Characterization of Silicon-Membrane TES Microcalorimeters for Large-Format X-ray Spectrometers with Integrated Microwave SQUID Readout
Avirup Roy, Robinjeet Singh, Joel C. Weber, W. B. Doriese, Johnathon Gard, Mark W. Keller, John A. B. Mates, Kelsey M. Morgan, Nathan J. Ortiz, Daniel S. Swetz, Daniel R. Schmidt, Joel N. Ullom, Evan P. Jahrman, Thomas C. Allison, Sasawat Jamnuch, John Vinson, Charles J. Titus, Cherno Jaye, Daniel A. Fischer, Galen C. O'Neil
physics.ins-detcond-mat.supr-conquant-phSubmitted Jan 14, 2026• Announced Jan 15, 2026
We present the electro-thermal characterization of transition-edge sensor (TES) detectors suspended on Si membranes fabricated using a silicon-on-insulator (SOI) wafer. The use of an all-silicon fabrication platform, in contrast to the more commonly used silicon nitride membranes, is compatible with monolithic fabrication of integrated TES and SQUID circuits. The all-silicon architecture additionally allows efficient use of focal plane area; the readout circuitry may be positioned out of the focal plane by bending a thinned portion of the chip. Compatibility with integrated fabrication and efficient use of focal plane area provide a path to an efficient soft X-ray spectrometer.
This work is motivated by our goal to develop a 10,000-pixel TES spectrometer to overcome critical measurement limitations in catalysis research. The characterization of fragile, carbon-based intermediates via techniques like Resonant Inelastic X-ray Scattering (RIXS) is often precluded by the slow, high-flux nature of existing technologies. The new instrument will allow for fast RIXS measurements to be made without causing sample damage. We verify the detector models and measure the energy resolution using a pulsed optical laser, demonstrating the viability of this approach for the final instrument to be deployed at the National Synchrotron Light Source II (NSLS-II).
Comments
Accepted for publication in IEEE: Transactions on Applied Superconductivity
We present the electro-thermal characterization of transition-edge sensor (TES) detectors suspended on Si membranes fabricated using a silicon-on-insulator (SOI) wafer. The use of an all-silicon fabrication platform, in contrast to the more commonly used silicon nitride membranes, is compatible with monolithic fabrication of integrated TES and SQUID circuits. The all-silicon architecture additionally allows efficient use of focal plane area; the readout circuitry may be positioned out of the focal plane by bending a thinned portion of the chip. Compatibility with integrated fabrication and efficient use of focal plane area provide a path to an efficient soft X-ray spectrometer.
This work is motivated by our goal to develop a 10,000-pixel TES spectrometer to overcome critical measurement limitations in catalysis research. The characterization of fragile, carbon-based intermediates via techniques like Resonant Inelastic X-ray Scattering (RIXS) is often precluded by the slow, high-flux nature of existing technologies. The new instrument will allow for fast RIXS measurements to be made without causing sample damage. We verify the detector models and measure the energy resolution using a pulsed optical laser, demonstrating the viability of this approach for the final instrument to be deployed at the National Synchrotron Light Source II (NSLS-II).
We describe a million-pixel-scale multiplexed readout for superconducting Transition Edge Sensor (TES) microcalorimeters, using Rapid Single Flux Quantum (RSFQ) digital circuits. Depending on the application and the power dissipation requirements, the readout circuits may be either fabricated on the same wafer as the TES or integrated with the TES wafer using a multichip module, thereby integrating the TES and readout circuits. A data reduction scheme in the RSFQ circuits is described, using integrating counters to measure the TES pulse area. Power and clock requirements for measuring a large number of TES channels per readout line are discussed. Basic components of the ISTER readout circuit have been fabricated in the SFQ5ee process at MIT Lincoln Laboratory and operated at 4 K. The fabrication process has eight fully planarized Nb layers and one layer of Nb/Al-AlOx/Nb Josephson junctions with 100μA/μm2critical current density. Simulations of a TES read out are performed to investigate possible limits on energy resolution using ISTER.
We report very-low-noise, fast-response, middle-scale multiplexing in a microwave superconducting quantum interference device multiplexer (MW-Mux) as a transition-edge sensor (TES) readout. Our MW-Mux is able to read 40 channels with 500 kHz sampling and has a low readout noise of 0.9 μΦ0/Hz (where Φ0 is the magnetic flux quantum), equivalent to 9 pA/Hz. By contrast, a multiplexer of less than 10 pixels with 500 kHz sampling and ∼2 μΦ0/Hz readout noise has so far been reported in the literature. Owing to the 500 kHz sampling, our MW-Mux exhibits a fast response to detect a TES pulse with a rise time around 12 μs. We demonstrated simultaneous readout of 38 pixels from an array of x-ray TES microcalorimeters. The measured full-width values at half-maximum spectral resolution ranged from 2.79 to 4.56 eV, with a median value of 3.30 eV at 5.9 keV, including a ∼10% contribution of readout noise, i.e., 0.9–1.7 eV.
