Design and Operation of Wafer-Scale Packages Containing >500 Superconducting Qubits
Oscar W. Kennedy, Waqas Ahmad, Robert Armstrong, Amir Awawdeh, Anirban Bose, Kevin G. Crawford, Sergey Danilin, William D. David, Hamid El Maazouz, Darren J. Hayton, George B. Long, Alexey Lyapin, Scott A. Manifold, Kowsar Shahbazi, Ryan Wesley, Evan Wong, Connor D. Shelly
quant-phphysics.app-phphysics.ins-detSubmitted Feb 13, 2026• Announced Feb 16, 2026• 0 citations
Packages capable of supporting large arrays of high-coherence superconducting qubits are vital for the realisation of fault-tolerant quantum computers and the necessary high-throughput metrology required to optimise fabrication and manufacturing processes. We present a wafer-scale packaging architecture supporting over 500 qubits on a single 3-inch die. The package is engineered to suppress parasitic RF modes, and to mitigate material loss through simulation-informed design while managing differential thermal contraction to ensure robust operation at millikelvin temperatures. System-level heat-load calculations from a large wiring payload show this package may be operated in commercial dilution refrigerators. Measurements of the qubits loaded into the package show median $T_1$, $T_{2e} \sim 100~μ$s ($\sim$100 qubits) alongside readout with median fidelity of 97.5% (54 qubits) and a median qubit temperature of 36 mK (54 qubits). These results validate the performance of these packages and demonstrate that large-scale integration can be achieved without compromising device performance. Finally, we highlight the utility of these packages as a tool for high throughput feedback on qubit figures of merit over large sample sizes, allowing identification of performance outliers in the tails of the coherence distribution, a critical capability for informing fabrication and manufacture of high-quality quantum qubits and quantum processors.
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12 page main text containing 7 figures. 7 page SI with 6 figures
Packages capable of supporting large arrays of high-coherence superconducting qubits are vital for the realisation of fault-tolerant quantum computers and the necessary high-throughput metrology required to optimise fabrication and manufacturing processes. We present a wafer-scale packaging architecture supporting over 500 qubits on a single 3-inch die. The package is engineered to suppress parasitic RF modes, and to mitigate material loss through simulation-informed design while managing differential thermal contraction to ensure robust operation at millikelvin temperatures. System-level heat-load calculations from a large wiring payload show this package may be operated in commercial dilution refrigerators. Measurements of the qubits loaded into the package show median T1, T2e∼100μs (∼100 qubits) alongside readout with median fidelity of 97.5% (54 qubits) and a median qubit temperature of 36 mK (54 qubits). These results validate the performance of these packages and demonstrate that large-scale integration can be achieved without compromising device performance. Finally, we highlight the utility of these packages as a tool for high throughput feedback on qubit figures of merit over large sample sizes, allowing identification of performance outliers in the tails of the coherence distribution, a critical capability for informing fabrication and manufacture of high-quality quantum qubits and quantum processors.
We demonstrate a pogo pin package for a superconducting quantum processor specifically designed with a nontrivial layout topology (e.g., a center qubit that cannot be accessed from the sides of the chip). Two experiments on two nominally identical superconducting quantum processors in pogo packages, which use commercially available parts and require modest machining tolerances, are performed at low temperature (10 mK) in a dilution refrigerator and both found to behave comparably to processors in standard planar packages with wirebonds where control and readout signals come in from the edges. Single- and two-qubit gate errors are also characterized via randomized benchmarking, exhibiting similar error rates as in standard packages, opening the possibility of integrating pogo pin packaging with extensible qubit architectures.
Solid-state qubits with transition frequencies in the microwave regime, such as superconducting qubits, are at the forefront of quantum information processing.However, high-fidelity, simultaneous control of superconducting qubits at even a moderate scale remains a challenge, partly due to the complexities of packaging these devices.Here, we present an approach to microwave package design focusing on material choices, signal line engineering, and spurious mode suppression.We describe design guidelines validated using simulations and measurements used to develop a 24-port microwave package.Analyzing the qubit environment reveals no spurious modes up to 11 GHz.The material and geometric design choices enable the package to support qubits with lifetimes exceeding 350 μs.The microwave package design guidelines presented here address many issues relevant for near-term quantum processors.
