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arXiv:1810.12341 · Physical Review Applied

Interplay Between Kinetic Inductance, Nonlinearity, and Quasiparticle Dynamics in Granular Aluminum Microwave Kinetic Inductance Detectors

Francesco Valenti, Fábio Henriques, Gianluigi Catelani, Nataliya Maleeva, Lukas Grünhaupt, Uwe von Lüpke, Sebastian T. Skacel, Patrick Winkel, Alexander Bilmes, Alexey Vladimirovich Ustinov, J. Goupy, Martino Calvo, A. D. Benoit, F. Lévy-Bertrand, A. Monfardini, Ioan M. Pop

Published May 31, 2019• 73 citations
arXivHTMLPDF

Abstract

Microwave kinetic inductance detectors (MKIDs) are central equipment in radioastronomy, thanks to their ease of fabrication and potential for multiplexing, which allow for millimeter-wavelength cameras with thousands of pixels. However, increasing their kinetic inductance to obtain maximum responsivity degrades their performance, due to the onset of nonlinearities. This work determines the optimum working point of MKIDs by taking into account the interplay between these two competing factors. It is also found that a lower-gapped ground plane can act as a phonon trap, providing lower noise-equivalent power in MKIDs limited by quasiparticle noise.

DOI
10.1103/physrevapplied.11.054087

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Due to their multiplexing capability and their good sensitivity to radiation from submillimeter to X-ray wavelengths, microwave kinetic inductance detectors (MKIDs) are increasingly used in the field of astrophysics. The Advanced Technology Center of the National Astronomical Observatory of Japan is developing MKIDs for astronomical observations such as CMB B-mode search with LiteBIRD. MKIDs are made of superconductors whose energy gap determines the detector frequency range. The energy gap depends on Tc, the critical temperature of the superconductor. It is thus important to be able to adjust Tc in order to choose the suitable frequency range. When using a single-layer MKID, the Tc is fixed by the superconducting gap energy of the unique component and cannot be changed. One possibility is to make a bilayer MKID using the proximity effect to adjust its critical temperature. This paper presents our new study on MKIDs made of superconductor/metal bilayers. We investigated niobium and copper bilayers (Nb/Cu) and fabricated different bilayers in our clean room. The critical temperature of each of them has been measured. We show that the Tc depends on the ratio between Nb and Cu thicknesses and that we are able to control it. Then, we characterized one of these Nb/Cu bilayers (Nb = 8 nm and Cu = 22 nm) once integrated in a MKID. We measured the temperature dependence of the resonant frequency, and we achieved quality factors as high as 2 × 104. The measurement of the noise spectrum provided a lower limit equal to -85 dBc/Hz, and the calculation of the noise equivalent power has shown that the sensitivity of the Nb/Cu bilayer MKID is not very far from that of an Al monolayer MKID.

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Spectroscopic observations of a large number of galaxies in the far-infrared are critical in the study of galaxy evolution. These observations are difficult at the moment, because of the lack of good far-infrared (FIR) detector technology. Microwave Kinetic Inductance Detectors (MKIDs) are showing promising results to fill this void. A common MKID design is the antenna-coupled coplanar waveguide (CPW) resonator patterned in a superconducting film. These resonators are extremely sensitive to changes in the Cooper pair density. FIR photons are energetic enough to break Cooper pairs. This means a superconducting resonator can be used as a pixel for a FIR camera. The inherent multiplexing advantage of MKIDs means they can easily be fabricated in arrays of up to 5000 pixels. By putting such an array in the SAFARI instrument on the cooled SPICA telescope a blind spectroscopic survey that can detect Milky Way sized galaxies out to redshift z = 2 will be possible. However, to achieve background limited performance on a cooled telescope like SPICA the sensivity of MKIDs needs to be improved by at least an order of magnitude. This project aims to investigate if this can be achieved by reducing the width of the CPW to much below what has typically been made using optical lithography (> 1 ?m). CPW resonators with a central line width as narrow as 300 nm were made in NbTiN using electron beam lithography and reactive ion etching. Using this fabrication method NbTiN resonators with a central line width varying between 0.3 ?m and 3 ?m were made. These resonators were used to do a systematic study of the width dependence of the kinetic inductance fraction, quality factor, responsivity, read-out power, noise and NEP. It is shown that the width dependence of all these properties does not change down to 300 nm. Encouraged by these results two prototype submicron pixel arrays were made in aluminum. These showed sensitivities comparable to resonators with a few micron wide CPW. The main reason for this lack of sensitivity improvement is the lower maximum read-out power of submicron wide aluminum resonators. Based on these results power handling seems a key issue that will determine if submicron resonators are a viable route to improve the MKIDs sensitivity. These results of this project indicate that aluminum has a different width dependence of its power handling compared to NbTiN. Therefore, a systematic study of submicron resonators in aluminum, which focuses on the power handling, is required.

