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arXiv:2605.05452 · IEEE Transactions on Applied Superconductivity

On-Chip Resonator for Nonlinear Kinetic Inductance Characterization and Future Spectrometry Applications

Patrick Ashworth, Peter S. Barry, Chris S. Benson, Harry Gordon-Moys, Izaak Morris

Published Apr 9, 2026• 0 citations
arXivHTMLPDF

Abstract

This work focuses on the development and demonstration of tunable superconducting on-chip resonator, leveraging the intrinsic current-dependent non-linear kinetic inductance of superconducting aluminium, and investigating the effect of oxygen content. Thin films are deposited using standard metal evaporation. We present results from a comprehensive study based on a series of evaporated Al thin films. This research aims to inform and constrain optimisation strategies for the design of mm-wave on-chip spectrometers, particularly regarding yield, resolution, and efficiency. By systematically varying film stoichiometry, we use a series of DC measurements to extract fundamental film properties such as resistivity, critical current and critical temperature. Furthermore, we employ low-loss DC-coupled microwave resonators to characterise both their microwave properties and the non-linear kinetic inductance, comparing these findings to a determined non-linear kinetic model. Finally, we discuss the possibility of usage in a parametric amplifier.

DOI
10.1109/tasc.2026.3682586

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This work focuses on the development and demonstration of tunable superconducting on-chip resonator, leveraging the intrinsic current-dependent non-linear kinetic inductance of superconducting aluminium, and investigating the effect of oxygen content. Thin films are deposited using standard metal evaporation. We present results from a comprehensive study based on a series of evaporated Al thin films. This research aims to inform and constrain optimisation strategies for the design of mm-wave on-chip spectrometers, particularly regarding yield, resolution, and efficiency. By systematically varying film stoichiometry, we use a series of DC measurements to extract fundamental film properties such as resistivity, critical current and critical temperature. Furthermore, we employ low-loss DC-coupled microwave resonators to characterise both their microwave properties and the non-linear kinetic inductance, comparing these findings to a determined non-linear kinetic model. Finally, we discuss the possibility of usage in a parametric amplifier.
We report on the fabrication and characterization of superconducting magnesium diboride (MgB2) thin films intended for quantum-limited devices based on non-linear kinetic inductance (NLKI) such as parametric amplifiers with either elevated operating temperatures or expanded frequency ranges. In order to characterize the MgB2 material properties, we have fabricated coplanar waveguide (CPW) transmission lines and microwave resonators using ≈40 nm thick MgB2 films with a measured kinetic inductance of ∼5.5 pH/□ and internal quality factors Qi≈3×104 at 4.2 K. We measure the NLKI in MgB2 by applying a DC bias to a 6 cm long by 4 μm wide CPW transmission line and measuring the resulting phase delay caused by the current dependent NLKI. We also measure the current dependent NLKI through CPW resonators that shift down in frequency with increased power applied through the CPW feedline. Using these measurements, we calculate the characteristic non-linear current parameter, I*, for multiple CPW geometries. We find values for corresponding current density, J*=12–22 MA/cm2, and a ratio of the critical current to the non-linear current parameter, IC/I*=0.14–0.26, similar to or higher than values for other superconductors such as NbTiN and TiN.
We present a design and implementation of a frequency-tunable superconducting resonator. The resonance frequency tunability is achieved by flux-coupling a superconducting LC loop to a current-biased feedline; the resulting screening current leads to a change of the kinetic inductance and shift in the resonance frequency. The thin-film aluminum resonator consists of an interdigitated capacitor and thin line inductors forming a closed superconducting loop. The magnetic flux from the nearby niobium current feedline induces Meissner shielding currents in the resonator loop leading to a change in the kinetic part of the total inductance of the resonator. We demonstrate continuous frequency tuning within 160 MHz around the resonant frequency of 2.7 GHz. We show that: (1) frequency up-conversion is achieved when a kilohertz ac modulation signal is superimposed onto the dc bias resulting in sidebands to the resonator tone; (2) three-wave mixing is attained by parametrically pumping the nonlinear kinetic inductance using a strong rf pump signal in the feedline. The simple architecture is amenable to large-array multiplexing and on-chip integration with other circuit components. The concept could be applied in flux magnetometers, up-converters, and parametric amplifiers operating above 4 K when alternative high-critical-temperature material with high kinetic inductance is used.
We present a design of a tunable on-chip resonator that can benchmark the nonlinear kinetic inductance (KI) properties of various superconducting thin films in the W-band (75-110 GHz), for quantum device applications. Our design uses a quarter-wavelength microstrip resonator with ground plane cutout for transmission measurements, WR10 input & output ports, DC bias line and radial-stub notch filters to suppress RF leakage into the bias lines. Our resonator design procedure uses simulations with perfect electric conductors as an initial reference case, which will be later replaced by finite-impedance material to include the effect of sheet inductance.
