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Circuit Quantum Electrodynamics and Spin Qubits with Multi-Hole Quantum Dots in planar Germanium

Franco De Palma

Published Jan 1, 2026• 0 citations
Publisher

Abstract

Spin qubits in semiconductor quantum dots constitute one of the leading platforms for quantum information processing, combining long coherence times, high-fidelity gate operations, and compatibility with semiconductor industry technologies. In particular, holes confined in planar Ge/SiGe heterostructures have recently emerged as promising qubit candidates owing to their low effective mass, high mobility, low percolation density, absence of valley states, and strong spin-orbit interaction, which enables fast all-electrical spin control. At the same time, spin-orbit interaction also gives rise to a highly anisotropic and electrically tunable gyromagnetic response. Understanding and controlling this response is therefore essential for high-fidelity single- and multi-qubit operations. The realization of scalable quantum processors also requires efficient qubit readout and long-range connectivity. Circuit quantum electrodynamics (cQED), based on the coupling between artificial atoms and microwave photons confined in superconducting resonators, provides a natural framework to address these challenges. However, the implementation of hybrid semiconductor-superconductor devices in planar Ge has so far been hindered by large microwave losses originating from the heterostructure. In this thesis, we demonstrate, for the first time in planar Ge, strong coupling between a hole charge qubit in a double quantum dot and a high-impedance microwave resonator, reaching a cooperativity of C â 100. In addition, we leverage the frequency tunability of the resonator to perform detailed spectroscopy of a multi-level energy spectrum of low-lying states arising from strong Coulomb-correlation effects. To further improve the quality of the hole-photon interface, we investigate the source of microwave losses in different Ge/SiGe heterostructures, identifying defects at the lattice-mismatched Si/Ge interface as the dominant source of resonator losses in reverse-graded heterostructures. To mitigate this limitation, a deep tapered-etching approach is introduced, enabling the fabrication of superconducting resonators directly on etched heterostructures. This method yields internal quality factors exceeding Qint > 10 000 for high-impedance Josephson junction array resonators and Qint > 100 000 for 50 â Nb resonators. Finally, this thesis explores the spin properties of multi-hole quantum dots beyond the conventional single-orbital picture. By reconstructing and electrically tuning the g tensors of holes confined in different orbital states, we show that confinement can substantially modify both their magnitude and orientation. These results open new opportunities for engineering qubit properties through orbital occupation. Furthermore, highly coherent singlet-triplet oscillations are demonstrated in the seven-hole regime, yielding a quality factor of approximately 330 at in-plane magnetic fields as low as 2.5 mT. Together, these results establish a foundation for high-fidelity hole-spin-qubit operation based on g-tensor engineering and for the integration of planar Ge quantum dots with superconducting quantum circuits.

DOI
10.5075/epfl-thesis-11553

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Spin qubits in semiconductor quantum dots constitute one of the leading platforms for quantum information processing, combining long coherence times, high-fidelity gate operations, and compatibility with semiconductor industry technologies. In particular, holes confined in planar Ge/SiGe heterostructures have recently emerged as promising qubit candidates owing to their low effective mass, high mobility, low percolation density, absence of valley states, and strong spin-orbit interaction, which enables fast all-electrical spin control. At the same time, spin-orbit interaction also gives rise to a highly anisotropic and electrically tunable gyromagnetic response. Understanding and controlling this response is therefore essential for