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arXiv:2607.29666

Release-free phononic crystal with strong microwave coupling

Joey Frey, Paul Burger, Trond Hjerpekjøn Haug, Johan Kolvik, Raphaël Van Laer

quant-phcond-mat.mes-hallphysics.app-phSubmitted Jul 31, 2026• Announced Aug 3, 2026
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Abstract

Phonons hold promise for storing and transferring quantum information, including in mechanically-mediated quantum interconnects between superconducting qubits and light. Phononic crystal cavities confine gigahertz sound to micron-scale volumes well matched to near-infrared light. So far, these devices have typically been suspended to suppress phononic radiation loss into the substrate, but suspension limits thermal anchoring leading to excess noise. Release-free phononic crystals have emerged as a way to address this challenge -- but had yet to be shown compatible with strong electromechanical interactions. Here, we demonstrate a release-free phononic crystal cavity strongly coupled to a high-impedance microwave resonator, with an electromechanical coupling rate $g_\mathrm{em}/(2π) \approx 30\,\text{MHz}$ that exceeds both the mechanical and microwave loss rates, leading to a cooperativity up to $\mathcal{C} \approx 180$ on resonance. In addition, our lithium niobate phononic crystals reach quality factors above $10^4$ at millikelvin temperature on both silicon and sapphire substrates. Our results establish release-free phononic crystals as compact, scalable interfaces between microwaves and gigahertz sound for emerging sensing, communication, and computing systems.

