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arXiv:1612.01883 · Physical Review Applied

Direct Magneto-Optical Compression of an Effusive Atomic Beam for Application in a High-Resolution Focused Ion Beam

G. ten Haaf, T. C. H. de Raadt, G. P. Offermans, J. F. M. van Rens, P. H. A. Mutsaers, E. J. D. Vredenbregt, S. H. W. Wouters

Published May 22, 2017• 13 citations
arXivHTMLPDF

Abstract

Photoionizing a beam of ultracold atoms can provide a high-brightness ion beam, to improve resolution in focused-ion-beam nanofabrication. With this aim, the authors use laser cooling and compression to give a ${}^{85}$Rb atomic beam an equivalent brightness better than the current standard for the semiconductor industry. This could represent an important step toward smaller feature sizes in integrated circuits.

DOI
10.1103/physrevapplied.7.054013

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Photoionizing a beam of ultracold atoms can provide a high-brightness ion beam, to improve resolution in focused-ion-beam nanofabrication. With this aim, the authors use laser cooling and compression to give a 85{}^{85}85Rb atomic beam an equivalent brightness better than the current standard for the semiconductor industry. This could represent an important step toward smaller feature sizes in integrated circuits.
Photoionization of a laser-cooled and compressed atomic beam from a high-flux thermal source can be used to create a high-brightness ion beam for use in focused-ion-beam instruments. Here we show using calculations and Doppler cooling simulations that an atomic rubidium beam with an equivalent brightness of $2.1\ifmmode\times\else\texttimes\fi{}{10}^{7} \mathrm{A}/(\mathrm{m}{}^{2} \mathrm{sr} \mathrm{eV})$ can be created using a compact 5 cm long two-dimensional magneto-optical compressor. If this can be conserved during the photoionization process, this leads to an ion beam brightness an order of magnitude higher than produced by a liquid metal ion source. The source is also capable of producing a flux of $6.2\ifmmode\times\else\texttimes\fi{}{10}^{9} \mathrm{s}{}^{\ensuremath{-}1}$ that results in a substantial beam current of 1 nA once fully ionized.
The evolving field of nanofabrication demands that more precise fabrication and evaluation tools be developed. We describe a method for creating a high quality focused ion beam with enhanced capabilities using an ion source based on laser-cooled neutral atoms in a magneto-optical trap. This technique will improve resolution and brightness beyond the current state of the art, can be used with the full range of atomic species that can be laser cooled and trapped, and will allow unprecedented control over the ion emission, allowing, for example, the production of single ions ``on demand.'' We give estimates for the emittance and present a realistic ray tracing analysis of a basic focusing system demonstrating the feasibility of focusing the beam to a spot size of less than 10nm10\phantom{\rule{0.3em}{0ex}}\mathrm{nm}10nm.
A new type of high-brightness ion source is under development which employs transverse laser cooling and compression of a thermal atomic rubidium beam, followed by in-field photo-ionization. When attached to a focusing column, this Focused Ion Beam (FIB) has the advantage of supplying a higher current in a smaller spot compared to conventional LMIS-based FIBs, thus increasing both the resolution and the speed of the FIB. Furthermore, different types of ion species can be used, broadening the range of applications of the FIB. Simulations using a 10 cm long laser cooling and compression stage and a realistic ionization and acceleration structure, predict an achievable brightness for 87 Rb + of order 10 7 A/m 2 sr eV at an energy spread of less than 1 eV and a current of tens of pA. This would lead to a spot size below 5 nm. Simulations and modeling on the ionization process have led to a better understanding of stochastic heating. Experimental realization of the compact ion source has recently started with the development of an efficient high-flux atom source and a 2D laser cooler and compressor. Progress on simulations and experimental results will be reported.
The authors describe a new method for creating a high quality focused ion beam using laser-cooled neutral atoms in a magneto-optical trap as an ion source. They show that this new technique can provide spot resolutions and brightness values that are better than the state of the art in focused ion beams. The source can be used with a range of different ionic species and can be combined with laser cooling techniques to exert unprecedented control over the ion emission, for example, producing single ions “on demand.” The beam quality is a result of a high brightness and a narrow energy distribution, both of which stem from the cold temperature (≈100μK) of the atoms. The ions are produced by subjecting the cold neutral atoms to a photoionization laser, after which they become a compact source of nearly monoenergetic ions. With the application of a potential gradient, the ions form a beam that can be focused via standard ion optical techniques. They discuss estimations based on the initial size of the ion cloud and the energy distribution and show that the resulting beam has a low emittance.
Focused ion beam instruments a"re indispensable tools for the semiconductor\nindustry due to their ability to image and modify structures on the nanometer\nlength scale. For milling and deposition, the industry standard is the gallium\nliquid-metal ion source which enables a resorution of 5-10 nm at a current\nof a few pA. with the quest towards smaller features on integrated circuits,\nthere is a need for novel ion sources that allow for better resolution. Several\nresearch groups are working towards applying laser-intensified alkali-metal ion\nbeams for this purpose [1].\ns-uch ultra-low temperature (1 mK) ion beams can be created by lasercooling\nand photo-ionization of a thermal atomic beam or vapor. The Rb ion\nsource under development in Eindhoven in collaboration with FEI c