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arXiv:2412.16045 · Applied Physics Letters

Millikelvin Nb nanoSQUID-embedded tunable resonator fabricated with a neon focused-ion-beam

Jamie Potter, Laith Meti, Gemma Chapman, Edward J. Romans, John C. Gallop, Ling Yun Hao

Published Jan 3, 2025• 5 citations
arXivHTMLPDF

Abstract

SQUID-embedded superconducting resonators are of great interest due to their potential for coupling highly scalable superconducting circuits with quantum memories based on solid-state spin ensembles. Such an application requires a high-Q, frequency-tunable resonator that is both resilient to magnetic field and able to operate at millikelvin temperatures. These requirements motivate the use of a higher Hc metal such as niobium; however, the challenge then becomes to sufficiently reduce the operating temperature. We address this by presenting a monolithic Nb nanoSQUID-embedded resonator, where neon focused-ion-beam fabrication of the nanoSQUID results in a device displaying frequency tunability at T=16 mK. In order to assess the applicability of the device for coupling to small spin clusters, we characterize the flux sensitivity as a function of microwave drive power and externally applied magnetic field and find that the noise is dominated by dielectric noise in the resonator. Finally, we discuss improvements to the device design that can dramatically improve the flux sensitivity, which highlights the promise of Nb SQUID-embedded resonators for hybrid superconductor-spin applications.

DOI
10.1063/5.0230505

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SQUID-embedded superconducting resonators are of great interest due to their potential for coupling highly scalable superconducting circuits with quantum memories based on solid-state spin ensembles. Such an application requires a high-Q, frequency-tunable resonator that is both resilient to magnetic field and able to operate at millikelvin temperatures. These requirements motivate the use of a higher Hc metal such as niobium; however, the challenge then becomes to sufficiently reduce the operating temperature. We address this by presenting a monolithic Nb nanoSQUID-embedded resonator, where neon focused-ion-beam fabrication of the nanoSQUID results in a device displaying frequency tunability at T=16 mK. In order to assess the applicability of the device for coupling to small spin clusters, we characterize the flux sensitivity as a function of microwave drive power and externally applied magnetic field and find that the noise is dominated by dielectric noise in the resonator. Finally, we discuss improvements to the device design that can dramatically improve the flux sensitivity, which highlights the promise of Nb SQUID-embedded resonators for hybrid superconductor-spin applications.
Tunable resonators with high quality factors underpin the storage and retrieval of microwave-domain quantum information in spin ensembles used as long-lived quantum memories, and can enable multifrequency high-sensitivity electron spin resonance (ESR). The authors develop a single-layer technology, based on embedding nanoSQUIDs in superconducting niobium resonators, to realize high-quality frequency-tunable devices that are resilient to moderate magnetic fields. These devices will enable tunable-resonator-enhanced ESR protocols to be performed at specific fields and frequencies, such as storing quantum information in spins at low-decoherence ``clock transitions''.
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Recently the exploration of nonlinear microwave response in superconducting circuits has been extended to Nb nanobridges that can operate at higher magnetic fields, frequencies, and temperatures than their conventional Al counterparts. Nb nanobridge-based Superconducting Quantum Interference Devices (SQUIDs) have shown potential applications in quantum information processing, weak signal detection, and single spin detection. Combining such non-linear elements with circuit Quantum Electrodynamic (QED) elements like coplanar waveguide (CPW) resonators allows the study of the nonlinearity of such systems. In this work we report on the design, fabrication and dispersive microwave readout of a Nb DC nanoSQUID embedded in a superconducting quarter-wavelength resonator. The measured flux-tuneability of the resonance shows a modulation of a few MHz and fits simulations, giving a critical current of 330 μA and a screening parameterβLof 4.07. Following this we present results showing Kerr-type detuning with a pump tone applied to the device.
The increasing demands of quantum metrology and nanoscience are driving the requirements for single particle detection capability across a wide variety of physics applications, including QIP, single photon detection, NEMS, nanomagnetism and spintronics. NanoSQUIDs represent a new manifestation of an old but exciting superconducting technology which addresses some of these requirements. We will describe a straightforward approach to fabricating Nb microbridge weak-links which may be used in nanoscale SQUIDs. These devices have demonstrated very low noise, even at operating temperatures above 4.2 K. We will also describe the performance of prototype devices made using this technique for energy resolving single photon detection, nanoparticle spin detection and NEMS resonator readout.
Nonlinear microwave circuits are key elements for many groundbreaking research directions and technologies, such as quantum computation and quantum sensing. The majority of microwave circuits with Josephson nonlinearities to date are based on aluminum thin films; therefore, they are severely restricted in their operation range regarding temperatures and external magnetic fields. Here, we present the realization of superconducting niobium microwave resonators with integrated, three-dimensional (3D) nanobridge-based superconducting quantum interference devices. The 3D nanobridges (constriction weak links) are monolithically patterned into prefabricated microwave LCLCLC circuits using neon focused-ion-beam milling, and the resulting quantum interference circuits show frequency tunabilities, flux responsivities, and Kerr nonlinearities on par with comparable aluminum nanobridge devices, but with the perspective of a much larger operation parameter regime. Our results demonstrate that neon focused-ion-beam milling is a promising method for fabricating 3D constriction junctions with flexible parameters and reveal great potential for application of the resulting microwave circuits in hybrid systems with, e.g., magnons and spin ensembles or in flux-mediated optomechanics.
Science and industry demand ever more sensitive measurements on ever smaller systems, as exemplified by spintronics, nanoelectromechanical system, and spin-based quantum information processing, where single electronic spin detection poses a grand challenge. Superconducting quantum interference devices (SQUIDs) have yet to be effectively applied to nanoscale measurements. Here, we show that a simple bilayer deposition route, combining photolithography with focused ion beam patterning, produces high performance nanoscale SQUIDs. We present results of noise measurements on these nanoSQUIDs which correspond to a magnetic flux sensitivity of around 0.2μΦ0∕Hz1∕2. This represents one of the lowest noise values achieved for a SQUID device operating above 1K.