•Dec 10, 2010•1 citation
Microwave kinetic inductance detectors (MKIDs) are central equipment in radioastronomy, thanks to their ease of fabrication and potential for multiplexing, which allow for millimeter-wavelength cameras with thousands of pixels. However, increasing their kinetic inductance to obtain maximum responsivity degrades their performance, due to the onset of nonlinearities. This work determines the optimum working point of MKIDs by taking into account the interplay between these two competing factors. It is also found that a lower-gapped ground plane can act as a phonon trap, providing lower noise-equivalent power in MKIDs limited by quasiparticle noise.
Due to their multiplexing capability and their good sensitivity to radiation from submillimeter to X-ray wavelengths, microwave kinetic inductance detectors (MKIDs) are increasingly used in the field of astrophysics. The Advanced Technology Center of the National Astronomical Observatory of Japan is developing MKIDs for astronomical observations such as CMB B-mode search with LiteBIRD. MKIDs are made of superconductors whose energy gap determines the detector frequency range. The energy gap depends on Tc, the critical temperature of the superconductor. It is thus important to be able to adjust Tc in order to choose the suitable frequency range. When using a single-layer MKID, the Tc is fixed by the superconducting gap energy of the unique component and cannot be changed. One possibility is to make a bilayer MKID using the proximity effect to adjust its critical temperature. This paper presents our new study on MKIDs made of superconductor/metal bilayers. We investigated niobium and copper bilayers (Nb/Cu) and fabricated different bilayers in our clean room. The critical temperature of each of them has been measured. We show that the Tc depends on the ratio between Nb and Cu thicknesses and that we are able to control it. Then, we characterized one of these Nb/Cu bilayers (Nb = 8 nm and Cu = 22 nm) once integrated in a MKID. We measured the temperature dependence of the resonant frequency, and we achieved quality factors as high as 2 × 104. The measurement of the noise spectrum provided a lower limit equal to -85 dBc/Hz, and the calculation of the noise equivalent power has shown that the sensitivity of the Nb/Cu bilayer MKID is not very far from that of an Al monolayer MKID.
Microwave Kinetic Inductance Detectors (MKIDs) are extremely sensitive radiation detectors based on superconducting resonators that can be combined in large arrays on a single readout line within a limited frequency bandwidth. This makes MKIDs ideal detectors for the ultimate far-infrared observatory: a future space-based actively cooled telescope with its performance solely limited by the low universe background radiation. However, to reach these detector requirements, state-of-the-art MKIDs still need a order of magnitude improvement in device sensitivity. In this work, the MKID sensitivity is improved by reducing the aluminium volume that absorbs pair-breaking radiation into quasiparticle excitations, while making sure all radiation is still absorbed. Furthermore, a key requirement is sufficient reduction of excess noise as to keep the device intrinsically limited by thermally driven random fluctuations in the number of quasiparticles in absence of radiation, or Generation-Recombination (G-R) noise. To this end, a model is developed that describes the noise contributions as function of device geometry, readout power, material properties and radiation power. Subsequently, a realistic MKID design is presented and tested that reduces excess noise and maximises the sensitivity, expressed as Noise Equivalent Power (NEP). At high temperatures, good overall agreement is found between the measured noise spectra and the model. At low temperature T = 120 mK, the measurement results give an optical NEP similar to current state-of-the-art MKIDs. The NEP is not as low as expected due to short quasiparticle lifetimes, an unexpected decrease in the G-R noise level and a very high excess noise attributed to Two-Level Systems (TLS) noise that starts to dominate the already low G-R noise spectrum at low temperatures. Possibly, the quick quasiparticle lifetime saturation and noise level drop are caused by a strong readout power effect, as the readout power is known to create excess quasiparticles and to cause a strongly non-thermal electron energy distribution in the aluminium strip of the MKID. However, the exact microscopic details of these effects are unknown and not studied in this project. Based on the current chip design, a straightforward way to improve device performance and study the readout power effect in more detail is a reduction of the high TLS noise levels, which is possibly fabrication related. This would allow an unobstructed view of the G-R noise spectrum at low temperatures, thereby allowing both a study of the readout power effect on the quasiparticle system, and ultimately achieving the improvement in NEP needed reach the detector requirements for the ultimate space-based far-infrared observatory.
