Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

Application of laser-cooling and compression to create a high resolution focused ion beam

Steinar H. W. Wouters, G. ten Haaf, Peter H. A. Mutsaers, O.J. Luiten, Edgar J. D. Vredenbregt

Published Jan 1, 2015• 0 citations
OpenAlex

Abstract

Ultra-low temperature (1 mK) ion beams can be created by photo-ionization of a laser cooled and compressed thermal atomic beam. Full device simulations show that for rubidium ions, spot sizes down to 1 nm can be achieved at a current of 1 pA.

Related papers

Ultracold ion beams using laser cooling

Ejd Edgar Vredenbregt, Shw Steinar Wouters, G. ten Haaf +1 more

Focused ion beam instruments a"re indispensable tools for the semiconductor\nindustry due to their ability to image and modify structures on the nanometer\nlength scale. For milling and deposition, the industry standard is the gallium\nliquid-metal ion source which enables a resorution of 5-10 nm at a current\nof a few pA. with the quest towards smaller features on integrated circuits,\nthere is a need for novel ion sources that allow for better resolution. Several\nresearch groups are working towards applying laser-intensified alkali-metal ion\nbeams for this purpose [1].\ns-uch ultra-low temperature (1 mK) ion beams can be created by lasercooling\nand photo-ionization of a thermal atomic beam or vapor. The Rb ion\nsource under development in Eindhoven in collaboration with FEI c

•Jan 1, 2015•0 citations

Application of laser-cooling to achieve an ultra-cold ion beam for FIB

Steinar H. W. Wouters, Janssen, B, G. ten Haaf +4 more

A new type of ultra-cold ion source is under development which employs transverse laser cooling and compression of a thermal atomic rubidium beam followed by photo-ionization. The resulting ultra-cold plasma is focused to a nanometer-sized spot using an existing Focused Ion Beam column and this spot can be used for the fabrication of nano-structures. Simulations of a 10 cm long laser-cooling stage and of disorder-induced heating of the resulting ion beam, predict an achievable brightness for87Rb+ of order 107 A/m2 sr eV at an longitudinal energy spread of less than 1 eV and a current of tens of pA, which is substantially better than conventional ion sources. Experimental realization of the compact ion source has recently started with the development of an efficient high-flux atom source and a 2D laser cooler. Progress on these items will be reported.

•Jan 1, 2013•0 citations

A high brightness laser-cooled atomic beam for application in high resolution FIB

Shw Steinar Wouters, S.B. van der Geer, G. ten Haaf +2 more

A new type of high-brightness ion source is under development which employs transverse laser cooling and compression of a thermal atomic rubidium beam, followed by in-field photo-ionization. When attached to a focusing column, this Focused Ion Beam (FIB) has the advantage of supplying a higher current in a smaller spot compared to conventional LMIS-based FIBs, thus increasing both the resolution and the speed of the FIB. Furthermore, different types of ion species can be used, broadening the range of applications of the FIB. Simulations using a 10 cm long laser cooling and compression stage and a realistic ionization and acceleration structure, predict an achievable brightness for 87 Rb + of order 10 7 A/m 2 sr eV at an energy spread of less than 1 eV and a current of tens of pA. This would lead to a spot size below 5 nm. Simulations and modeling on the ionization process have led to a better understanding of stochastic heating. Experimental realization of the compact ion source has recently started with the development of an efficient high-flux atom source and a 2D laser cooler and compressor. Progress on simulations and experimental results will be reported.

•Jan 1, 2013•0 citations

Performance predictions for a laser-intensified thermal beam for use in high-resolution focused-ion-beam instruments

Steinar H. W. Wouters, G. ten Haaf, Remy Notermans +4 more

Photoionization of a laser-cooled and compressed atomic beam from a high-flux thermal source can be used to create a high-brightness ion beam for use in focused-ion-beam instruments. Here we show using calculations and Doppler cooling simulations that an atomic rubidium beam with an equivalent brightness of $2.1\ifmmode\times\else\texttimes\fi{}{10}^{7} \mathrm{A}/(\mathrm{m}{}^{2} \mathrm{sr} \mathrm{eV})$ can be created using a compact 5 cm long two-dimensional magneto-optical compressor. If this can be conserved during the photoionization process, this leads to an ion beam brightness an order of magnitude higher than produced by a liquid metal ion source. The source is also capable of producing a flux of $6.2\ifmmode\times\else\texttimes\fi{}{10}^{9} \mathrm{s}{}^{\ensuremath{-}1}$ that results in a substantial beam current of 1 nA once fully ionized.

arXiv:1410.4350•Physical Review A•Dec 15, 2014•17 citations

Performance predictions of a focused ion beam based on laser cooling

G. ten Haaf, Steinar H. W. Wouters, S.B. van der Geer +2 more

Focused ion beams are indispensable tools in the semiconductor industry because of their ability to image and modify structures at the nanometer length scale. Here we report on performance predictions of a new type of focused ion beam based on photo-ionization of a laser cooled and compressed atomic beam. Particle tracing simulations are performed to investigate the effects of disorder-induced heating after ionization in a large electric field. They lead to a constraint on this electric field strength which is used as input for an analytical model which predicts the minimum attainable spot size as a function of amongst others the flux density of the atomic beam, the temperature of this beam and the total current. At low currents (I

