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arXiv:2607.10737

Accessing 100 GHz Mechanical Modes in Bulk Crystals at Cryogenic Temperatures

Boxuan Tian, Jiacheng Xie, Hong X. Tang

physics.app-phquant-phSubmitted Jul 12, 2026• Announced Jul 14, 2026
arXivHTMLPDF

Abstract

Sub-terahertz electromechanics offers a promising route to probe mechanical quantum motion at experimentally friendly Kelvin temperatures. Traditionally, high-frequency mechanical resonators rely on advanced microfabrication to shape complex microstructures, while bulk crystals have been largely overlooked due to their large inertia and challenging transduction at such frequencies. Here we show that bulk lithium niobate can host mechanically accessible modes near 100 GHz when coupled via plug-and-play three-dimensional microwave cavities. This approach enables efficient, non-contact excitation of centimeter-scale, milligram-mass vibrational modes across 7.0--110 GHz, with mechanical quality factors up to 30,000 at W band. Furthermore, using a frequency-tunable superconducting niobium cavity at 4 K, we demonstrate strong coupling between a microwave cavity mode and multiple mechanical modes, enabling coherent energy exchange between microwave photons and mechanical phonons with cooperativity up to 16.6 at 110 GHz. These results establish a versatile platform for accessing massive high-frequency mechanical modes and for precision tests of mechanical quantum physics at elevated temperatures.

AI Summary

The paper asks whether bulk crystals can support accessible, low-loss mechanical modes near 100 GHz, where thermal occupation becomes small at Kelvin temperatures. It couples high-order thickness-shear modes of lithium niobate disks to three-dimensional microwave cavities through non-contact piezoelectric transduction. Aperture-based cavities concentrate the microwave field within the crystal; superconducting niobium cavities and dielectric-wire frequency tuning enable measurements of photon–phonon hybridization. Microwave reflection spectra resolve mechanical modes across 7–110 GHz, with estimated effective masses of 0.21–5.0 mg. Mode assignments are supported by regularly spaced resonances whose spacing agrees with the crystal thickness. Cryogenic mechanical quality factors reach approximately 30,000 in W band, with a highest reported $fQ$ product of $3.33\times10^{15}$ Hz. At approximately 85 and 110 GHz, tuning the cavity across successive mechanical resonances produces avoided crossings. Multimode input–output fits give coupling splittings $2g/(2\pi)$ of 17.08 and 36.24 MHz, respectively, exceeding the corresponding cavity and mechanical linewidths, with cooperativities of 12.28 and 16.60. Rotating the cavity also reveals two shear-polarization families with a 0.558% difference in free spectral range. The measurements establish linear spectral strong coupling, rather than nonclassical mechanical-state preparation or time-domain quantum-state transfer. At 110 GHz and 4.1 K, the inferred equilibrium thermal occupation is $\bar n\approx0.38$, but quantum-noise-limited thermometry is not demonstrated; the paper identifies suitable sub-THz quantum-limited amplifiers as a requirement. Cavity quality is reported to be limited by cryocooler cooling capacity, with improvement anticipated at lower temperature.

Little sign of AI-generated textOverclaims

Error found: The abstract calls the mechanical modes “centimeter-scale,” although the reported LN disk diameter is 4.5 mm and the mechanical mode areas are 2.5–11 mm², supporting millimeter-scale rather than centimeter-scale modes.

Written by gpt-6.1-sol from the paper's full text. Automated: it can be wrong.

