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arXiv:2609.25593

Resonant multi-harmonic acousto-optics for programmable frequency control of visible light in a CMOS platform

Jacob M. Freedman, Matthew J. Storey, Daniel Dominguez, Andrew Leenheer, Nils T. Otterstrom, Matt Eichenfield

physics.opticsquant-phSubmitted Sep 22, 2026• Announced Sep 23, 2026

Abstract

Scaling quantum control for atoms, ions, and solid-state emitters requires gigahertz-frequency spectral control of high-power visible light in a volume-manufacturable platform. Silicon nitride photonics provides high power handling and CMOS-foundry compatibility but has no intrinsic mechanism for high-speed modulation. Integration with piezoelectric materials enables acousto-optic phase modulation, and mechanical resonant enhancement has made it efficient at gigahertz frequencies. However, a single resonance restricts the modulation waveform to a single tone, imposing Bessel-function sideband amplitudes and limiting frequency-shifting efficiency to 33.9%. Here we engineer a silicon nitride acousto-optic microstructure to support harmonically spaced resonances at 1.14 GHz and 2.28 GHz, each strongly optomechanically coupled to a 730 nm guided optical mode, so that tailored non-sinusoidal modulation waveforms can be resonantly synthesized. By piezoelectrically controlling the two mechanical amplitudes and their relative phase, we demonstrate 50% conversion to one sideband (1.5x the single-tone theoretical maximum), a flat seven-line comb, and a frequency shift with 60 dB carrier and 53 dB image suppression - to our knowledge the highest reported for an integrated modulator. The devices are fabricated in a 200 mm CMOS foundry, and we measure 91.7% yield without post-fabrication tuning across 36 devices from three wafers. We also show how the technique can be straightforwardly scaled to three or more harmonics. This result overcomes the trade-off between resonant enhancement and spectral programmability, with important consequences including improved single-qubit gate efficiency for hyperfine qubits.

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Realizing photonic quantum computing at scale requires integrated circuits that combine ultra-low loss with fast, low-power, low-hysteresis, and low-crosstalk reconfiguration. These requirements are particularly challenging at visible wavelengths, where many quantum resource-state generators, including single-photon sources and quantum memories, naturally operate. Low-confinement silicon nitride waveguides offer the requisite loss performance, but conventional thermo-optic modulators dissipate significant static power, driving thermal crosstalk and precluding cryogenic operation. Visible-wavelength piezo-optomechanical circuits avoid these drawbacks, but existing demonstrations rely either on high-confinement waveguides with propagation losses of 35-100 dB/m, or on low-confinement platforms using foundry-incompatible PZT. Here we combine piezo-optomechanical actuation with a CMOS-foundry-fabricated, low-confinement silicon nitride platform, achieving 2.6 dB/m propagation loss at 780 nm, megahertz-scale modulation bandwidth, a half-wave voltage-length product of 2.8 Vm, and negligible hysteresis. We demonstrate reconfigurable Mach-Zehnder interferometers with 0.63 dB loss per spiral phase shifter, enabling deep, actively reconfigurable visible-wavelength quantum photonic circuits.

Solutions for scalable, high-performance optical control are important for the development of scaled atom-based quantum technologies. Modulation of many individual optical beams is central to applying arbitrary gate and control sequences on arrays of atoms or atom-like systems. At telecom wavelengths, miniaturization of optical components via photonic integration has pushed the scale and performance of classical and quantum optics far beyond the limitations of bulk devices. However, material platforms for high-speed telecom integrated photonics lack transparency at the short wavelengths required by leading atomic systems. Here, we propose and implement a scalable and reconfigurable photonic control architecture using integrated, visible-light modulators based on thin-film lithium niobate. We combine this system with techniques in free-space optics and holography to demonstrate multi-channel, gigahertz-rate visible beamshaping. When applied to silicon-vacancy artificial atoms, our system enables the spatial and spectral addressing of a dynamically-selectable set of these stochastically-positioned point emitters.

High-fidelity control of the thousands to millions of programmable qubits needed for utility-scale quantum computers presents a formidable challenge for control systems. In leading atomic systems, control is optical: UV-NIR beams must be fanned out over numerous spatial channels and modulated to implement gates. While photonic integrated circuits (PICs) offer a potentially scalable solution, they also need to simultaneously feature high-speed and high-extinction modulation, strong inter-channel isolation, and broad wavelength compatibility. Here, we introduce and experimentally validate a foundry-fabricated PIC platform that overcomes these limitations. Designed for Rubidium-87 neutral atom quantum computers, our 8-channel PICs, fabricated on a 200-mm wafer process, demonstrate an advanced combination of performance metrics. At the 795 nm single-qubit gate wavelength, we achieve a mean extinction ratio (ER) of 71.4

\pm

1.1 dB, nearest-neighbor on-chip crosstalk of -68.0

\pm

1.0 dB, and -50.8

\pm

0.2 dB after parallel beam delivery in free-space. This high-performance operation extends to the 420 nm and 1013 nm wavelengths for two-qubit Rydberg gates, showing ERs of 42.4 dB (detector-limited) and 61.5 dB, respectively. The devices exhibit 10-90% rise times of 26

\pm

7 ns, achieve dynamic switching to -60 dB levels within microsecond timescales, and show pulse stability errors at the

10^{-3}

level. This work establishes a scalable platform for developing advanced large-scale optical control required in fault-tolerant quantum computers and other precision technologies.

Quantum frequency combs (QFCs) are essential to quantum photonic systems, enabling high dimensional entanglement in both temporal and frequency domains. Silicon photonics offers a promising platform for scalable and monolithic quantum photonic integrated circuits. However, its performance in QFC generation has been hindered by nonlinear losses and restricted phase-matching bandwidth. To overcome these challenges, we introduce a novel design strategy that combines high-order spatial mode engineering with an optimized free-carrier loss suppression structure in a silicon micro-ring resonator. This approach enables a broadband QFC spanning 150 nm, along with a high single pair photon brightness of 6.43 × 109 Hz/mW2/GHz and photon efficiency of 19.9 GHz/mW2 with the collection of 11 frequency bins. The generated QFCs produce heralded single photons with low heralded second-order correlation gh20=0.0024 and energy-time entangled photon pairs with high visibility of 98.19%. Consistent performance across wafer-scale multiple dies confirms the robustness and manufacturability of the designed device. This work establishes a scalable and high-yield pathway toward monolithic quantum photonic integrated circuits.

Integrated visible photonic engines for solid-state quantum defects provide a foundation for scalable quantum networks. While miniaturization is advancing, active manipulation remains limited by the difficulty of achieving simultaneous milliwatt-scale visible light generation and high-contrast modulation. Despite extensive efforts, the concurrent chip-scale realization of nonlinear frequency conversion and fast temporal gating for high-fidelity quantum control has remained elusive. Here, we demonstrate a monolithic thin-film lithium niobate (TFLN) platform integrating periodically poled frequency conversion with GHz-bandwidth electro-optic (EO) switching. The device delivers off-chip green-light power exceeding 1 mW with an extinction ratio (ER) of 42.2 dB, enabling coherent spin control and time-resolved lifetime measurements of individual nitrogen-vacancy (NV) centers in diamond through nanosecond gating. System performance is validated through pulsed optically detected magnetic resonance (ODMR), Rabi oscillations, and Ramsey interference, supported by time-tagged photon counting with nanosecond resolution. By unifying sufficient nonlinear light generation with high-speed active manipulation, this platform establishes a scalable framework for the realization of high-rate quantum communication nodes.