•Jan 1, 2014•0 citations

Using laser-cooled atoms as a focused ion beam source

J. L. Hanssen, E. A. Dakin, Jabez J. McClelland +1 more

The authors describe a new method for creating a high quality focused ion beam using laser-cooled neutral atoms in a magneto-optical trap as an ion source. They show that this new technique can provide spot resolutions and brightness values that are better than the state of the art in focused ion beams. The source can be used with a range of different ionic species and can be combined with laser cooling techniques to exert unprecedented control over the ion emission, for example, producing single ions “on demand.” The beam quality is a result of a high brightness and a narrow energy distribution, both of which stem from the cold temperature (≈100μK) of the atoms. The ions are produced by subjecting the cold neutral atoms to a photoionization laser, after which they become a compact source of nearly monoenergetic ions. With the application of a potential gradient, the ions form a beam that can be focused via standard ion optical techniques. They discuss estimations based on the initial size of the ion cloud and the energy distribution and show that the resulting beam has a low emittance.

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena•Nov 1, 2006•18 citations
Focused ion beam instruments a"re indispensable tools for the semiconductor\nindustry due to their ability to image and modify structures on the nanometer\nlength scale. For milling and deposition, the industry standard is the gallium\nliquid-metal ion source which enables a resorution of 5-10 nm at a current\nof a few pA. with the quest towards smaller features on integrated circuits,\nthere is a need for novel ion sources that allow for better resolution. Several\nresearch groups are working towards applying laser-intensified alkali-metal ion\nbeams for this purpose [1].\ns-uch ultra-low temperature (1 mK) ion beams can be created by lasercooling\nand photo-ionization of a thermal atomic beam or vapor. The Rb ion\nsource under development in Eindhoven in collaboration with FEI c
A new type of ultra-cold ion source is under development which employs transverse laser cooling and compression of a thermal atomic rubidium beam followed by photo-ionization. The resulting ultra-cold plasma is focused to a nanometer-sized spot using an existing Focused Ion Beam column and this spot can be used for the fabrication of nano-structures. Simulations of a 10 cm long laser-cooling stage and of disorder-induced heating of the resulting ion beam, predict an achievable brightness for87Rb+ of order 107 A/m2 sr eV at an longitudinal energy spread of less than 1 eV and a current of tens of pA, which is substantially better than conventional ion sources. Experimental realization of the compact ion source has recently started with the development of an efficient high-flux atom source and a 2D laser cooler. Progress on these items will be reported.
A new type of high-brightness ion source is under development which employs transverse laser cooling and compression of a thermal atomic rubidium beam, followed by in-field photo-ionization. When attached to a focusing column, this Focused Ion Beam (FIB) has the advantage of supplying a higher current in a smaller spot compared to conventional LMIS-based FIBs, thus increasing both the resolution and the speed of the FIB. Furthermore, different types of ion species can be used, broadening the range of applications of the FIB. Simulations using a 10 cm long laser cooling and compression stage and a realistic ionization and acceleration structure, predict an achievable brightness for 87 Rb + of order 10 7 A/m 2 sr eV at an energy spread of less than 1 eV and a current of tens of pA. This would lead to a spot size below 5 nm. Simulations and modeling on the ionization process have led to a better understanding of stochastic heating. Experimental realization of the compact ion source has recently started with the development of an efficient high-flux atom source and a 2D laser cooler and compressor. Progress on simulations and experimental results will be reported.
Photoionization of a laser-cooled and compressed atomic beam from a high-flux thermal source can be used to create a high-brightness ion beam for use in focused-ion-beam instruments. Here we show using calculations and Doppler cooling simulations that an atomic rubidium beam with an equivalent brightness of $2.1\ifmmode\times\else\texttimes\fi{}{10}^{7} \mathrm{A}/(\mathrm{m}{}^{2} \mathrm{sr} \mathrm{eV})$ can be created using a compact 5 cm long two-dimensional magneto-optical compressor. If this can be conserved during the photoionization process, this leads to an ion beam brightness an order of magnitude higher than produced by a liquid metal ion source. The source is also capable of producing a flux of $6.2\ifmmode\times\else\texttimes\fi{}{10}^{9} \mathrm{s}{}^{\ensuremath{-}1}$ that results in a substantial beam current of 1 nA once fully ionized.
Focused ion beams are indispensable tools in the semiconductor industry because of their ability to image and modify structures at the nanometer length scale. Here we report on performance predictions of a new type of focused ion beam based on photo-ionization of a laser cooled and compressed atomic beam. Particle tracing simulations are performed to investigate the effects of disorder-induced heating after ionization in a large electric field. They lead to a constraint on this electric field strength which is used as input for an analytical model which predicts the minimum attainable spot size as a function of amongst others the flux density of the atomic beam, the temperature of this beam and the total current. At low currents (I
The authors describe a new method for creating a high quality focused ion beam using laser-cooled neutral atoms in a magneto-optical trap as an ion source. They show that this new technique can provide spot resolutions and brightness values that are better than the state of the art in focused ion beams. The source can be used with a range of different ionic species and can be combined with laser cooling techniques to exert unprecedented control over the ion emission, for example, producing single ions “on demand.” The beam quality is a result of a high brightness and a narrow energy distribution, both of which stem from the cold temperature (≈100μK) of the atoms. The ions are produced by subjecting the cold neutral atoms to a photoionization laser, after which they become a compact source of nearly monoenergetic ions. With the application of a potential gradient, the ions form a beam that can be focused via standard ion optical techniques. They discuss estimations based on the initial size of the ion cloud and the energy distribution and show that the resulting beam has a low emittance.