Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

arXiv:2202.09213 · Optics Express

Laser-written vapor cells for chip-scale atomic sensing and spectroscopy

Vito Giovanni Lucivero, Andrea Zanoni, Giacomo Corrielli, Roberto Osellame, Morgan W. Mitchell

Published Jul 5, 2022• 30 citations
arXivHTMLPDF

Abstract

We report the fabrication of alkali-metal vapor cells using femtosecond laser machining. This laser-written vapor-cell (LWVC) technology allows arbitrarily-shaped 3D interior volumes and has potential for integration with photonic structures and optical components. We use non-evaporable getters both to dispense rubidium and to absorb buffer gas. This enables us to produce cells with sub-atmospheric buffer gas pressures without vacuum apparatus. We demonstrate sub-Doppler saturated absorption spectroscopy and single beam optical magnetometry with a single LWVC. The LWVC technology may find application in miniaturized atomic quantum sensors and frequency references.

DOI
10.1364/oe.469296

Related papers

Microfabricated Vapor Cells with Reflective Sidewalls for Chip Scale Atomic Sensors

Runqi Han, Zheng You, Fan Zhang +2 more

We investigate the architecture of microfabricated vapor cells with reflective sidewalls for applications in chip scale atomic sensors. The optical configuration in operation is suitable for both one-beam and two-beam (pump & probe) schemes. In the miniaturized vapor cells, the laser beam is reflected twice by the aluminum reflectors on the wet etched 54.7° sidewalls to prolong the optical length significantly, thus resulting in a return reflectance that is three times that of bare silicon sidewalls. To avoid limitations faced in the fabrication process, a simpler, more universal and less constrained fabrication process of microfabricated vapor cells for chip scale atomic sensors with uncompromised performance is implemented, which also decreases the fabrication costs and procedures. Characterization measurements show that with effective sidewall reflectors, mm³ level volume and feasible hermeticity, the elongated miniature vapor cells demonstrate a linear absorption contrast improvement by 10 times over the conventional micro-electro-mechanical system (MEMS) vapor cells at ~50 °C in the rubidium D1 absorption spectroscopy experiments. At the operating temperature of ~90 °C for chip scale atomic sensors, a 50% linear absorption contrast enhancement is obtained with the reflective cell architecture. This leads to a potential improvement in the clock stability and magnetometer sensitivity. Besides, the coherent population trapping spectroscopy is applied to characterize the microfabricated vacuum cells with 46.3 kHz linewidth in the through cell configuration, demonstrating the effectiveness in chip scale atomic sensors.

Micromachines•Apr 11, 2018•27 citations

Micromachined alkali atom vapor cells for chip-scale atomic clocks

Li‐Anne Liew, Svenja A. Knappe, John Moreland +3 more

This paper describes the fabrication of chip-scale alkali atom vapor cells, for use in highly miniaturized atomic frequency references, using silicon micromachining and anodic bonding technology. The cells consist of silicon cavities with internal volume ranging from a few mm/sup 3/ to less than 1 mm/sup 3/. The cells were filled with cesium and nitrogen buffer gas either by chemical reaction of cesium chloride and barium azide, or by direct injection of elemental cesium within a controlled anaerobic environment. Cesium optical absorption spectra were obtained from the cells, and coherent population trapping resonances with linewidths of about 1 kHz were measured.

IEEE International Conference on Micro Electro Mechanical Systems (MEMS)•Aug 2, 2004•15 citations

Microfabricated alkali atom vapor cells

Li‐Anne Liew, Svenja A. Knappe, John Moreland +3 more

We describe the fabrication of chip-sized alkali atom vapor cells using silicon micromachining and anodic bonding technology. Such cells may find use in highly miniaturized atomic frequency references or magnetometers. The cells consist of cavities etched in silicon, with internal volumes as small as 1 mm3. Two techniques for introducing cesium and a buffer gas into the cells are described: one based on chemical reaction between cesium chloride and barium azide, and the other based on direct injection of elemental cesium within a controlled anaerobic environment. Cesium optical absorption and coherent population trapping resonances were measured in the cells.

