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arXiv:2606.26910

An ultralow-loss integrated photonic platform for discrete-variable quantum information processing

Yi-Han Luo, Ruiyang Chen, Zeying Zhong, Sanli Huang, Sicheng Zeng, Zhenyuan Shang, Yue Hu, Zhen Chen, Yuan Chen, Xue Bai, Junqiu Liu

quant-phphysics.opticsSubmitted Jun 25, 2026• Announced Jun 26, 2026• 0 citations
v1 · Jun 25, 2026v2 · Jul 6, 2026v3 · Jul 20, 2026
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Abstract

Photonic integrated circuits offer a scalable and robust route toward quantum information technologies by consolidating photon sources and linear optical networks onto compact, wafer-manufacturable chips. Although silicon photonics has enabled diverse discrete-variable quantum breakthroughs -- spanning multiphoton entanglement, quantum networking, and photonic qubit fusion for quantum computing -- scaling these platforms beyond proof-of-principle demonstrations remains severely constrained by a critical system-level bottleneck. Optical loss compounds rapidly across photon generation, routing, and state analysis, causing multiphoton generation probabilities to plummet exponentially as circuit depth and complexity grow. Here we overcome this rate-loss barrier by demonstrating a monolithic, ultralow-loss silicon nitride (Si$_3$N$_4$) integrated photonic platform engineered for high-performance discrete-variable quantum information processing. Our architecture seamlessly integrates narrowband photon-pair sources with low-loss qubit-fusion circuits and reconfigurable state-analysis interferometers. The on-chip sources prepare Einstein-Podolsky-Rosen (EPR) states with a fidelity of 0.9875(3) and exhibit near-unity photon indistinguishability, yielding a heralded Hong-Ou-Mandel interference visibility of 0.990(6). By executing on-chip fusion of two EPR states, we synthesize and characterize four-photon Greenberger-Horne-Zeilinger states with a record fidelity of 0.943(8) and a fourfold count rate of 27 Hz -- more than two orders of magnitude higher than previous silicon-photonic implementations. Combined with standard CMOS-compatible fabrication on 150-mm-diameter wafers, these results establish ultralow-loss Si$_3$N$_4$ integrated photonics as a definitive, manufacturable platform for deployable, large-scale quantum information processors.

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Photonic integrated circuits offer a scalable and robust route toward quantum information technologies by consolidating photon sources and linear optical networks onto compact, wafer-manufacturable chips. Although silicon photonics has enabled diverse discrete-variable quantum breakthroughs -- spanning multiphoton entanglement, quantum networking, and photonic qubit fusion for quantum computing -- scaling these platforms beyond proof-of-principle demonstrations remains severely constrained by a critical system-level bottleneck. Optical loss compounds rapidly across photon generation, routing, and state analysis, causing multiphoton generation probabilities to plummet exponentially as circuit depth and complexity grow. Here we overcome this rate-loss barrier by demonstrating a monolithic, ultralow-loss silicon nitride (Si3_33​N4_44​) integrated photonic platform engineered for high-performance discrete-variable quantum information processing. Our architecture seamlessly integrates narrowband photon-pair sources with low-loss qubit-fusion circuits and reconfigurable state-analysis interferometers. The on-chip sources prepare Einstein-Podolsky-Rosen (EPR) states with a fidelity of 0.9875(3) and exhibit near-unity photon indistinguishability, yielding a heralded Hong-Ou-Mandel interference visibility of 0.990(6). By executing on-chip fusion of two EPR states, we synthesize and characterize four-photon Greenberger-Horne-Zeilinger states with a record fidelity of 0.943(8) and a fourfold count rate of 27 Hz -- more than two orders of magnitude higher than previous silicon-photonic implementations. Combined with standard CMOS-compatible fabrication on 150-mm-diameter wafers, these results establish ultralow-loss Si3_33​N4_44​ integrated photonics as a definitive, manufacturable platform for deployable, large-scale quantum information processors.
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Photon-pair sources are critical building blocks for photonic quantum systems. Leveraging Kerr nonlinearity and cavity-enhanced spontaneous four-wave mixing, chip-scale photon-pair sources can be created using microresonators built on photonic integrated circuit. For practical applications, a high microresonator quality factor Q is mandatory to magnify photon-pair sources' brightness and reduce their linewidth. The former is proportional to Q^{4}, while the latter is inversely proportional to Q. Here, we demonstrate an integrated, microresonator-based, narrowband photon-pair source. The integrated microresonator, made of silicon nitride and fabricated using a standard CMOS foundry process, features ultralow loss down to 0.03 dB/cm and intrinsic Q factor exceeding 10^{7}. The photon-pair source has brightness of 1.17×10^{9} Hz/mW^{2}/GHz and linewidth of 25.9 MHz, both of which are record values for silicon-photonics-based quantum light source. It further enables a heralded single-photon source with heralded second-order correlation g_{h}^{(2)}(0)=0.0037(5), as well as an energy-time entanglement source with a raw visibility of 0.973(9). Our work evidences the global potential of ultralow-loss integrated photonics to create novel quantum light sources and circuits, catalyzing efficient, compact, and robust interfaces to quantum communication and networks.
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