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Sub-terahertz electromechanics offers a promising route to probe mechanical quantum motion at experimentally friendly Kelvin temperatures. Traditionally, high-frequency mechanical resonators rely on advanced microfabrication to shape complex microstructures, while bulk crystals have been largely overlooked due to their large inertia and challenging transduction at such frequencies. Here we show that bulk lithium niobate can host mechanically accessible modes near 100 GHz when coupled via plug-and-play three-dimensional microwave cavities. This approach enables efficient, non-contact excitation of centimeter-scale, milligram-mass vibrational modes across 7.0--110 GHz, with mechanical quality factors up to 30,000 at W band. Furthermore, using a frequency-tunable superconducting niobium cavity at 4 K, we demonstrate strong coupling between a microwave cavity mode and multiple mechanical modes, enabling coherent energy exchange between microwave photons and mechanical phonons with cooperativity up to 16.6 at 110 GHz. These results establish a versatile platform for accessing massive high-frequency mechanical modes and for precision tests of mechanical quantum physics at elevated temperatures.
The paper asks whether bulk crystals can support accessible, low-loss mechanical modes near 100 GHz, where thermal occupation becomes small at Kelvin temperatures. It couples high-order thickness-shear modes of lithium niobate disks to three-dimensional microwave cavities through non-contact piezoelectric transduction. Aperture-based cavities concentrate the microwave field within the crystal; superconducting niobium cavities and dielectric-wire frequency tuning enable measurements of photon–phonon hybridization.
Microwave reflection spectra resolve mechanical modes across 7–110 GHz, with estimated effective masses of 0.21–5.0 mg. Mode assignments are supported by regularly spaced resonances whose spacing agrees with the crystal thickness. Cryogenic mechanical quality factors reach approximately 30,000 in W band, with a highest reported fQfQfQ product of 3.33×10153.33\times10^{15}3.33×1015 Hz. At approximately 85 and 110 GHz, tuning the cavity across successive mechanical resonances produces avoided crossings. Multimode input–output fits give coupling splittings 2g/(2π)2g/(2\pi)2g/(2π) of 17.08 and 36.24 MHz, respectively, exceeding the corresponding cavity and mechanical linewidths, with cooperativities of 12.28 and 16.60. Rotating the cavity also reveals two shear-polarization families with a 0.558% difference in free spectral range.
The measurements establish linear spectral strong coupling, rather than nonclassical mechanical-state preparation or time-domain quantum-state transfer. At 110 GHz and 4.1 K, the inferred equilibrium thermal occupation is nˉ≈0.38\bar n\approx0.38nˉ≈0.38, but quantum-noise-limited thermometry is not demonstrated; the paper identifies suitable sub-THz quantum-limited amplifiers as a requirement. Cavity quality is reported to be limited by cryocooler cooling capacity, with improvement anticipated at lower temperature.
High-frequency mechanical resonators subjected to low thermal phonon occupancy are easier to be prepared to the ground state by direct cryogenic cooling. Their extreme stiffness, however, poses a significant challenge for external interrogations. Here we demonstrate a superconducting cavity piezoelectromechanical system in which multiple modes of a bulk acoustic resonator oscillating at 10 GHz are coupled to a planar microwave superconducting resonator with a cooperativity exceeding 2×10^{3}, deep in the strong coupling regime. By implementation of the noncontact coupling scheme to reduce mechanical dissipation, the system exhibits excellent coherence characterized by a frequency-quality-factor product of 7.5×10^{15} Hz. Interesting dynamics of classical temporal oscillations of the microwave energy is observed, implying the coherent conversion between phonons and photons. The demonstrated high-frequency cavity piezoelectromechanics is compatible with superconducting qubits, representing an important step towards hybrid quantum systems.
Phonons hold promise for storing and transferring quantum information, including in mechanically-mediated quantum interconnects between superconducting qubits and light. Phononic crystal cavities confine gigahertz sound to micron-scale volumes well matched to near-infrared light. So far, these devices have typically been suspended to suppress phononic radiation loss into the substrate, but suspension limits thermal anchoring leading to excess noise. Release-free phononic crystals have emerged as a way to address this challenge -- but had yet to be shown compatible with strong electromechanical interactions. Here, we demonstrate a release-free phononic crystal cavity strongly coupled to a high-impedance microwave resonator, with an electromechanical coupling rate gem/(2π)≈30 MHzg_\mathrm{em}/(2π) \approx 30\,\text{MHz}gem​/(2π)≈30MHz that exceeds both the mechanical and microwave loss rates, leading to a cooperativity up to C≈180\mathcal{C} \approx 180C≈180 on resonance. In addition, our lithium niobate phononic crystals reach quality factors above 10410^4104 at millikelvin temperature on both silicon and sapphire substrates. Our results establish release-free phononic crystals as compact, scalable interfaces between microwaves and gigahertz sound for emerging sensing, communication, and computing systems.