Applied Physics Letters•Apr 1, 2004•374 citations

Functionalized millimeter-scale vapor cells for alkali-metal spectroscopy and magnetometry

Harini Raghavan, Michael C. D. Tayler, K. Mouloudakis +9 more

We describe microfabricated rubidium vapor cells with integrated temperature-control functionality and demonstrate their suitability for use in miniaturized ultrasensitive magnetometers. These functionalized vapor cells (FVCs) embody a dual-chamber design in low-conductivity silicon with antipermeation coatings and microstructured thin-film platinum surface traces as resistive heaters and temperature sensors. Thermal tests show our ability to control alkali-metal distribution within the FVCs, ensuring a clean sensing chamber for optical measurements. Optical-absorption spectroscopy is used to correlate the temperature readings with vapor density and to measure buffer-gas pressure, of interest for optimizing sensitivity. Finally, we demonstrate zero-field resonance magnetometry with $18\phantom{\rule{0.1em}{0ex}}\mathrm{fT}/\sqrt{\mathrm{H}}\mathrm{z}$ sensitivity in the 10- to 100-Hz band, limited by laser noise and magnetic shield noise, which indicates that the functionalization does not introduce significant magnetic noise.

arXiv:2405.10715•Physical Review Applied•Oct 4, 2024•21 citations

Atomic spectroscopy and laser frequency stabilization with scalable micrometer and sub-micrometer vapor cells

Eliran Talker, Roy Zektzer, Yefim Barash +2 more

We report on the atomic spectroscopy and laser frequency stabilization using a new type of a miniaturized glass vapor cell with a scalable thickness varying from 500 nm up to 8 μm. The cell is fabricated by lithography and etching techniques in a Pyrex glass substrate, followed by anodic bonding. It is filled with rubidium vapor using a distillation procedure. This simple and cost-effective fabrication method provides an attractive and compact solution for atomic cells, with applications in quantum metrology, sensing, communication, and light-vapor manipulations at the subwavelength scale. Using the fabricated cell, we have performed fluorescence and transmission spectroscopy of the Rubidium D2 line and observed sub-Doppler broadened lines. As an example, for a potential application, we have used the fabricated cell to demonstrate the stabilization of a 780 nm diode laser to the level about 10−10 in fractional frequency.

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena•Aug 26, 2020•15 citations

Chip-scale atomic spectrometer with silicon nitride optical phased array

Jeremi Januszewicz, A. McWilliam, S. Dyer +7 more

The integration of nanophotonic optical phased arrays (OPA) with alkali vapor cells has the potential to enhance the performance of chip-scale atomic systems by enabling novel methods for beam shaping and active alignment in atomic spectroscopy. In this work, we present the first demonstration of an OPA used for precision saturated absorption spectroscopy with a rubidium vapor cell integrated directly on the chip. The OPA, consisting of 64 emitters, expands a sub-micron waveguide mode into a >100 µm diameter free-space beam, optimized for the D2 absorption line of rubidium. We resolved the sub-Doppler hyperfine splittings in both 85Rb and 87Rb isotopes, achieving Lorentzian linewidths ranging from 25 to 40 MHz suitable for stabilizing the cooling lasers in rubidium cold atom systems.