Scaling superconducting quantum processors to hundreds of qubits is essential for demonstrating quantum advantage and implementing quantum error correction codes with larger distances. A key challenge is integrating control and readout wiring without compromising cryogenic or electronic performance. To address this, we performed a systematic analysis of the thermal budget within a dilution refrigerator and developed high-density 0.5 mm SCuNi-CuNi coaxial cable sets optimized for heat load management. This enables the integration of 696 control lines and 40 readout amplification chains into a dilution refrigerator with a cooling power of 1 mW at 100 mK, maintaining a stable base temperature of ∼8 mK for over a year. We validated the platform's performance with two large-scale quantum processors: a 540-qubit processor with an average T1 of 35 μs and a 156-qubit processor with 182 tunable couplers, achieving average fidelities of 99.9% for single-qubit gates and 99.0% for two-qubit gates. This study demonstrates a viable high-density wiring solution for controlling and measuring processors at the 500-qubit scale and provides critical engineering insights for larger-scale quantum computing systems.
Abstract The development of superconducting qubit technology has shown great potential for the construction of practical quantum computers 1,2 . As the complexity of quantum processors continues to grow, the need for stringent fabrication tolerances becomes increasingly critical 3 . Utilizing advanced industrial fabrication processes could facilitate the necessary level of fabrication control to support the continued scaling of quantum processors. However, at present, these industrial processes are not optimized to produce high-coherence devices, nor are they a priori compatible with the approaches commonly used to make superconducting qubits. Here we demonstrate superconducting transmon qubits manufactured in a 300 mm complementary metal–oxide–semiconductor (CMOS) pilot line using industrial fabrication methods, with resulting relaxation and coherence times exceeding 100 μs. We show across-wafer, large-scale statistics of coherence, yield, variability and ageing that confirm the validity of our approach. The presented industry-scale fabrication process, which uses only optical lithography and reactive-ion etching, has a performance and yield in line with conventional laboratory-style techniques utilizing metal lift-off, angled evaporation and electron-beam writing 4 . Moreover, it offers the potential for further upscaling through three-dimensional integration 5 and more process optimization. This result marks the advent of an alternative and new, large-scale, truly CMOS-compatible fabrication method for superconducting quantum computing processors.
We propose SPICE-Q, a SPICE-inspired design-technology co-optimization framework for superconducting quantum processors. Rather than replacing tools such as HFSS, Qiskit Metal, pyEPR, SQcircuit, SQuADDS, scqubits, or QuTiP, SPICE-Q aims to connect them through a unified, traceable data chain spanning process rules, layout, electromagnetic simulation, energy-participation-ratio and circuit quantization, Hamiltonian extraction, noise analysis, cryogenic test, and manufacturing feedback. The central mapping is from process and PDK constraints to layout geometry, electromagnetic modes, equivalent circuit parameters, effective Hamiltonians, and finally metrics such as frequency, coupling, anharmonicity, decoherence, readout performance, and yield. This flow must capture Josephson-junction variability, transmon frequency allocation, resonator and Purcell constraints, coupler crosstalk, microwave routing, 3D interconnects, material/interface loss, package modes, and wafer-scale process statistics. By introducing standardized model interfaces, statistical parameter models, model cards, version governance, and closed-loop calibration from cryogenic and fabrication data, SPICE-Q frames superconducting quantum-chip design as an engineering workflow rather than a collection of isolated simulations. We argue that scalable and fault-tolerant quantum processors will require such a continuous model chain from device physics and electromagnetic fields to quantum dynamics, noise, manufacturability, and system-level yield.
Abstract To reach large-scale quantum computing, three-dimensional integration of scalable qubit arrays and their control electronics in multi-chip assemblies is promising. Within these assemblies, the use of superconducting interconnections, as routing layers, offers interesting perspectives in terms of (1) thermal management to protect the qubits from control electronics self-heating, (2) passive device performance with significant increase of quality factors and (3) density rise of low and high frequency signals thanks to minimal dispersion. We report on the fabrication, using 200 mm silicon wafer technologies, of a multi-layer routing platform designed for the hybridization of spin qubit and control electronics chips. A routing level couples the qubits and the control circuits through one layer of Al 0.995 Cu 0.005 and superconducting layers of TiN, Nb or NbN, connected between them by W-based vias. Wafer-level parametric tests at 300 K validate the yield of these technologies while low temperature electrical measurements in cryostat are used to extract the superconducting properties of the routing layers. Preliminary low temperature radio-frequency characterizations of superconducting passive elements, embedded in these routing levels, are presented.