The kinetic inductance of charge carriers in disordered superconductors provides a broadband low-loss source of nonlinear electromagnetic response. This work investigates TiN nanowires as an alternative to Josephson junctions for applications involving elevated temperatures, higher frequencies, and strong magnetic fields. An extreme nanowire geometry for TiN microwave resonators leads to current-density concentration and enhanced self-Kerr coefficient, yielding a nonlinearity-to-loss ratio as high as 21% and quality factor exceeding 10,000. Such devices may find application in quantum frequency conversion of microwave photons, and with improvement might attain strong quantum nonlinearity.
Abstract Low microwave loss and regulatable kinetic inductance are two key characteristics of superconducting films to manufacture high-performance quantum devices. Epitaxial titanium nitride (TiN) thin films have been found to exhibit significant advantages in these two aspects. In this paper, we investigated into the dielectric loss and kinetic inductance of epitaxial TiN films, which were prepared on both silicon and sapphire substrates with different temperatures. Crystal structure, surface morphology, and superconducting properties were characterized systematically. The radio-frequency response of microwave resonators made of TiN films was studied at low temperatures to extract the information of kinetic inductance and quality factor. We obtained the highest internal quality factor up to 1.6 × 10 6 at single photon regime and achieved a regulation of kinetic inductance exceeding 16 times by altering the substrate and the sputtering temperature of the TiN films. This work not only provides an essential foundation for the precise design and preparation of low-loss TiN resonators for superconducting quantum bits, but also demonstrates TiN film as an excellent material platform with both low microwave loss and high kinetic inductance that can be applied in other fields such as microwave kinetic inductance detectors.
Aluminum-based platforms have allowed to reach major milestones for superconducting quantum circuits. For the next generation of devices, materials that are able to maintain low microwave losses while providing new functionalities, such as large kinetic inductance or compatibility with CMOS platform, are needed. Here, we report on a combined direct current and microwave investigation of titanium nitride films of different thicknesses grown using CMOS compatible methods. For microwave resonators made of 3 nm thick TiN, we measured large kinetic inductance LK ∼240 pH/sq, high mode impedance of ∼4.2 kΩ while maintaining microwave quality factor ∼105 in the single photon limit. We present an in-depth study of the microwave loss mechanisms in these devices that indicates the importance of quasiparticles and provide insight for further improvement.
We have designed, fabricated, and tested a frequency-tunable high-Q superconducting resonator made from a niobium titanium nitride film. The frequency tunability is achieved by injecting a DC through a current-directing circuit into the nonlinear inductor whose kinetic inductance is current-dependent. We have demonstrated continuous tuning of the resonance frequency in a 180 MHz frequency range around 4.5 GHz while maintaining the high internal quality factor Qi > 180 000. This device may serve as a tunable filter and find applications in superconducting quantum computing and measurement. It also provides a useful tool to study the nonlinear response of a superconductor. In addition, it may be developed into techniques for measurement of the complex impedance of a superconductor at its transition temperature and for readout of transition-edge sensors.
Parametric down-conversion is a widely exploited technique in optics to produce entangled states of photons for quantum information processing and quantum sensing. In the microwave domain, devices based on Josephson junctions, such as Josephson parametric amplifiers and voltage-biased Josephson junctions, have been successfully utilized to generate such states. However, their high susceptibility to magnetic fields has posed challenges in many applications. Here we demonstrate the generation of two-mode squeezed states via four-wave mixing in a superconducting nanowire resonator patterned from
NbN. The
NbN nanowire exhibits a strong Kerr nonlinearity, resulting in the emission of a signal-idler pair with a cross-correlation of
g(2)(0)=11.9. Owing to the magnetic resilience and high critical temperature (
Tc) of
NbN, our microwave parametric sources based on kinetic inductance promise an expanded range of potential applications.
Superconducting resonators with high-kinetic inductance play a central role in hybrid quantum circuits, enabling strong coupling with quantum systems with small electric dipole moment and improved parametric amplification. However, optimizing these resonators simultaneously for high internal quality factors (
Qi) and resilience to strong magnetic fields remains challenging. In this study, we systematically compare superconducting resonators fabricated from niobium nitride (NbN) and granular aluminum (grAl) thin films, each having similar kinetic inductance values (
Lk∼100 pH/sq). At zero magnetic field, resonators made from grAl exhibit higher
Qi compared to their NbN counterparts. However, under applied magnetic fields, NbN resonators demonstrate significantly better resilience. Moreover, NbN resonators exhibit an unexpected increase in
Qi at intermediate in-plane magnetic fields (
B∥∼1 T), which we attribute to an enhanced frequency detuning that reduce coupling to two-level system defects. In contrast, grAl resonators show a distinct critical field above which
Qi rapidly decreases, strongly depending on resonator cross-section respect to the applied field direction. Characterization of the nonlinear properties at zero magnetic field reveals that the self-Kerr coefficient in grAl resonators is more than an order of magnitude higher than in NbN resonators, making grAl particularly attractive for applications requiring pronounced nonlinear interactions. Our findings illustrate a clear trade-off between the two materials: NbN offers superior magnetic-field resilience beneficial for hybrid circuit quantum electrodynamics applications, while grAl is more advantageous in low-field regimes demanding high impedance and strong nonlinearity.
Nonlinear resonators of superconducting thin-film kinetic inductance have attracted considerable research interest in the fields of detectors, qubits, parametric amplifiers, and more. By tuning the deposition parameters, niobium titanium nitride (NbTiN) films (∼12 nm in thickness) present high resistivity(∼2000 μΩ cm) and large sheet kinetic inductance (∼0.7 nH/□). We designed resonators with NbTiN micronwire as the inductor and aluminum as the capacitor, which result in a high internal quality factor and a Kerr nonlinearity of a few hertz. The radio frequency response of the resonators demonstrates nonlinear behavior similar to that of the cubic Duffing oscillator, including frequency shift and hysteresis region. The kinetic inductance resonator is a promising candidate for high saturation power parametric amplifiers.