APL Photonics•Jul 1, 2025•12 citations
We report the fabrication of alkali-metal vapor cells using femtosecond laser machining. This laser-written vapor-cell (LWVC) technology allows arbitrarily-shaped 3D interior volumes and has potential for integration with photonic structures and optical components. We use non-evaporable getters both to dispense rubidium and to absorb buffer gas. This enables us to produce cells with sub-atmospheric buffer gas pressures without vacuum apparatus. We demonstrate sub-Doppler saturated absorption spectroscopy and single beam optical magnetometry with a single LWVC. The LWVC technology may find application in miniaturized atomic quantum sensors and frequency references.
We investigate the architecture of microfabricated vapor cells with reflective sidewalls for applications in chip scale atomic sensors. The optical configuration in operation is suitable for both one-beam and two-beam (pump & probe) schemes. In the miniaturized vapor cells, the laser beam is reflected twice by the aluminum reflectors on the wet etched 54.7° sidewalls to prolong the optical length significantly, thus resulting in a return reflectance that is three times that of bare silicon sidewalls. To avoid limitations faced in the fabrication process, a simpler, more universal and less constrained fabrication process of microfabricated vapor cells for chip scale atomic sensors with uncompromised performance is implemented, which also decreases the fabrication costs and procedures. Characterization measurements show that with effective sidewall reflectors, mm³ level volume and feasible hermeticity, the elongated miniature vapor cells demonstrate a linear absorption contrast improvement by 10 times over the conventional micro-electro-mechanical system (MEMS) vapor cells at ~50 °C in the rubidium D1 absorption spectroscopy experiments. At the operating temperature of ~90 °C for chip scale atomic sensors, a 50% linear absorption contrast enhancement is obtained with the reflective cell architecture. This leads to a potential improvement in the clock stability and magnetometer sensitivity. Besides, the coherent population trapping spectroscopy is applied to characterize the microfabricated vacuum cells with 46.3 kHz linewidth in the through cell configuration, demonstrating the effectiveness in chip scale atomic sensors.
This paper describes the fabrication of chip-scale alkali atom vapor cells, for use in highly miniaturized atomic frequency references, using silicon micromachining and anodic bonding technology. The cells consist of silicon cavities with internal volume ranging from a few mm/sup 3/ to less than 1 mm/sup 3/. The cells were filled with cesium and nitrogen buffer gas either by chemical reaction of cesium chloride and barium azide, or by direct injection of elemental cesium within a controlled anaerobic environment. Cesium optical absorption spectra were obtained from the cells, and coherent population trapping resonances with linewidths of about 1 kHz were measured.
We describe the fabrication of chip-sized alkali atom vapor cells using silicon micromachining and anodic bonding technology. Such cells may find use in highly miniaturized atomic frequency references or magnetometers. The cells consist of cavities etched in silicon, with internal volumes as small as 1 mm3. Two techniques for introducing cesium and a buffer gas into the cells are described: one based on chemical reaction between cesium chloride and barium azide, and the other based on direct injection of elemental cesium within a controlled anaerobic environment. Cesium optical absorption and coherent population trapping resonances were measured in the cells.
We describe microfabricated rubidium vapor cells with integrated temperature-control functionality and demonstrate their suitability for use in miniaturized ultrasensitive magnetometers. These functionalized vapor cells (FVCs) embody a dual-chamber design in low-conductivity silicon with antipermeation coatings and microstructured thin-film platinum surface traces as resistive heaters and temperature sensors. Thermal tests show our ability to control alkali-metal distribution within the FVCs, ensuring a clean sensing chamber for optical measurements. Optical-absorption spectroscopy is used to correlate the temperature readings with vapor density and to measure buffer-gas pressure, of interest for optimizing sensitivity. Finally, we demonstrate zero-field resonance magnetometry with 18fT/Hz18\phantom{\rule{0.1em}{0ex}}\mathrm{fT}/\sqrt{\mathrm{H}}\mathrm{z}18fT/H​z sensitivity in the 10- to 100-Hz band, limited by laser noise and magnetic shield noise, which indicates that the functionalization does not introduce significant magnetic noise.
We report on the atomic spectroscopy and laser frequency stabilization using a new type of a miniaturized glass vapor cell with a scalable thickness varying from 500 nm up to 8 μm. The cell is fabricated by lithography and etching techniques in a Pyrex glass substrate, followed by anodic bonding. It is filled with rubidium vapor using a distillation procedure. This simple and cost-effective fabrication method provides an attractive and compact solution for atomic cells, with applications in quantum metrology, sensing, communication, and light-vapor manipulations at the subwavelength scale. Using the fabricated cell, we have performed fluorescence and transmission spectroscopy of the Rubidium D2 line and observed sub-Doppler broadened lines. As an example, for a potential application, we have used the fabricated cell to demonstrate the stabilization of a 780 nm diode laser to the level about 10−10 in fractional frequency.
The integration of nanophotonic optical phased arrays (OPA) with alkali vapor cells has the potential to enhance the performance of chip-scale atomic systems by enabling novel methods for beam shaping and active alignment in atomic spectroscopy. In this work, we present the first demonstration of an OPA used for precision saturated absorption spectroscopy with a rubidium vapor cell integrated directly on the chip. The OPA, consisting of 64 emitters, expands a sub-micron waveguide mode into a >100 µm diameter free-space beam, optimized for the D2 absorption line of rubidium. We resolved the sub-Doppler hyperfine splittings in both 85Rb and 87Rb isotopes, achieving Lorentzian linewidths ranging from 25 to 40 MHz suitable for stabilizing the cooling lasers in rubidium cold atom systems.