Abstract
We have developed an all-solid-state 252nm coherent light source for laser cooling of silicon atoms with tow-stage highly efficient frequency conversions with external cavities. With the coherent light source, it is possible to manipulate the atomic motion of the silicon atoms towards nano-process applications. In this paper, deflection, collimation, and axial velocity selection of the silicon atomic beam with the coherent light source are discussed.