The aim of this thesis was to realize superconducting quantum bits by using novel fabrication techniques and materials in order to enhance the coherence time of the former devices. For the system to be studied we chose the ux-biased phase qubit, which consists of a Josephson junction integrated in a superconducting loop. This qubit realization has some advantages, which make it an ideal test-bed for different fabrication technologies and materials. Relatively large Josephson junctions can be used in the phase qubit realization, which are easy to be fabricated by using standard lithographic technology with the flexibility of employing various fabrication techniques and materials. The coherence of current-generation of superconducting qubits seems to be limited by intrinsic sources of noise and energy loss, related to materials' defects (two-level systems, TLSs) on the surfaces and interfaces of the superconducting lms, and in the bulk of the dielectric films used for the microelectronic realization of the circuits. For this reason, we aimed our research activities on the realization of low loss dielectrics (a-Si:H), on its integration with Josephson junction technologies, on the protection of the superconducting films' surfaces from unwanted contamination, and on the optimization of the circuit design and fabrication processes.
The aim of this thesis was to realize superconducting quantum bits by using novel fabrication techniques and materials in order to enhance the coherence time of the former devices. For the system to be studied we chose the ux-biased phase qubit, which consists of a Josephson junction integrated in a superconducting loop. This qubit realization has some advantages, which make it an ideal test-bed for different fabrication technologies and materials. Relatively large Josephson junctions can be used in the phase qubit realization, which are easy to be fabricated by using standard lithographic technology with the flexibility of employing various fabrication techniques and materials. The coherence of current-generation of superconducting qubits seems to be limited by intrinsic sources of noise and energy loss, related to materials' defects (two-level systems, TLSs) on the surfaces and interfaces of the superconducting lms, and in the bulk of the dielectric films used for the microelectronic realization of the circuits. For this reason, we aimed our research activities on the realization of low loss dielectrics (a-Si:H), on its integration with Josephson junction technologies, on the protection of the superconducting films' surfaces from unwanted contamination, and on the optimization of the circuit design and fabrication processes.
While significant strides have been made to increase the coherence time of superconducting qubits, further advancements are essential for realizing scalable quantum computing. Decoherence is often a result of loss and noise stemming from two-level systems and excess quasiparticles, arising due to material defects, fabrication processes, and ambient exposure, particularly at surfaces and interfaces. Our recent efforts to mitigate these decoherence mechanisms have employed a variety of strategies, including low-loss surface encapsulation materials, advanced substrate preparation techniques, modifications to metal film growth, and the development of novel fabrication processes. The structural and chemical properties of materials, surfaces, and interfaces are studied using scanning probe microscopy, electron microscopy, photoelectron spectroscopy, mass spectrometry, and X-ray diffraction, which is correlated to device performance metrics, including superconducting resonator internal quality factor and qubit T1 time. This information is used to identify and understand material sources of loss and their origins in the device fabrication process. Through multi-institution efforts within SQMS we have identified the loss mechanism of interstitial hydrogen in niobium-based devices and shown how standard fabrication processes introduce these hydrides, developing strategies to mitigate their formation.1 Furthermore, we have characterized the metal-substrate interface, including the loss of niobium-silicides formed at that interface, and developed silicon surface treatments that reduce atomic scale roughness and oxygen content at the metal-substrate and Josephson junction interfaces.2-4 By developing the connection between materials properties and the overall performance of superconducting quantum circuitry, we can develop fabrication strategies to mitigate material losses, thus supporting the ongoing efforts to enhance coherence time in superconducting quantum devices. 1. Torres-Castanedo, C. G.*, Goronzy, D. P.*, et al., Adv. Funct. Mater., 2401365 (2024) 2. Lu, X., et al., Phys. Rev. Materials 6, 064402 (2022) 3. Berti, G., Appl. Phys. Lett. 122, 192605 (2023) 4. Kopas, C. J., Goronzy, D. P., et al., arXiv:2408.02863 (2024)
Josephson tunnel junctions are the centerpiece of almost any superconducting electronic circuit, including qubits. Typically, the junctions for qubits are fabricated using shadow evaporation techniques to reduce dielectric loss contributions from the superconducting film interfaces. In recent years, however, sub-micrometer scale overlap junctions have started to attract attention. Compared to shadow mask techniques, neither an angle dependent deposition nor free-standing bridges or overlaps are needed, which are significant limitations for wafer-scale processing. This comes at the cost of breaking the vacuum during fabrication, but simplifies integration in multi-layered circuits and implementation of vastly different junction sizes and enables fabrication on a larger scale in an industrially standardized process. In this work, we demonstrate the feasibility of a subtractive process for the fabrication of overlap junctions. In an array of test contacts, we find low aging of the average normal state resistance of only 1.6% over 6 months. We evaluate the coherence properties of the junctions by employing them in superconducting transmon qubits. In time domain experiments, we find that both, the qubit life- and coherence time of our best device, are, on average, greater than 20 μs. Finally, we discuss potential improvements to our technique. This work paves the way toward a more standardized process flow with advanced materials and growth processes, and constitutes an important step for the large scale fabrication of superconducting quantum circuits.
