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Superconductor Science and Technology

Kinetic inductance as a microwave circuit design variable by multilayer fabrication

A. A. Adamyan, Sebastian E. de Graaf, Sergey Kubatkin, Andrey V. Danilov

Published Jul 1, 2015• 6 citations
Publisher

Abstract

Abstract We report on the development of a reliable NbN/Al/Nb/NbN multilayer fabrication technique for combining design elements with and without kinetic inductance in superconducting microwave circuits. As a proof-of-concept we demonstrate the application of the proposed technique to build a slow microwave propagation line matched to 50 Ω terminals. Fabrication details along with the design and measurements are discussed. At 8 GHz the presented device operates as a dc controllable full-turn phase shifter. We suggest that by exploiting the kinetic inductance as a design variable one can greatly improve operation parameters for a variety of standard microwave designs such as step-impedance filters and resonators.

DOI
10.1088/0953-2048/28/8/085007

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It is pointed out that superconducting microstrip transmission lines operating in the kinetic-inductance limit have the potential to reduce the size and weight of microwave circuits by several orders of magnitude. Since the phase velocity of these guided wave structures is up to a hundred times less than in free space, the electrical length of distributed elements is similarly reduced. Simple transmission lines have been fabricated from both low- and high-transition-temperature superconductors while more complicated circuits, such as filters, with a good match to 50- Omega coax have been fabricated with the low-transition-temperature superconductors. Also, a novel coupled-line topology, compatible with these structures, has been studied analytically.>

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Abstract : We report on the development of an electrically controllable superconducting phase shifter suitable for operation in a terahertz heterodyne receiver. The key physical principle of operation, and that of nonlinear kinetic inductance, is developed into a device theory and also appropriate design rules. Critical figures of merit are then identified and optimized designs presented. Experimental tests of prototypes are described that were used to help further refine the design rules. Although a practical phase shifter was not produced, the prospects for the device concept appear good. Terahertz, Phase-Shifter, Nonlinear, Kinetic Inductance, Superconducting.