In the next decades millimeter and sub-mm astronomy requires large format imaging arrays and broad-band spectrometers to complement the high spatial and spectral resolution of the Atacama Large Millimeter/submillimeter Array. The desired sensors for these instruments should have a background limited sensitivity and a high optical efficiency and enable arrays thousands of pixels in size. Hybrid microwave kinetic inductance detectors consisting of NbTiN and Al have shown to satisfy these requirements. We present the second generation hybrid NbTiN-Al MKIDs, which are photon noise limited in both phase and amplitude readout for loading levels P850GHz < 10 fW. Thanks to the increased responsivity, the photon noise level achieved in phase allows us to simultaneously read out approximately 8000 pixels using state-of-the-art electronics. In addition, the choice of superconducting materials and the use of a Si lens in combination with a planar antenna gives these resonators the flexibility to operate within the frequency range 0:09 < v < 1:1 THz. Given these specifications, hybrid NbTiN-Al MKIDs will enable astronomically usable kilopixel arrays for sub-mm imaging and moderate resolution spectroscopy.
Microwave Kinetic Inductance Detectors (MKIDs) are remarkable photon detectors, that have single photon detection and energy resolving capabilities in the near-infra red and higher frequency range. At lower frequencies, MKIDs are excellent radiation detectors as well, because of their high sensitivity and natural multiplexing capabilities, which enable large scale detector arrays.In the (near) optical regime, MKIDs can use their single photon energy resolving capabilities for direct exoplanet detection, in missions like Hab-Ex or LUVOIR. This would enable atmospheric characterization, potentially finding habitual exoplanets. However, two aspects of the MKID still need improvement for this application: the photon absorption efficiency must go from 30% to 50% and the resolving power must go from 8 to 100, both for wavelengths of 1 µm. In this thesis, we study the single photon response and generation-recombination (GR) noise in optical NbTiN-Al hybrid MKIDs, to find knowledge gaps and opportunities to improve detector performance. For the single photon response, we set up a model starting from the Rothwarf-Taylor and Mattis-Bardeen equations, including the pair-breaking efficiency as only fit parameter. Both at high (220 mK and 250 mK) and low (120 mK) temperatures, the model predicted the single photon response of 4 different wavelengths correctly, with a fitted pair-breaking efficiency close to expected values (30%-70%), but somewhat high, which might be due to a non-thermal distribution of quasiparticles caused by read power. In particular, the effect of phonon trapping was captured by the model, which was verified by considering MKIDs on substrate and membrane.At lower temperatures (120 mK), a second exponential decay in both the amplitude and phase single photon pulse tail was observed, which is not explained by the model. This second decay was faster for higher read powers. For the GR noise, also an unexpected feature was observed: the GR noise level dropped exponentially, when lowering temperature (<250 mK), for the amplitude, phase and cross power spectral densities (PSDs). High read powers mask this effect, due to the creation of excess quasiparticles. The noise drop was present in all analysed MKIDs, except for an MKID with an 150 nm (instead of 50 nm) thick Al film, which might be due to read power induced excess quasiparticles. When assuming the GR noise to be Poissonian, we show that the behaviour could be explained by a process which limits the quasiparticle lifetime, while keeping the quasiparticle density thermal.We hypothesize the cause of both of these unpredicted measurements to be quasiparticle trapping, which is the localisation of quasiparticles. This process is known to degrade superconducting tunnel junction detectors and limit quasiparticle lifetimes in MKIDs. A secondary ion-mass spectroscopy (SIMS) analysis showed Fe contamination on the substrate-Al film interface, which is thought to be the quasiparticle trapping cause in our systems, consistent with the observation that increasing the film thickness diminishes the GR noise drop. To our knowledge, quasiparticle trapping has not be studied in steady state experiments, such as GR noise measurements.Different models including quasiparticle trapping have been set up and can