In recent years, notable progress has been made in the study of hole qubits in planar germanium, and circuit quantum electrodynamics (circuit QED) has emerged as a promising approach for achieving long-range coupling and scaling up of qubits. Here, we demonstrate the coupling between holes in a planar germanium double quantum dot (DQD) and photons in a microwave cavity. Specifically, a real-time calibrated virtual gate method is developed to characterize this hybrid system, which in turn allows us to determine the typical parameters sequentially through a single-parameter fitting instead of conventional multiparameter fitting with additional uncertainty, giving a hole-photon coupling rate of ${g}_{0}$/2\ensuremath{\pi} = 21.7 MHz. This work is a step toward further research on hole-photon interactions and long-range qubit coupling in planar germanium. The experimental method developed in this work contributes to a more accurate and efficient characterization of hybrid cavity-QED systems.
In recent years, notable progress has been made in the study of hole qubits in planar germanium, and circuit quantum electrodynamics (circuit QED) has emerged as a promising approach for achieving long-range coupling and scaling up of qubits. Here, we demonstrate the coupling between holes in a planar germanium double quantum dot (DQD) and photons in a microwave cavity. Specifically, a real-time calibrated virtual gate method is developed to characterize this hybrid system, which in turn allows us to determine the typical parameters sequentially through a single-parameter fitting instead of conventional multiparameter fitting with additional uncertainty, giving a hole-photon coupling rate of g0/2\ensuremath{\pi} = 21.7 MHz. This work is a step toward further research on hole-photon interactions and long-range qubit coupling in planar germanium. The experimental method developed in this work contributes to a more accurate and efficient characterization of hybrid cavity-QED systems.
Coherent and strong coupling between photons and solid-state qubits, in the form of circuit quantum electrodynamics (QED), has been harnessed for two-qubit gates mediated by photons and high-fidelity quantum non-demolition readout, which are the building blocks of large-scale quantum computation. Recently, circuit QED has been extended to gate-defined semiconductor quantum dots. In this thesis, we develop a novel hybrid circuit QED architecture composed of a high-impedance superconducting microwave resonator and spins localized in silicon-MOS quantum dots. To control and measure the spin degrees of freedom, this hybrid system needs to operate at finite magnetic field. Consequently, we develop and characterize microwave resonators based on thin niobium nitride (NbN) films featuring a high kinetic inductance. We demonstrate high-impedance resonators with magnetic field resilience and low photon loss rates. We then co-integrate the NbN resonators on silicon spin qubit chips. With a hole confined in a double quantum dot (DQD), we report the first realization of a strong hole charge-photon interaction bordering the ultra-strong coupling regime. At finite magnetic field, putting the spin transition energy in resonance with the microwave cavity, we observe large vacuum Rabi mode splittings, signature of a strong spin-photon coupling. Our findings are well captured by the modelling of a hole DQD with different anisotropic Zeeman response in each dot and spin-orbit coupling dependent tunnel rates. We also find a sizeable spin-photon coupling when the hole is localized in the single quantum dot, in line with recent theoretical predictions. The different works presented in this manuscript pave the way for circuit QED with hole spins in gate-defined semiconductor quantum dots.
Coherent charge-photon and spin-photon coupling has recently been achieved in silicon double quantum dots (DQDs). Here, we demonstrate a versatile split-gate cavity-coupler that allows more than one DQD to be coupled to the same microwave cavity. Measurements of the cavity transmission as a function of level detuning yield a charge cavity coupling rate of gc/2π= 58 MHz, a charge decoherence rate of γc/2π= 36 MHz, and a cavity decay rate of κ/2π= 1.2 MHz. The charge cavity coupling rate is in good agreement with device simulations. Our coupling technique can be extended to enable simultaneous coupling of multiple DQDs to the same cavity mode, opening the door to long-range coupling of semiconductor qubits using microwave frequency photons.
This thesis investigates hybrid circuit quantum electrodynamics (cQED) as a versatile platform that unites superconducting resonators with semiconductor quantum dots. The central motivation is to harness strong light-matter coupling at the single-photon level, which enables coherent photon-qubit interactions and paves the way for quantum technologies in computation, communication, and sensing. The first part of this work combines hybrid cQED with holes in planar Ge/SiGe, a material system that has only recently become accessible for quantum devices. Planar Ge offers unique advantages for this purpose and has attracted considerable attention in the context of quantum computing. In contrast, its potential for hybrid cQED has remained largely unexplored, making the present work one of the first demonstrations of strong light-matter interaction in this platform. Within this framework, we demonstrate strong charge-photon coupling in planar Ge by observing vacuum Rabi splitting between a hole charge qubit based on a double quantum dot (DQD) and a microwave resonator. We employ a frequency-tunable high-impedance resonator to perform qubit spectroscopy, enabling systematic exploration of coupling regimes and confirming device controllability. In addition, we use this setup to carry out excited-state spectroscopy of strongly correlated states in the DQD, revealing the formation of Wigner molecules and illustrating how the hybrid architecture can be harnessed to access many-body physics. While these experiments in Ge demonstrate how strong coupling can be harnessed to explore qubit physics and correlated states, they also exemplify the wider potential of hybrid cQED. A particularly pressing application is in quantum optics, where efficient single-photon detectors are still lacking in the microwave regime. Such detectors are essential for enabling experiments in quantum communication and microwave quantum optics. In the second part of this thesis, we address this challenge by realizing a photodetector based on a GaAs DQD coupled to a superconducting resonator. The detector operates via photon-to-charge conversion and achieves efficiencies approaching unity. Strong coupling plays a central role by ensuring that incoming photons are absorbed before being lost to the environment, which is key to the high performance of the detector. We further exploit the frequency tunability of the resonator to investigate device performance and identify the parameters that optimize detection efficiency. The broader impact of this work lies in advancing quantum technologies that rely on coherent microwave photons. Applications include spin qubit readout, long-distance photon-mediated coupling, quantum communication, and microwave quantum optics. Looking forward, planar Ge is identified as a highly competitive platform for hybrid cQED. Future directions include the development of single-photon sources, quantum- limited detectors, and analog quantum simulators based on engineered resonator-qubit arrays.