Stanford Univ. Report•Jun 1, 1992•0 citations
Abstract We report on the development of a reliable NbN/Al/Nb/NbN multilayer fabrication technique for combining design elements with and without kinetic inductance in superconducting microwave circuits. As a proof-of-concept we demonstrate the application of the proposed technique to build a slow microwave propagation line matched to 50 Ω terminals. Fabrication details along with the design and measurements are discussed. At 8 GHz the presented device operates as a dc controllable full-turn phase shifter. We suggest that by exploiting the kinetic inductance as a design variable one can greatly improve operation parameters for a variety of standard microwave designs such as step-impedance filters and resonators.
It is pointed out that superconducting microstrip transmission lines operating in the kinetic-inductance limit have the potential to reduce the size and weight of microwave circuits by several orders of magnitude. Since the phase velocity of these guided wave structures is up to a hundred times less than in free space, the electrical length of distributed elements is similarly reduced. Simple transmission lines have been fabricated from both low- and high-transition-temperature superconductors while more complicated circuits, such as filters, with a good match to 50- Omega coax have been fabricated with the low-transition-temperature superconductors. Also, a novel coupled-line topology, compatible with these structures, has been studied analytically.>
The W-Band (75−110  GHz75-110\; \mathrm{GHz}75−110GHz) sky contains a plethora of information about star formation, galaxy evolution and the cosmic microwave background. We have designed and fabricated a dual-purpose superconducting circuit to facilitate the next generation of astronomical observations in this regime by providing proof-of-concept for both a millimeter-wave low-loss phase shifter, which can operate as an on-chip Fourier transform spectrometer (FTS) and a traveling wave kinetic inductance parametric amplifier (TKIP). Superconducting transmission lines have a propagation speed that depends on the inductance in the line which is a combination of geometric inductance and kinetic inductance in the superconductor. The kinetic inductance has a non-linear component with a characteristic current, I∗I_*I∗​, and can be modulated by applying a DC current, changing the propagation speed and effective path length. Our test circuit is designed to measure the path length difference or phase shift, ΔϕΔϕΔϕ, between two symmetric transmission lines when one line is biased with a DC current. To provide a measurement of ΔϕΔϕΔϕ, a key parameter for optimizing a high gain W-Band TKIP, and modulate signal path length in FTS operation, our 3.6×2.5  cm3.6 \times 2.5\; \mathrm{cm}3.6×2.5cm chip employs a pair of 503  mm503\; \mathrm{mm}503mm long NbTiN inverted microstrip lines coupled to circular waveguide ports through radial probes. For a line of width 3  μm3\; \mathrm{μm}3μm and film thickness 20  nm20\; \mathrm{nm}20nm, we predict Δϕ≈1767  radΔϕ\approx1767\; \mathrm{rad}Δϕ≈1767rad at 90  GHz90\; \mathrm{GHz}90GHz when biased at close to I∗I_*I∗​. We have fabricated a prototype with 200  nm200\; \mathrm{nm}200nm thick Nb film and the same line length and width. The predicted phase shift for our prototype is Δϕ≈30  radΔϕ\approx30\; \mathrm{rad}Δϕ≈30rad at 90  GHz90\; \mathrm{GHz}90GHz when biased at close to I∗I_*I∗​ for Nb.
A simple design for superconducting kinetic inductance delay lines is presented. Delay lines were fabricated with a thin-film process involving only DC magnetron deposition and anodization of Nb. Phase-velocity measurements demonstrated wave slowing to less than 1/150 of the velocity of light in free space with associated impedances in the ohm range. Phase velocity changes on lines which were in physical proximity to long Josephson junctions and normal conducting lines were investigated. Variations larger than 10% of the equilibrium value were observed with junction-coupled lines under bias application. Locally heated lines exhibited changes exceeding a factor of two. Loss and phase velocity were determined as a function of bias conditions in both cases. Measured line loss was within expectations.>
Quantum limited amplifiers are sought after for a wide range of applications within quantum technologies and sensing. One promising candidate is the travelling wave parametric amplifier which exploits the non-linear kinetic inductance of a superconducting transmission line. This type of microwave amplifier promises to deliver a high gain, a quantum limited noise performance over several GHz bandwidth, and a high dynamic range. However, practical realizations of this type of device have so far been limited by fabrication defects, since the length of the superconducting transmission line required for achieving substantial parametric gain is on the order of ∼1 m. Here, we report on a design for a microwave traveling wave amplifier based on a slow propagation line comprising a central strip with high kinetic inductance and quasi-fractal line-to-ground capacitors. Due to an enhanced per unit length inductance (73 nH cm−1) and capacitance (15 pF cm−1), the line has a microwave propagation velocity as low as 9.8 × 108 cm s−1. This translates into parametric gain up to 0.5 dB cm−1 and a total gain of 6 dB for just a ∼10 cm long transmission line. Moreover, the flexibility of the presented design allows balancing the line inductance and capacitance in order to keep the characteristic impedance close to 50 Ω and to suppress standing waves, both factors being essential in order to implement a practical parametric amplifier in the microwave domain.
Turnable superconducting millimeter-wave phase shifters are discussed. The tuning mechanism is based on inductance modulation of NbN microstrips by excess quasiparticle injection. When measured by a DC method, using the interference patterns and resonances of specially designed DC SQUIDs, the inductance of NbN microstrips can be varied by up to 300%. Based on these results, superconducting microstrip interferometers to operate as low-power 100 GHz phase shifters were designed and fabricated. The 100 GHz signal is coupled into and out of the interferometers by finline antennas. Amplitude modulation of the output is used as the criterion for phase shift in one of the interferometer branches. Thin superconducting films (thinner than the penetration depth) and dielectric layers are needed to achieve tunability of the inductance. The conflicting requirements of tunability and efficient signal coupling are quantified in the interferometer testing, and the range of parameter optimization is bracketed. The elements of this required optimization are presented.
Abstract : We report on the development of an electrically controllable superconducting phase shifter suitable for operation in a terahertz heterodyne receiver. The key physical principle of operation, and that of nonlinear kinetic inductance, is developed into a device theory and also appropriate design rules. Critical figures of merit are then identified and optimized designs presented. Experimental tests of prototypes are described that were used to help further refine the design rules. Although a practical phase shifter was not produced, the prospects for the device concept appear good. Terahertz, Phase-Shifter, Nonlinear, Kinetic Inductance, Superconducting.