Abstract We report on scalable heterointegration of superconducting electrodes and epitaxial semiconductor quantum dots (QDs) on strong piezoelectric and optically nonlinear lithium niobate. The implemented processes combine the sputter-deposited thin film superconductor niobium nitride and III–V compound semiconductor membranes onto the host substrate. The superconducting thin film is employed as a zero-resistivity electrode material for a surface acoustic wave resonator with internal quality factors Q ≈ 17 000 representing a three-fold enhancement compared to identical devices with normal conducting electrodes. Superconducting operation of ≈ 400 M H z resonators is achieved to temperatures T > 7 K and electrical radio frequency powers P r f > + 9 d B m . Heterogeneously integrated single QDs couple to the resonant phononic field of the surface acoustic wave resonator operated in the superconducting regime. Position and frequency selective coupling mediated by deformation potential coupling is validated using time-integrated and time-resolved optical spectroscopy. Furthermore, acoustoelectric charge state control is achieved in a modified device geometry harnessing large piezoelectric fields inside the resonator. The hybrid QD—surface acoustic wave resonator can be scaled to higher operation frequencies and smaller mode volumes for quantum phase modulation and transduction between photons and phonons via the QD. Finally, the employed materials allow for the realization of other types of optoelectronic devices, including superconducting single photon detectors and integrated photonic and phononic circuits.
Abstract We report on scalable heterointegration of superconducting electrodes and epitaxial semiconductor quantum dots (QDs) on strong piezoelectric and optically nonlinear lithium niobate. The implemented processes combine the sputter-deposited thin film superconductor niobium nitride and III–V compound semiconductor membranes onto the host substrate. The superconducting thin film is employed as a zero-resistivity electrode material for a surface acoustic wave resonator with internal quality factors Q ≈ 17 000 representing a three-fold enhancement compared to identical devices with normal conducting electrodes. Superconducting operation of ≈ 400 M H z resonators is achieved to temperatures T > 7 K and electrical radio frequency powers P r f > + 9 d B m . Heterogeneously integrated single QDs couple to the resonant phononic field of the surface acoustic wave resonator operated in the superconducting regime. Position and frequency selective coupling mediated by deformation potential coupling is validated using time-integrated and time-resolved optical spectroscopy. Furthermore, acoustoelectric charge state control is achieved in a modified device geometry harnessing large piezoelectric fields inside the resonator. The hybrid QD—surface acoustic wave resonator can be scaled to higher operation frequencies and smaller mode volumes for quantum phase modulation and transduction between photons and phonons via the QD. Finally, the employed materials allow for the realization of other types of optoelectronic devices, including superconducting single photon detectors and integrated photonic and phononic circuits.
Quantum excitations of macroscopic surface acoustic waves (SAWs) have been tailored to control, communicate, and transduce stationary and flying quantum states. However, the limited lifetime of these hybrid quantum systems remains critical obstacles to extend their applications in quantum information processing. Here, we present potentials of thin film aluminum nitride to on-chip integrated phonons with superconducting qubits over previous bulk piezoelectric substrates. We have reported high-quality thin film GHz-SAW resonators with the highest internal quality factor Qi of 4.92×104 in the quantum regime. The internal losses of SAW resonators are systematically investigated by tuning the parameters of sample layout, power, and temperature. Our results manifest that SAWs on piezoelectric films are readily integrated with standard fabrication of Josephson junction quantum circuits and offer excellent acoustic platforms for high-coherence quantum acoustodynamics architectures.
Thin-film lithium niobate (LN) has become an enabling platform in the development of quantum integrated circuits, for applications including microwave-to-optical converters and electromechanical transducers. Incorporation of high-quality planar superconducting resonators will further elevate the performance of these devices. However, alongside the desired interactions originated from LN, its piezoelectric nature also introduces parasitic coupling between microwave and phononic modes, resulting in excessive dielectric loss. In this work, we investigate such coupling by studying niobium nitride resonators directly deposited on patterned LN thin films. By varying device configuration, we pinpoint that overlapping electric field with LN can inadvertently excite bulk acoustic modes within the substrate, inducing microwave loss independent of the acoustic dissipation rate. The experimental results are supported by simulation and theoretical modeling. Our approach can be applied to different piezoelectric systems and provide insights into the design of microwave components for quantum transduction devices.