Spin qubits in semiconductor quantum dots constitute one of the leading platforms for quantum information processing, combining long coherence times, high-fidelity gate operations, and compatibility with semiconductor industry technologies. In particular, holes confined in planar Ge/SiGe heterostructures have recently emerged as promising qubit candidates owing to their low effective mass, high mobility, low percolation density, absence of valley states, and strong spin-orbit interaction, which enables fast all-electrical spin control. At the same time, spin-orbit interaction also gives rise to a highly anisotropic and electrically tunable gyromagnetic response. Understanding and controlling this response is therefore essential for high-fidelity single- and multi-qubit operations. The realization of scalable quantum processors also requires efficient qubit readout and long-range connectivity. Circuit quantum electrodynamics (cQED), based on the coupling between artificial atoms and microwave photons confined in superconducting resonators, provides a natural framework to address these challenges. However, the implementation of hybrid semiconductor-superconductor devices in planar Ge has so far been hindered by large microwave losses originating from the heterostructure. In this thesis, we demonstrate, for the first time in planar Ge, strong coupling between a hole charge qubit in a double quantum dot and a high-impedance microwave resonator, reaching a cooperativity of C â 100. In addition, we leverage the frequency tunability of the resonator to perform detailed spectroscopy of a multi-level energy spectrum of low-lying states arising from strong Coulomb-correlation effects. To further improve the quality of the hole-photon interface, we investigate the source of microwave losses in different Ge/SiGe heterostructures, identifying defects at the lattice-mismatched Si/Ge interface as the dominant source of resonator losses in reverse-graded heterostructures. To mitigate this limitation, a deep tapered-etching approach is introduced, enabling the fabrication of superconducting resonators directly on etched heterostructures. This method yields internal quality factors exceeding Qint > 10 000 for high-impedance Josephson junction array resonators and Qint > 100 000 for 50 â Nb resonators. Finally, this thesis explores the spin properties of multi-hole quantum dots beyond the conventional single-orbital picture. By reconstructing and electrically tuning the g tensors of holes confined in different orbital states, we show that confinement can substantially modify both their magnitude and orientation. These results open new opportunities for engineering qubit properties through orbital occupation. Furthermore, highly coherent singlet-triplet oscillations are demonstrated in the seven-hole regime, yielding a quality factor of approximately 330 at in-plane magnetic fields as low as 2.5 mT. Together, these results establish a foundation for high-fidelity hole-spin-qubit operation based on g-tensor engineering and for the integration of planar Ge quantum dots with superconducting quantum circuits.
Abstract The germanium (Ge) hut wire system has strong spin–orbit coupling, a long coherence time due to a very large heavy-light hole splitting, and the advantage of site-controlled large-scale hut wire positioning. These properties make the Ge hut wire a promising candidate for the realization of strong coupling of spin to superconducting resonators and scalability for multiple qubit coupling. We have coupled a reflection line resonator to a hole double quantum dot (DQD) formed in Ge hut wire. The amplitude and phase responses of the microwave resonator revealed that the charge stability diagrams of the DQD are in good agreement with those obtained from transport measurements. The DQD interdot tunneling rate is shown to be tunable from 6.2 GHz to 8.5 GHz, which demonstrates the ability to adjust the frequency detuning between the qubit and the resonator. Furthermore, we achieved a hole–resonator coupling strength of up to 15 MHz, with a charge qubit decoherence rate of 0.28 GHz. Meanwhile the hole spin–resonator coupling rate was estimated to be 3 MHz. These results suggest that holes of a DQD in a Ge hut wire are dipole coupled to microwave photons, potentially enabling tunable hole spin–photon interactions in Ge with an inherent spin–orbit coupling.
Semiconductor qubits rely on the control of charge and spin degrees of freedom of electrons or holes confined in quantum dots (QDs). Typically, semiconductor qubit-qubit coupling is short range, effectively limiting qubit distance to the spatial extent of the wavefunction of the confined particle (a few hundred nanometers). This is a significant constraint towards scaling of QD-based architectures to realize dense 1D or 2D arrays of QDs. Inspired by techniques originally developed for circuit QED, we recently demonstrated the strong coupling of individual electrons confined in GaAs quantum dots to individual microwave photons, making use of the enhanced electric component of the vacuum fluctuations of a resonator with impedance beyond the typical 50 Ohm of standard coplanar waveguides. In this hybrid technology, we recently realized a proof of concept experiment, where the coupling between a transmon and a double QD (DQD) is mediated by virtual microwave photon excitations in a high impedance SQUID array resonator, which acts as a quantum bus enabling long-range coupling between dissimilar qubits. Similarly, we achieved coherent coupling between two DQD charge qubits separated by approximately 50 um. In the dispersive regime, we spectroscopically observed qubit-qubit coupling as an avoided-crossing in the energy spectrum of the DQD charge qubits. The methods and techniques developed in this work are transferable to QD devices based on other material systems and can be beneficial for spin based hybrid systems.