high-fidelity single- and multi-qubit operations. The realization of scalable quantum processors also requires efficient qubit readout and long-range connectivity. Circuit quantum electrodynamics (cQED), based on the coupling between artificial atoms and microwave photons confined in superconducting resonators, provides a natural framework to address these challenges. However, the implementation of hybrid semiconductor-superconductor devices in planar Ge has so far been hindered by large microwave losses originating from the heterostructure. In this thesis, we demonstrate, for the first time in planar Ge, strong coupling between a hole charge qubit in a double quantum dot and a high-impedance microwave resonator, reaching a cooperativity of C â 100. In addition, we leverage the frequency tunability of the resonator to perform detailed spectroscopy of a multi-level energy spectrum of low-lying states arising from strong Coulomb-correlation effects. To further improve the quality of the hole-photon interface, we investigate the source of microwave losses in different Ge/SiGe heterostructures, identifying defects at the lattice-mismatched Si/Ge interface as the dominant source of resonator losses in reverse-graded heterostructures. To mitigate this limitation, a deep tapered-etching approach is introduced, enabling the fabrication of superconducting resonators directly on etched heterostructures. This method yields internal quality factors exceeding Qint > 10 000 for high-impedance Josephson junction array resonators and Qint > 100 000 for 50 â Nb resonators. Finally, this thesis explores the spin properties of multi-hole quantum dots beyond the conventional single-orbital picture. By reconstructing and electrically tuning the g tensors of holes confined in different orbital states, we show that confinement can substantially modify both their magnitude and orientation. These results open new opportunities for engineering qubit properties through orbital occupation. Furthermore, highly coherent singlet-triplet oscillations are demonstrated in the seven-hole regime, yielding a quality factor of approximately 330 at in-plane magnetic fields as low as 2.5 mT. Together, these results establish a foundation for high-fidelity hole-spin-qubit operation based on g-tensor engineering and for the integration of planar Ge quantum dots with superconducting quantum circuits.
Coherent and strong coupling between photons and solid-state qubits, in the form of circuit quantum electrodynamics (QED), has been harnessed for two-qubit gates mediated by photons and high-fidelity quantum non-demolition readout, which are the building blocks of large-scale quantum computation. Recently, circuit QED has been extended to gate-defined semiconductor quantum dots. In this thesis, we develop a novel hybrid circuit QED architecture composed of a high-impedance superconducting microwave resonator and spins localized in silicon-MOS quantum dots. To control and measure the spin degrees of freedom, this hybrid system needs to operate at finite magnetic field. Consequently, we develop and characterize microwave resonators based on thin niobium nitride (NbN) films featuring a high kinetic inductance. We demonstrate high-impedance resonators with magnetic field resilience and low photon loss rates. We then co-integrate the NbN resonators on silicon spin qubit chips. With a hole confined in a double quantum dot (DQD), we report the first realization of a strong hole charge-photon interaction bordering the ultra-strong coupling regime. At finite magnetic field, putting the spin transition energy in resonance with the microwave cavity, we observe large vacuum Rabi mode splittings, signature of a strong spin-photon coupling. Our findings are well captured by the modelling of a hole DQD with different anisotropic Zeeman response in each dot and spin-orbit coupling dependent tunnel rates. We also find a sizeable spin-photon coupling when the hole is localized in the single quantum dot, in line with recent theoretical predictions. The different works presented in this manuscript pave the way for circuit QED with hole spins in gate-defined semiconductor quantum dots.