Microwave kinetic inductance detectors (MKID) are superconducting broadband direct detectors. If a superconducting thin film patterned into a resonator is illuminated with photons, Cooper pairs break up and the kinetic inductance of the film changes. This shifts the resonance frequency downwards and the dissipation of the resonator increases, which can be detected in the phase and amplitude of a transmitted signal. \n \nIn this thesis, a waveguide coupled MKID is designed and simulated. 350 GHz radiation is coupled into a copper waveguide via a horn antenna. A waveguide probe leads the signal onto a 9 µm silicon membrane where it is absorbed in a 40 nm superconducting aluminum film which is the inductive part of a superconducting resonator. The capacitor of the resonator is made of niobium. Two versions of the device are developed, a transmission line resonator and a lumped element resonator design. The new design will enable an accurate understanding of the optical sensitivity of MKIDs and allow comparison of different resonator materials. Since two different resonator types are used, the direct comparison of transmission line and lumped resonators will also be possible. \n \nA measurement setup is developed including an ADR cryostat to cool MKID devices down to below 40 mK. An analog readout system using either a vector network analyzer or an IQ mixer is designed and built. The necessary software to control the ADR, the temperature monitoring, the readout signal generation and detection and the signal acquisition of the setup is also developed. \n \nThe waveguide coupled MKID design is fabricated in our in-house microfabrication laboratory and measured in the new setup. In my measurements, the devices do not show a resonance feature. The VNA and DC measurements are analyzed to determine a plausible hypothesis of the failure. The devices are diagnosed for critical issues during fabrication which will be addressed in a future iteration. \n \nTo verify the measurement setup, a test device of the IRAM NIKA 2 MKID camera is measured and the complete analysis pipeline is exercised. The quasi-particle lifetime in the aluminum thin films is measured and a dark and optical noise equivalent power are determined. The results are within the uncertainty comparable to measurements of IRAM themselves. \n \nA test chip designed in my master thesis that contains eight NbTiN resonators is measured in the new setup and non-linear effects under strong readout power are studied. Parametric amplification and oscillation of a resonator are shown qualitatively.
Abstract We present a model and experimental realization of coplanar superconducting resonators terminated by a shunting kinetic inductance bridge made of ultra-thin Al films. The fabrication process that we propose allows us to create very homogeneous films, which makes them suitable for many applications in quantum devices. Due to the specific properties of the films, the resonators exhibit a Duffing oscillator behavior resulting in bifurcations and interactions between different power sources, which was previously observed in similar systems. Moreover, since the nonlinearity of such a system is concentrated at the bridge, while the wave propagates in a linear environment, it is possible to propose a simple model that accurately describes its behavior. We show that, when resonators are operated within a notch-port architecture, our model has a closed-form solution for the transmission coefficient and allows one to accurately extract parameters of the system, including the kinetic inductance of the bridge and its depairing current. Potential applications of such systems include tunable resonators, photon detectors, bifurcation and parametric amplifiers, as well as a measurement device for studying the properties of thin films.
We describe a novel class of devices based on the nonlinearity of the kinetic inductance of a superconducting thin film. By placing a current-dependent inductance in a microwave resonator, small currents can be measured through their effect on the resonator’s frequency. By using a high-resistivity material for the film and nanowires as kinetic inductors, we can achieve a large coefficient of nonlinearity to improve device sensitivity. We demonstrate a current sensitivity of 8 pA/√Hz, making this device useful for transition-edge sensor (TES) readout and other cutting-edge applications. An advantage of these devices is their natural ability to be multiplexed in the frequency domain, enabling large detector arrays for TES-based instruments. A traveling-wave version of the device, consisting of a thin-film microwave transmission line, is also sensitive to small currents as they change the phase length of the line due to their effect on its inductance. We demonstrate a current sensitivity of 5 pA/√Hz for this version of the device, making it also suitable for TES readout as well as other current-detection applications. It has the advantage of multi-gigahertz bandwidth and greater dynamic range, offering a different approach to the resonator version of the device. Finally, we also demonstrate a transmission-line resonator version of the device that combines some of the advantages of the nanowire resonator and the traveling-wave device. This version of the device has high dynamic range but can also be easily multiplexed in the frequency domain. A lumped-element resonator similar to the first device can be placed in a loop configuration to make it sensitive to magnetic fields. We demonstrate an example of such a device whose sensitivity could ultimately reach levels similar to those of state-of-the-art DC SQUIDs, making it potentially useful for many magnetometry applications given its ease of multiplexing. Finally, a similar microwave resonator is shown to exhibit parametric gain of up to 29 dB in the presence of a strong pump tone. The noise performance of this parametric amplifier approaches the quantum limit, making it useful for applications in quantum information and metrology.