Acoustic waves are versatile excitations that couple to many different physical systems. They interact with optical fields in optomechanics, with spin defects through strain, and with superconducting circuits via capacitive or piezoelectric mechanisms. This versatility has motivated their use in hybrid quantum systems for quantum transduction, qubit control, and precision sensing, among other applications. In this thesis, the focus is on the optimization of microwave-to-acoustic coupling between superconducting circuits and Lamb modes in suspend thin-film lithium niobate (LiNbO₃). We leverage the strong piezoelectricity of this material to engineer strong interactions.The first part of the work addresses linear transduction. IDTs require impedance matching to operate efficiently, but this generally imposes a trade-off between efficiency and bandwidth. An optimal design can be identified in theory but is difficult to reach with standard microwave engineering. Here, high-impedance SQUID arrays are employed as linear, tunable inductors to realize the necessary impedance transformation. This approach enables transducers that operate close to the efficiency-bandwidth limit imposed by the piezoelectric coupling strength of LiNbO₃. The design strategy is applied to different types of devices: standard bi-directional IDTs, unidirectional IDTs where acoustic mirrors recover backward-emitted waves, and single-mode IDTs where additional transverse confinement produces quasi-one-dimensional propagation. Among these, unidirectional IDTs achieve unprecedented coupling, with efficiency–bandwidth products of ≈440 MHz and peak efficiencies of 62%. By leveraging flux tunability of SQUIDs we get tunable couplers between microwave circuits and Lamb-wave resonators.The second part investigates the nonlinear regime, where transmon qubits are coupled to Lamb-wave resonators. Unlike the high-Q but weakly coupled resonators often used in the literature, LiNbO₃ offers strong piezoelectric interactions that enable access to very strong coupling even without extremely high quality factors.Overall, this thesis establishes efficient linear transducers and explores strong nonlinear interactions, advancing superconducting-acoustic interfaces based on LiNbO₃. These results extend the superconducting circuit toolbox with sensitive acoustic elements and open pathways toward hybrid applications such as microwave-optical transduction, acoustic spectroscopy, and fundamental experiments exploring the interplay of quantum mechanics and gravity.
Ferroelectric materials, with their strong nonlinearities, underpin key technologies across radio-frequency (RF) signal processing, optical communications, and emerging quantum systems. Barium titanate (BTO) is a notable example, combining strong piezoelectric and electro-optic responses. While bulk BTO has been studied for decades, the piezoelectric properties of its recently available thin films, and their behavior at the millikelvin temperatures relevant to quantum hardware, remain largely unexplored. Here, we fabricate and characterize surface acoustic wave (SAW) resonators on thin-film BTO. The measured devices exhibit high electromechanical coupling (k2eff 0.14 at 5.2 GHz) and operate up to 7.8 GHz. From these measurements, combined with finite-element modeling of the multi-domain microstructure, we extract an effective piezoelectric coefficient d33eff of 53 pC/N, comparable to bulk BTO. Exploiting the intrinsic ferroelectricity, we further demonstrate low-voltage switching with a fast (100 ns) response, attractive for reconfigurable RF front-ends and parametric amplifiers. Extending these measurements to millikelvin temperatures, we find that the piezoelectric response persists, with d33eff 19 pC/N, pointing to the potential of BTO for piezoelectric coupling in superconducting quantum circuits. These results position thin-film BTO as a promising piezoelectric platform for both classical and quantum information technologies.
Linking superconducting quantum devices to optical fibers via microwave-optical quantum transducers may enable large-scale quantum networks. For this application, transducers based on the Pockels electro-optic (EO) effect are promising for their direct conversion mechanism, high bandwidth, and potential for low-noise operation. However, previously demonstrated EO transducers require large optical pump power to overcome weak EO coupling and reach high efficiency. Here, we create an EO transducer in thin-film lithium niobate, a platform that provides low optical loss and strong EO coupling. We demonstrate on-chip transduction efficiencies of up to and of optical pump power. The transduction efficiency can be improved by further reducing the microwave resonator’s piezoelectric coupling to acoustic modes, increasing the optical resonator quality factor to previously demonstrated levels, and changing the electrode geometry for enhanced EO coupling. We expect that with further development, EO transducers in thin-film lithium niobate can achieve near-unity efficiency with low optical pump power.
Efficient and stable microwave-optical transduction is a key enabling technology for distributed superconducting quantum computing and heterogeneous quantum networks. Electro-optic transducers based on thin-film lithium niobate (TFLN) have shown strong promise, but demonstrations to date have been limited by various factors such as low frequency bias drift, low efficiency, fabrication complexity, and scalability. Here we demonstrate the first integrated electro-optic microwave-optical transducers realized in thin-film lithium tantalate (TFLT), a material platform offering Pockels nonlinearity comparable to TFLN together with improved bias stability and high-power handling. We fabricate superconducting microwave resonators coupled to tunable photonic-molecule optical resonators using wafer-scale deep ultraviolet lithography, offering high-throughput production of hundreds of devices per wafer. Across six devices we observe coherent bidirectional conversion between C-band optical photons and 4.9-5.5 GHz microwave photons, with measured on-chip efficiencies and inferred single-photon coupling rates g_0/2π ~ 1 kHz consistent with theory. Continuous operation over multiple days is achieved using a static bias field with minimal feedback, demonstrating a major operational advantage. We further characterize optical loss statistics, microwave resonator performance, and optically induced added noise under pulsed pumping, finding less than one added photon for 100 microsecond pulses at the highest measured efficiencies. These results establish TFLT as a scalable and robust electro-optic platform for future quantum interconnects and modular quantum processors.