Comments
19 pages, 16 figures, 2 tables

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•Oct 29, 2018•0 citations
Phonons hold promise for storing and transferring quantum information, including in mechanically-mediated quantum interconnects between superconducting qubits and light. Phononic crystal cavities confine gigahertz sound to micron-scale volumes well matched to near-infrared light. So far, these devices have typically been suspended to suppress phononic radiation loss into the substrate, but suspension limits thermal anchoring leading to excess noise. Release-free phononic crystals have emerged as a way to address this challenge -- but had yet to be shown compatible with strong electromechanical interactions. Here, we demonstrate a release-free phononic crystal cavity strongly coupled to a high-impedance microwave resonator, with an electromechanical coupling rate gem/(2π)≈30 MHzg_\mathrm{em}/(2π) \approx 30\,\text{MHz}gem​/(2π)≈30MHz that exceeds both the mechanical and microwave loss rates, leading to a cooperativity up to C≈180\mathcal{C} \approx 180C≈180 on resonance. In addition, our lithium niobate phononic crystals reach quality factors above 10410^4104 at millikelvin temperature on both silicon and sapphire substrates. Our results establish release-free phononic crystals as compact, scalable interfaces between microwaves and gigahertz sound for emerging sensing, communication, and computing systems.
Quantum transduction between microwave and optical photons offers the potential to merge the long-range connectivity of optical photons with the deterministic quantum operations of superconducting microwave qubits. A promising approach to achieving this uses an intermediary mechanical mode along with piezo-optomechanical interactions. Traditionally, these transducers are suspended to confine mechanical fields, but this complicates manufacturing and comes with the major challenge of poor thermal anchoring and a trade-off between noise and efficiency. To overcome these issues, we introduce the—to our knowledge—first design of a release-free electro-optomechanical quantum transducer. Our release-free, i.e., non-suspended, design leverages a silicon-on-sapphire platform. It combines release-free lithium niobate electromechanical crystals with silicon optomechanical crystals on a sapphire substrate, optimizing thermal anchoring and microwave and mechanical coherence. Despite departing from the traditional suspended transducer paradigm, our release-free design achieves coupling rates sufficient for quantum-level interactions between microwave photons, phonons, and optical photons. Unconventionally, it utilizes high-wavevector mechanical modes tightly confined to the chip surface. Beyond quantum science and engineering, this platform and its design principles could also propel low-power acousto-optic systems in integrated photonics.
Electro-optic modulation is central to classical optical communications and emerging quantum technologies. High-confinement optomechanical crystal modulators enable microwave-optical transduction through strong optomechanical interactions and offer a promising interface between superconducting qubits and optical fibers. However, their performance is limited by thermal noise from optical absorption. Release-free optomechanical crystals provide improved thermal anchoring but have not yet been integrated into a microwave-optical transducer. Here, we demonstrate a release-free electro-optomechanical transducer combining strong optomechanical interactions in silicon with the efficient piezoelectricity of lithium niobate via micro-transfer printing. We observe electro- and optomechanical coupling rates compatible with quantum-level operation when co-integrated with a superconducting microwave circuit. This advance moves release-free electro-optomechanical devices toward practical microwave-optical interfaces.
Interactions between light and mechanics provide a powerful interface between optical and microwave-frequency signals, with applications spanning classical signal processing and quantum technologies. High-performance optomechanical devices require both strong photon-phonon coupling and tolerance to parasitic laser heating. Release-free optomechanical crystals provide improved thermal anchoring compared to suspended nanobeams, but have so far exhibited weaker vacuum optomechanical coupling rates, leaving a trade-off between coupling strength and thermal robustness. Here, we largely close this gap: we design and experimentally demonstrate a release-free silicon optomechanical crystal with a record vacuum optomechanical coupling rate of about gOM/(2π)=800g_\text{OM} / (2 π) = 800gOM​/(2π)=800 kHz, comparable to suspended state-of-the-art devices. The resulting optomechanical scattering rate ΓOM/(2π)=1.1Γ_\text{OM}/(2 π)= 1.1ΓOM​/(2π)=1.1 kHz is nearly twice that of previous release-free implementations. This performance is achieved by combining physics-guided human intuition with a multiphysics inverse-design algorithm introduced here for resonant optomechanical structures. Beyond the specific device demonstrated, the inverse-design framework is applicable to co-optimizing optical and mechanical resonances and eigenmodes more broadly. These results strengthen release-free optomechanical crystals as a platform for fast, low-noise classical and quantum optomechanics.
Piezoelectric nanomechanical resonators operating at gigahertz frequencies are a promising platform for quantum information processing and precision sensing, but phonon lifetimes have been limited to the microsecond range, widely attributed to the higher intrinsic loss of piezoelectric materials. Here we show that this limitation is not fundamental. Using a fabrication process informed by recent studies of defect-mediated loss in lithium niobate, we combine chemical restoration of ion-milled surfaces with a shadow-mask metallization process to produce lithium niobate phononic crystal resonators with inferred internal phonon lifetimes of up to 21 milliseconds at 3.6 gigahertz, corresponding to quality factors exceeding 4×1084\times10^84×108 (f⋅Qi>1018f\cdot Q_i > 10^{18}f⋅Qi​>1018) at millikelvin temperatures. By systematically varying the electrode-to-resonator spacing, we demonstrate that the measured lifetime is set by external coupling between the device and the measurement circuit rather than material loss. This establishes that lithium niobate, once fabrication-induced surface damage is removed, achieves an intrinsic quality comparable to the best mechanical materials while remaining an intrinsically piezoelectric platform with strong electromechanical coupling.
Sub-terahertz electromechanics offers a promising route to probe mechanical quantum motion at experimentally friendly Kelvin temperatures. Traditionally, high-frequency mechanical resonators rely on advanced microfabrication to shape complex microstructures, while bulk crystals have been largely overlooked due to their large inertia and challenging transduction at such frequencies. Here we show that bulk lithium niobate can host mechanically accessible modes near 100 GHz when coupled via plug-and-play three-dimensional microwave cavities. This approach enables efficient, non-contact excitation of centimeter-scale, milligram-mass vibrational modes across 7.0--110 GHz, with mechanical quality factors up to 30,000 at W band. Furthermore, using a frequency-tunable superconducting niobium cavity at 4 K, we demonstrate strong coupling between a microwave cavity mode and multiple mechanical modes, enabling coherent energy exchange between microwave photons and mechanical phonons with cooperativity up to 16.6 at 110 GHz. These results establish a versatile platform for accessing massive high-frequency mechanical modes and for precision tests of mechanical quantum physics at elevated temperatures.
Microscale and nanoscale mechanical resonators have been used in advanced technological applications, from high precision time keeping and mass sensing, to processing high frequency signals in mobile communications. In the last few decades, they have been an important part of progress in the field of quantum information and metrology and have been proposed as quantum memories or transducers for measuring or connecting different types of quantum systems. The field of cavity optomechanics and electromechanics is concerned with coupling the electromagnetic field of a resonant optical cavity or electrical circuit to mechanical motion. These systems provide potential means to control and engineer the state of a mechanical object at the quantum level. This thesis contains the description of mechanical systems in megahertz to a few hundred megahertz frequency range formed by nano-fabricating photonic, phononic, and electrical circuits on a chip. These structures are designed to provide a large radiation pressure coupling between mechanical motion and electromagnetic fields to address and manipulate motional degrees of freedom. Qualitatively novel quantum effects are expected when one takes a step beyond linear coupling and exploits higher order interactions. To that end, we integrate electrical, mechanical and photonic structures in a multimode photonic crystal structure to observe "x2-coupling", where the optical cavity frequency is coupled to the square of the mechanical displacement. Moreover, we have developed two integrated on-chip platforms based on Si3N4 and Si nanomembranes capable of interfacing superconducting qubits and optical photons and realizing reversible microwave-to-optical conversion. We employ radiation pressure to cool these mechanical resonators to their quantum ground state. Finally, we demonstrate a form of electromechanical crystal for coupling microwave photons and hypersonic phonons of frequency ωm/2π = 0.425 GHz by capacitively coupling a phononic crystal acoustic cavity to a superconducting microwave resonator. Moving to higher frequency acoustic cavities not only facilitates the integration of electromechanical circuits and nanophotonic systems capable of operation in the resolved sideband limit of optomechanics for noise-free quantum signal conversion, but it opens up the possibility of using phonons as information carriers via phononic circuits. Utilizing a two-photon resonance condition for efficient microwave pumping and phononic bandgap shield to eliminate acoustic radiation, we achieve large cooperative electromechanical coupling (C ≈ 30) and intrinsic decay time of 2.3 ms. Moreover, electrical read-out of the phonon occupancy shows that the acoustic mode thermalizes close to its quantum ground-state of motion (phonon occupancy nm=1.5) at a fridge temperature of Tf = 10 mK. We conclude by considering several designs and fabrication improvements to the hypersonic electromechanical crystals that would enable them to perform quantum conversion between the electrical and acoustic domain.