This thesis investigates hybrid circuit quantum electrodynamics (cQED) as a versatile platform that unites superconducting resonators with semiconductor quantum dots. The central motivation is to harness strong light-matter coupling at the single-photon level, which enables coherent photon-qubit interactions and paves the way for quantum technologies in computation, communication, and sensing. The first part of this work combines hybrid cQED with holes in planar Ge/SiGe, a material system that has only recently become accessible for quantum devices. Planar Ge offers unique advantages for this purpose and has attracted considerable attention in the context of quantum computing. In contrast, its potential for hybrid cQED has remained largely unexplored, making the present work one of the first demonstrations of strong light-matter interaction in this platform. Within this framework, we demonstrate strong charge-photon coupling in planar Ge by observing vacuum Rabi splitting between a hole charge qubit based on a double quantum dot (DQD) and a microwave resonator. We employ a frequency-tunable high-impedance resonator to perform qubit spectroscopy, enabling systematic exploration of coupling regimes and confirming device controllability. In addition, we use this setup to carry out excited-state spectroscopy of strongly correlated states in the DQD, revealing the formation of Wigner molecules and illustrating how the hybrid architecture can be harnessed to access many-body physics. While these experiments in Ge demonstrate how strong coupling can be harnessed to explore qubit physics and correlated states, they also exemplify the wider potential of hybrid cQED. A particularly pressing application is in quantum optics, where efficient single-photon detectors are still lacking in the microwave regime. Such detectors are essential for enabling experiments in quantum communication and microwave quantum optics. In the second part of this thesis, we address this challenge by realizing a photodetector based on a GaAs DQD coupled to a superconducting resonator. The detector operates via photon-to-charge conversion and achieves efficiencies approaching unity. Strong coupling plays a central role by ensuring that incoming photons are absorbed before being lost to the environment, which is key to the high performance of the detector. We further exploit the frequency tunability of the resonator to investigate device performance and identify the parameters that optimize detection efficiency. The broader impact of this work lies in advancing quantum technologies that rely on coherent microwave photons. Applications include spin qubit readout, long-distance photon-mediated coupling, quantum communication, and microwave quantum optics. Looking forward, planar Ge is identified as a highly competitive platform for hybrid cQED. Future directions include the development of single-photon sources, quantum- limited detectors, and analog quantum simulators based on engineered resonator-qubit arrays.
Spin qubits in gate-defined semiconductor quantum dots are a promising platform for realising a scalable quantum computer. This platform encodes quantum information into the intrinsic angular momentum (spin) of individual electrons or holes. In particular, hole spins in quantum dots enable the possibility of all-electrical spin control due to their intrinsic spin-orbit coupling. One important criterion of a quantum computer is the ability to reliably read out the state of the qubit. This is done by mapping spin information to the charge degree of freedom, combined with a method for charge detection. Charge detection can be facilitated by coupling a resonator directly to the quantum dot gate or to a charge sensor and measuring the resonator's phase or amplitude response. In this thesis, we describe a set of experiments relating to the implementation of hole spin qubit readout with superconducting resonators. First, we study gate-based charge sensing in a Si fin field-effect transistor (finFET) device using a superconducting NbN nanowire resonator. We find that the resonator amplifies capacitive crosstalk when electrical control pulses are applied to gate electrodes in this device. This occurs whenever a spectral component of qubit control pulses overlaps with the resonance frequency, which we show may occur for both baseband and radio-frequency (RF) drive signals. We quantify this crosstalk in a transport-based method, and attribute its source to the capacitance between the bondpads of neighbouring gate electrodes. In a second experiment, we use an RF charge sensor with the same nanowire technology to read out hole spin qubits formed in the quantum well of a Ge/SiGe heterostructure. A screening layer approach is used to facilitate RF matching due to large RF dissipation found in the heterostructure. We implement a double-latched readout scheme in this system to reduce errors arising from both spin and charge decay during readout. The spin-to-charge conversion process and its dependence on magnetic field orientation is studied. Spin and charge decay processes arising after spin-to-charge conversion are mitigated by choosing an optimal working point for the field orientation, field amplitude and readout pulse times. By doing so, we achieve an average single-shot state-preparation-and-measurement fidelity of 97%, primarily bounded by imperfect state preparation and limited signal-to-noise ratio. Finally, we study coplanar waveguide resonators fabricated from NbN. We investigate the feasibility of integrating this type of resonator onto the same chip as the Si finFET quantum dots. We then develop a novel resonator readout technique by the interference of two microwave sidebands. We demonstrate the insensitivity of this technique to common-mode phase and amplitude noise both theoretically and experimentally. This technique is then used to study resonator noise arising from two-level system defects. These results highlight both the practical constraints and the potential for achieving high readout fidelities using resonator-based hole spin qubit readout. This work establishes a blueprint for mitigating resonator-induced crosstalk and enabling high-fidelity readout in lossy materials by incorporating a screening layer.