Superconducting quantum circuits (SQCs), composed of superconducting capacitors, inductances, Josephson junctions, and transmission lines, exhibit macroscopic quantum effects at ultra-low temperatures. Due to the extremely low dissipation of superconductors, an important application of SQCs is superconducting qubits with long coherence time. Quantum computing based on superconducting qubits is a leading physical realization method of quantum computing, which is theoretically capable of accelerating many computational problems including quantum simulation, database searching, and optimization. In the long run, to use the power of quantum computing to its full extent, universal quantum computers should be constructed with quantum error correction. In the short term, one of the most pressing targets of the superconducting quantum computing community is to demonstrate quantum advantage using noisy intermediate-scale quantum chips. Both goals rely on the increasing of the number of coupled qubits in a quantum circuit and the quality of these qubits, which dictate the breadth and the depth of a problem it can solve, respectively. The fabrication of SQCs has adopted a few manufacturing processes from conventional integrated circuits. Quantum chips containing multiple superconducting qubits can be made and packaged on a large scale. “Quantum supremacy” has been demonstrated on a quantum chip with fifty-three qubits fabricated using the flip-chip bonding technology. However, to demonstrate quantum advantage, the quality and quantity of qubits need to increase simultaneously. Dissipative channels emerge in circuit design, material preparation, chip fabrication, and working environment, limiting the lifetime of superconducting qubits. For quantum chips with tens to hundreds of qubits, the integration will also introduce extra processing steps which may degrade the qubits, and unwanted coupling to loss channels. Most of these channels are microscopically related to materials constructing the quantum chips, chip surfaces, and material interfaces. Thus, it is important to investigate the material growth and device fabrication of SQCs, and to understand the material related loss mechanisms. This review paper investigates the material related topics in superconducting quantum circuits pertinent to the quantum computing application from a comprehensive perspective. The history of SQCs is briefly mentioned, followed by the peculiar characteristics as an engineerable quantum system, and a roadmap to quantum advantage and universal quantum computing in the next a few years. Technically, the superconducting quantum computer is compared to a Schrodinger’s cat, and can be boiled down into three parts, i.e., quantum chips, the environment, and the operating system, corresponding to the cat, the box, and the observer, respectively. The material related decoherence channels of the SQCs can be sorted into four categories; each will be discussed in details. To fabricate SQCs with minimal loss, the processing technologies are elaborated, including qubit design, material selection, surface treatments, film growth, and Josephson junction, etc. Though there are general guidelines that amorphous materials should be avoided and processing induced damage should be minimized, more is to be investigated due to the emerging of new materials and new fabrication methods. The last part presents the potential application of the superconducting quantum computer and its current state of play. SQC for quantum computing is a multi-discipline research topic, demanding joint efforts from different scientific and technical areas. Materials science and device processing will play important roles along the way to quantum practicality.
Superconducting integrated circuits incorporating Josephson junctions are an attractive candidate for scalable quantum information processing in the solid state. The strong nonlinearity of the Josephson effect enables one to tailor an anharmonic potential and thus to realize an artificial quantum two-level system (“qubit”) from a macroscopic superconducting circuit. Josephson qubits can be made to interact strongly and controllably, and it should be straightforward to fabricate circuits incorporating hundreds or even thousands of Josephson qubits using standard thin-film processing techniques. Work over the last several years has shown that qubit performance is limited by spurious coupling of the qubit to microscopic defect states in the materials that are used to implement the circuit. Here we discuss the materials origins of dissipation and dephasing in superconducting qubits. A deeper understanding of the underlying materials physics that governs decoherence in superconducting quantum circuits will guide the search for improved, low-noise materials and fuel continued progress in the field of superconducting quantum computing.
Dielectric loss from two-level states is shown to be a dominant decoherence source in superconducting quantum bits. Depending on the qubit design, dielectric loss from insulating materials or the tunnel junction can lead to short coherence times. We show that a variety of microwave and qubit measurements are well modeled by loss from resonant absorption of two-level defects. Our results demonstrate that this loss can be significantly reduced by using better dielectrics and fabricating junctions of small area . With a redesigned phase qubit employing low-loss dielectrics, the energy relaxation rate has been improved by a factor of 20, opening up the possibility of multiqubit gates and algorithms.
Over the past two decades the performance of superconducting quantum bits (qubits) has been improved tremendously: the coherence time of individual qubits has been increased by five orders of magnitude, from a few nanoseconds to >100 μs. The much-improved coherence, lithographic scalability, and compatibility with microwave control place superconducting qubits in the leading position in the race amongst several quantum systems being considered for quantum information processing. Despite this very impressive progress, experimental realization of quantum error corrections and demonstration of logical qubits remains a considerable challenge.One of possible solutions to this problem is the development of so-called protected qubits whose errors would be suppressed by special symmetries of the underlying Hamiltonian. The realization of such qubits requires elements not found in the conventional superconducting circuit toolbox, such as Josephson elements with cos(ϕ/2) and cos(2ϕ) dependences of the Josephson energy E_J on the phase difference ϕ, circuits with a very large kinetic inductance, and junctions with unusually low E_J.This thesis focuses on design, fabrication and characterization of circuits based on low-E_J Josephson junctions (JJs) and superinductors (SIs). By analyzing limitations on the junction performance imposed by the thermally activated phase slips, we observed a dramatic reduction of the critical currents in the regime E_J≤T which was accompanied by an increase of the zero-bias resistance R_0. The first part of this work provides practical considerations for the use of such junctions in quantum circuits. With the aim of improving elements with a very high kinetic inductance, in the second part we developed superinductors based on the granular Aluminum (grAl) films, in which Josephson junctions are realized between nanoscale grains. The circuits based on such SIs demonstrate low microwave losses at ultra-low temperatures. Superinductors are an essential element of a novel qubit that we have developed – the so-called bifluxon. The qubit consists of a Cooper-pair box (CPB) with low-E_J Josephson junctions shunted by a superinductor, thus forming a superconducting loop. When the loop is threaded by the magnetic flux Φ=Φ_0⁄2 where Φ_0 is the flux quantum, the qubit offers exponential suppression of energy decay from charge and flux noises, and dephasing from flux noise. In the last part of this work, we observed an increase of the energy relaxation time by two orders of magnitude, up to 100μs, by turning on protection in the bifluxon qubit.