The number of elements in most cryogenic sensor arrays is limited by the technology available to multiplex signals from the arrays into a smaller number of wires and readout amplifiers. The largest demonstrated arrays of transition-edge sensor (TES) microcalorimeters contain roughly 250 detectors and use time-division multiplexing with Superconducting Quantum Interference Devices (SQUIDs). The bandwidth limits of this technology constrain the number of sensors per amplifier chain, a quantity known as the multiplexing factor, to several 10s. With microwave SQUID multiplexing, we can expand the readout bandwidth and enable much larger multiplexing factors. While microwave SQUID multiplexing of TES microcalorimeters has been previously demonstrated with small numbers of detectors, we now present a fully scalable demonstration in which 128 TES detectors are read out on a single pair of coaxial cables.
Dissipationless microwave radio frequency superconducting interference device (RF-SQUID) multiplexers are attractive for readouts of large format arrays of transition edge sensors (TES). This multiplexer has the potential for readout bandwidth of several GHz and power consumption of ≈0.1 pW per pixel, which are ≈103 and ≈10-4 times as large as those of DC-SQUID-based conventional multiplexers. To evaluate their readout performance for TES photon counters ranging from near infrared to gamma ray, white noise of this multiplexer was experimentally studied at 4 K. The reason for this was, firstly, to avoid the low-frequency fluctuation obvious at around 0.1 K but trivial for the energy resolution of photon counters, and secondly for a feasibility study of readout operation at 4 K for extended applications. To increase resonant Q at 4 K and maintain low-noise SQUID operation, multiplexer chips consisting of niobium nitride (NbN)-based coplanar-waveguide resonators and niobium (Nb)-based RF-SQUIDs have been developed. This hybrid multiplexer exhibited 1×104≤QI≤2×104 and the square root of spectral density of current noise referred to the SQUID input √SI =31 pA/√Hz, where QI is the internal Q of resonators. The former and the latter are factor-of-five and seven improvements from our previous results on Nb-based resonators, respectively. Systematic noise measurement with various microwave readout power PMR and two-directional readout on the complex plane of transmission component of scattering matrix S21 makes the contribution of each noise source obvious. By decreasing these noises to the degree achievable by current technology, we predicted the microwave RF-SQUID multiplexer would exhibit √SI ≤5 pA/√Hz; i.e., close to √SI of state-of-the-art DC-SQUID-based multiplexers.
To enable the next-generation of bolometric cameras, we are developing the microwave SQUID multiplexer (μMUX). Upcoming receivers such as Simons Observatory, CCAT-prime, BICEP array, Ali-CPT, and CMB-S4 plan to instrument focal planes with 50,000-500,000 sensors. Sensor count is achieved by tiling many 150 mm-diameter densely packed detector arrays into these focal planes. The fabrication and quality of large-format bolometer arrays has been demonstrated and is now mature. In contrast, the readout technology required for next-generation receivers needs development. The sensitivity, low cross-talk, high multiplexing density, and small component size make the μMUX well-suited for this goal. In this approach, the TES signal modulates the inductance of an rf-SQUID that loads a high-Q microwave resonator. The coupled signal therefore modulates the microwave resonance frequency, which may be read out using homodyne techniques. By coupling each resonator to the same microwave feedline, many detectors can be read out on a single coaxial cable pair. The multiplexing density is in practice limited by signal bandwidth, allowable cross-talk, and the digitization bandwidth of room-temperature readout electronics. We present the design and performance of a scalable 64-channel multiplexer chip optimized for bolometric applications. We utilize a new quarter wave resonator design that increases the physical linear density by a factor of two, therefore achieving a smaller footprint for simplified detector packaging. Measurements of this design show 100 kHz resonator bandwidth, uniform 1.8 MHz frequency spacing, and an input referred current noise of 35 pA/√Hz that is well below the level of an optimized, background-limited TES bolometer. Using 8 daisy-chained and frequency scaled chips, we create a 512-channel multiplexer and use it to readout a 512 TES-bolometer array. We present the results of this large-scale μMUX demonstration including system yield, signal cross-talk, and an analysis of noise in various TES bias configurations. The result demonstrates the multiplexing density required to read out 2,000 sensors between 4-8 GHz.
In contemporary cosmic microwave background experiments, bolometric detectors are often background limited, and in this case the sensitivity of instruments can only be improved by increasing the number of background-limited detectors, and so contemporary TES receivers contain as many pixels as possible. Frequency-domain multiplexing (fMUX) is one strategy for reading out many detectors with one SQUID. For any readout system, it is important to carefully evaluate the thermal design of detector, in conjunction with the readout bandwidth, in order to ensure stable electro-thermal feedback (ETF). We demonstrate a novel technique for characterizing the thermal circuit of our detectors, using am AC-bias and the fMUX electronics. This technique is used to study the internal thermal coupling of a TES bolometer. We illustrate how the insights gathered by this technique have been instrumental in improving the stability of our multiplexed detectors for the south pole telescope (SPT).