Phonon modes at microwave frequencies can be cooled to their quantum ground state using conventional cryogenic refrigeration, providing a convenient way to study and manipulate quantum states at the single phonon level. Phonons are of particular interest because mechanical deformations can mediate interactions with a wide range of different quantum systems, including solid-state defects, superconducting qubits, and optical photons when using optomechanically active constructs. Phonons, thus, hold promise for quantum-focused applications as diverse as sensing, information processing, and communication. Here, we describe a piezoelectric quantum bulk acoustic resonator (QBAR) with a 4.88 GHz resonant frequency, which, at cryogenic temperatures, displays large electromechanical coupling strength combined with a high intrinsic mechanical quality factor, Qi≈4.3×104. Using a recently developed flip-chip technique, we couple this QBAR resonator to a superconducting qubit on a separate die and demonstrate the quantum control of the mechanics in the coupled system. This approach promises a facile and flexible experimental approach to quantum acoustics and hybrid quantum systems.
Microscale and nanoscale mechanical resonators have been used in advanced technological applications, from high precision time keeping and mass sensing, to processing high frequency signals in mobile communications. In the last few decades, they have been an important part of progress in the field of quantum information and metrology and have been proposed as quantum memories or transducers for measuring or connecting different types of quantum systems. The field of cavity optomechanics and electromechanics is concerned with coupling the electromagnetic field of a resonant optical cavity or electrical circuit to mechanical motion. These systems provide potential means to control and engineer the state of a mechanical object at the quantum level. This thesis contains the description of mechanical systems in megahertz to a few hundred megahertz frequency range formed by nano-fabricating photonic, phononic, and electrical circuits on a chip. These structures are designed to provide a large radiation pressure coupling between mechanical motion and electromagnetic fields to address and manipulate motional degrees of freedom. Qualitatively novel quantum effects are expected when one takes a step beyond linear coupling and exploits higher order interactions. To that end, we integrate electrical, mechanical and photonic structures in a multimode photonic crystal structure to observe "x2-coupling", where the optical cavity frequency is coupled to the square of the mechanical displacement. Moreover, we have developed two integrated on-chip platforms based on Si3N4 and Si nanomembranes capable of interfacing superconducting qubits and optical photons and realizing reversible microwave-to-optical conversion. We employ radiation pressure to cool these mechanical resonators to their quantum ground state. Finally, we demonstrate a form of electromechanical crystal for coupling microwave photons and hypersonic phonons of frequency ωm/2π = 0.425 GHz by capacitively coupling a phononic crystal acoustic cavity to a superconducting microwave resonator. Moving to higher frequency acoustic cavities not only facilitates the integration of electromechanical circuits and nanophotonic systems capable of operation in the resolved sideband limit of optomechanics for noise-free quantum signal conversion, but it opens up the possibility of using phonons as information carriers via phononic circuits. Utilizing a two-photon resonance condition for efficient microwave pumping and phononic bandgap shield to eliminate acoustic radiation, we achieve large cooperative electromechanical coupling (C ≈ 30) and intrinsic decay time of 2.3 ms. Moreover, electrical read-out of the phonon occupancy shows that the acoustic mode thermalizes close to its quantum ground-state of motion (phonon occupancy nm=1.5) at a fridge temperature of Tf = 10 mK. We conclude by considering several designs and fabrication improvements to the hypersonic electromechanical crystals that would enable them to perform quantum conversion between the electrical and acoustic domain.
Abstract Hybrid quantum systems are essential for the realization of distributed quantum networks. In particular, piezo-mechanics operating at typical superconducting qubit frequencies features low thermal excitations, and offers an appealing platform to bridge superconducting quantum processors and optical telecommunication channels. However, integrating superconducting and optomechanical elements at cryogenic temperatures with sufficiently strong interactions remains a tremendous challenge. Here, we report an integrated superconducting cavity piezo-optomechanical platform where 10 GHz phonons are resonantly coupled with photons in a superconducting cavity and a nanophotonic cavity at the same time. Taking advantage of the large piezo-mechanical cooperativity (Cem ~7) and the enhanced optomechanical coupling boosted by a pulsed optical pump, we demonstrate coherent interactions at cryogenic temperatures via the observation of efficient microwave-optical photon conversion. This hybrid interface makes a substantial step towards quantum communication at large scale, as well as novel explorations in microwave-optical photon entanglement and quantum sensing mediated by gigahertz phonons.
Cavity electro-(opto-)mechanics allows us to access not only single isolated but also multiple mechanical modes in a massive object. Here we develop a multi-mode electromechanical system in which a several membrane vibrational modes are coupled to a three-dimensional loop-gap superconducting microwave cavity. The tight confinement of the electric field across a mechanically-compliant narrow-gap capacitor brings the system into the quantum strong coupling regime under a red-sideband pump field. We demonstrate strong coupling between two mechanical modes, which is induced by two-tone parametric drives and mediated by a virtual photon in the cavity. The tunable inter-mechanical-mode coupling can be used to generate entanglement between the mechanical modes.