predict the amplitude PSDs, when assuming that trapped quasiparticles cannot dissipate microwave power. However, comparison of the fitted model parameters with the trapping and detrapping rates calculated by Kozorezov et al., showed a orders of magnitude difference. Combining this with the fact that amplitude, phase and cross PSDs show similar behaviour, implying that they relate to Cooper-pair fluctuations, led us to conclude that the trapping process cannot be the cause of the observed behaviour. On-trap recombination most likely plays a role in the GR noise drop, but models including this process involve cyclic transitions and non-equilibrium steady states, greatly complicating the calculations. The second exponential decay could not be described by the trapping models, but also here on-trap recombination and Cooper-pair fluctuations must be considered.A qualitative analysis on the MKID detector performance (both single photon and radiation power integration) showed that quasiparticle trapping effects can increase the energy resolving power and noise equivalent power at low temperatures, when this effect replaces the usual lifetime saturation due to excess quasiparticles.
Microwave kinetic inductance detectors (MKIDs) are generally read out with microwave readout tones of high enough amplitude to adequately suppress the noise contribution of the first-stage amplifier. At high readout power, the detector's resonant frequency is altered as a result of the dependence of the kinetic inductance on the internally circulating microwave current. With the tone placed below the resonant frequency, the nonlinear frequency shift results in a positive feedback effect that can significantly enhance the responsivity of the detector, to both optical and microwave power. We report a factor of 10 enhancement in optical response by tuning the readout power and frequency to close to the resonator's bifurcation point. A corresponding decrease in the bandwidth of the resonator is observed under these conditions. We show that the strength of the feedback effect can be easily selected by adjusting the excitation, and provide a map of possible operational states to do so. Operation of MKIDs in this mode could be used to improve sensitivity when non-intrinsic noise sources are significant.
Spectroscopic observations of a large number of galaxies in the far-infrared are critical in the study of galaxy evolution. These observations are difficult at the moment, because of the lack of good far-infrared (FIR) detector technology. Microwave Kinetic Inductance Detectors (MKIDs) are showing promising results to fill this void. A common MKID design is the antenna-coupled coplanar waveguide (CPW) resonator patterned in a superconducting film. These resonators are extremely sensitive to changes in the Cooper pair density. FIR photons are energetic enough to break Cooper pairs. This means a superconducting resonator can be used as a pixel for a FIR camera. The inherent multiplexing advantage of MKIDs means they can easily be fabricated in arrays of up to 5000 pixels. By putting such an array in the SAFARI instrument on the cooled SPICA telescope a blind spectroscopic survey that can detect Milky Way sized galaxies out to redshift z = 2 will be possible. However, to achieve background limited performance on a cooled telescope like SPICA the sensivity of MKIDs needs to be improved by at least an order of magnitude. This project aims to investigate if this can be achieved by reducing the width of the CPW to much below what has typically been made using optical lithography (> 1 ?m). CPW resonators with a central line width as narrow as 300 nm were made in NbTiN using electron beam lithography and reactive ion etching. Using this fabrication method NbTiN resonators with a central line width varying between 0.3 ?m and 3 ?m were made. These resonators were used to do a systematic study of the width dependence of the kinetic inductance fraction, quality factor, responsivity, read-out power, noise and NEP. It is shown that the width dependence of all these properties does not change down to 300 nm. Encouraged by these results two prototype submicron pixel arrays were made in aluminum. These showed sensitivities comparable to resonators with a few micron wide CPW. The main reason for this lack of sensitivity improvement is the lower maximum read-out power of submicron wide aluminum resonators. Based on these results power handling seems a key issue that will determine if submicron resonators are a viable route to improve the MKIDs sensitivity. These results of this project indicate that aluminum has a different width dependence of its power handling compared to NbTiN. Therefore, a systematic study of submicron resonators in aluminum, which focuses on the power handling, is required.