Hole spin qubits are frontrunner platforms for scalable quantum computers because of their large spin-orbit interaction that enables ultrafast all-electric qubit control at low power. The fastest spin qubits to date are defined in long quantum dots with two tight confinement directions, when the driving field is aligned to the smooth direction. However, in these systems the lifetime of the qubit is strongly limited by charge noise, a major issue in hole qubits. We propose here a different, scalable qubit design, compatible with planar CMOS technology, where the hole is confined in a curved germanium quantum well surrounded by silicon. This design takes full advantage of the strong spin-orbit interaction of holes, and at the same time suppresses charge noise in a wide range of configurations, enabling highly coherent, ultrafast qubit gates. While here we focus on a Si\mathrm{Si}Si/Ge\mathrm{Ge}Ge/Si\mathrm{Si}Si curved quantum well, our design is also applicable to different semiconductors. These devices allow for ultrafast operations even in short quantum dots by a transversal electric field. This additional driving mechanism relaxes the demanding design constraints, and offers a way to reliably interface spin qubits in a single quantum dot to microwave photons. By considering state-of-the-art high-impedance resonators and realistic qubit designs, we estimate interaction strengths of a few hundreds of megahertz, largely exceeding the decay rate of spins and photons. Reaching such a strong coupling regime in hole spin qubits will be a significant step towards high-fidelity entangling operations between distant qubits, as well as fast single-shot readout, and could pave the way towards the implementation of a large-scale semiconducting quantum processor.
Planar germanium heterostructures hosting hole-spin qubits are among the leading platforms for scalable semiconductor-based quantum computing. Yet, device performance is hindered by significant quantum dot variability, which leads to uncertainty in qubit energy levels and random orientations of the spin quantization axis. Tailored control of the g-tensor offers a strategy to overcome these limitations and achieve more reliable qubit operations. Here, we introduce a flexible optimization framework for engineering g-tensor properties. As a benchmark, we numerically obtain the optimal reshaping of the out-of-plane potential in a SiGe-Ge-SiGe quantum well to suppress the in-plane g-tensor components and realize the recently proposed gapless single-spin qubit encoding. This reshaping is achieved through heterostructure engineering, specifically by adjusting the silicon concentration within the quantum well, though the framework remains readily adaptable to alternative design objectives. Our results provide practical design principles for improving the tunability of the spin response, paving the way towards large-scale germanium-based quantum computers.
Hybrid circuit quantum electrodynamics (cQED) aims at coupling various quantum degrees of freedom, among which are spin and charge degrees of freedom in gate defined quantum dots, phonons or magnons... with quantized electromagnetic fields in superconducting microwave cavities to investigate fundamental physics questions or for quantum computation and simulation. However, low microwave losses, key for many hybrid cQED experiments, are challenging to achieve given the often exotic and/or complex material stacks (e.g. semiconducting material, ferromagnets, or piezoelectric materials) required to host the various quantum degrees of freedom. In this work, we present a 3D-integration process to overcome this challenge for semi-industrial silicon MOS spin qubits. The process is based on dense indium bump interconnects at a pitch of 10 μ\mathrmμμm and superconducting thin films of Niobium Nitride (NbN). First, we report on DC and RF interconnect properties that demonstrate a high galvanic interconnection yield and internal quality factors above 10510^{5}105 in the single photon regime for NbN resonators interrupted by a single indium bump interconnect. Eventually, we fabricated a 3D-integrated hybrid circuit quantum electrodynamics (cQED) device based on a semi-industrial MOS hole double quantum dot and a high impedance NbN resonator. For this device, we report a cavity internal quality factor above 10000 and demonstrate record sensitivity for gate-based dispersive readout of the charge degree of freedom with an SNR of 100 in 300 ns. Finally, we demonstrate strong spin-photon coupling of gs/2πg_{s}/2πgs​/2π = 75 MHz, which highlights the viability of 3D-integration for quantum dot based hybrid spin circuit quantum electrodynamics and opens to high-fidelity spin readout and microwave photon-based remote spin qubit entanglement.