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arXiv:1403.1093 · Applied Physics Letters

Triple stack glass-to-glass anodic bonding for optogalvanic spectroscopy cells with electrical feedthroughs

Renate Daschner, Harald Kübler, R. Löw, Holger Baur, Norbert Frühauf, Tilman Pfau

Published Jul 28, 2014• 34 citations
arXivHTMLPDF

Abstract

We demonstrate the use of an anodic bonding technique for building a vacuum tight vapor cell for the use of Rydberg spectroscopy of alkali atoms with thin film electrodes on the inside of the cell. The cell is fabricated by simultaneous triple stack glass-to-glass anodic bonding at 300 °C. This glue-free, low temperature sealing technique provides the opportunity to include thin film electric feedthroughs. The pressure broadening is only limited by the vapor pressure of rubidium and the lifetime is at least four months with operating temperatures up to 230 °C.

DOI
10.1063/1.4891534

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arXiv:1710.08627•Applied Optics•Dec 18, 2017•10 citations
We demonstrate the use of an anodic bonding technique for building a vacuum tight vapor cell for the use of Rydberg spectroscopy of alkali atoms with thin film electrodes on the inside of the cell. The cell is fabricated by simultaneous triple stack glass-to-glass anodic bonding at 300 °C. This glue-free, low temperature sealing technique provides the opportunity to include thin film electric feedthroughs. The pressure broadening is only limited by the vapor pressure of rubidium and the lifetime is at least four months with operating temperatures up to 230 °C.
Rydberg atoms in room temperature vapor cells are promising candidates for realizing new kinds of quantum devices and sensors. However, the alkali vapor, which is most commonly used, introduces new technological challenges. We demonstrate the applicability of anodic bonding as a sealing method for vapor cells, which preserves vacuum levels down to 10-7 mbar for several years, while being compatible with thin-film electronics on glass. We furthermore prove, that the implementation of such thin-film electronics inside a highly reactive atmosphere of alkali vapor is possible. We also propose a new kind of gas sensor based on Rydberg excitations as a competitive and promising application of our Rydberg detection scheme.
We report on the realization and evaluation of micro-fabricated alkali vapor cells using a thin-film indium bonding technique. Optical and double-resonance spectroscopy performed on the cells demonstrates their suitability for atomic clock applications. Long-term measurements show a stable pressure inside the cells and therefore an excellent hermeticity of the bonding over several months. The low bonding process temperature of ≤ 140°C combined with good bond strength makes this method a promising candidate for realizing micro-fabricated alkali cells with anti-relaxation wall-coatings.
The fabrication processes of chip-scale alkali atom vapor cells are designed, which include silicon micromachining, filling arrays of miniaturized cells with rubidium azide, hermetic packaging using anodic bonding technology, and photodecomposition of rubidium azide. The improved anodic bonding technology is demonstrated and used to improve the gastight bonding of alkali atom vapor cells to the glass/silicon/glass bonding structure. After the anodic bonding of the glass and silicon wafer is finished, an Al metal film with a certain thickness is sputtered at a certain angle at the back (i.e., the glass side) and side of the glass/silicon-bonded structure. Therefore, the electrical contact is led into the silicon wafer when a second anodic bonding is performed, and a high-quality glass/silicon/glass bonding structure is realized. Such anodic structures have great bond strength and gastight bonding of as low as 2.5×10-8Pa·m3·s-1. After gastight sealing, the cells are irradiated with ultraviolet, causing the azide to photodissociate into pure rubidium and nitrogen in situ. Rubidium optical absorption spectrum indicates that rubidium atoms are effectively sealed in the cells. It is confirmed that the process for the fabrication of the chip-scale alkali atom vapor cells is simple and feasible.
This paper focuses on standardized fabrications of atomic vapor cells with multipass cells. For this purpose, we build a vacuum system that enables the sealing of the multipass-cavity-assisted cell under vacuum. Alkali atoms are prepared inside a glass holder, and the tip of the holder is broken by controlled collisions under vacuum. Atoms are then transferred to a cell glass body part by heating. Once enough atoms accumulate inside the glass part, buffer and quenching gases are filled into the system, and the glass body part is moved to contact the silicon wafer which is bonded with a Herriott-cavity. Then the cavity part and the glass part are sealed together using the anodic bonding technique. The resulting vapor cells provide enhanced measurement sensitivity and improved device standardization, which allows for seamless replacements of each other in practical applications. The performances of these cells are tested, including a test in a double-resonance alkali-metal atomic magnetometer. A magnetic field sensitivity of 95 fT/Hz1/2 is achieved in a frequency range from 10 to 20 Hz with a multipass cell filled with 400 Torr (1 Torr = 1.33×102 Pa) N2 and natural Rb atoms at 100 ℃. The technology and cells developed in this work are expected to have wide applications in atomic devices, especially in He magnetometers and nuclear-spin atomic co-magnetometers, which have special requirements for cell qualities.
Abstract Millimeter-scale atomic vapor cells can be accurately and economically batch-fabricated by anodically bonding silicon and glass wafers, enabling the manufacturing of miniature atomic clocks and quantum sensors. However, silicon’s high dielectric constant and conductive losses at millimeter wave frequencies limit its suitability for Rydberg-atom electrometry, which enables highly sensitive electric-field measurements by exploiting the extreme polarizability of Rydberg states in alkali atoms. To address this, we present an all-glass wafer-level microfabrication process that eliminates silicon, creating hermetically sealed vapor cells that are stable over long timelines with embedded cesium dispensers. Femtosecond laser machining precisely defines the cell geometry, and laser-activated alkali loading ensures reliable filling. We demonstrate long-term vacuum stability and robust Rydberg excitation through electromagnetically induced transparency measurements. We then use these cells to measure a 34 GHz millimeter wave field resonant with the 58D5/2→60P3/258{{\rm{D}}}_{5/2}\to 60{{\rm{P}}}_{3/2}58D5/2​→60P3/2​ 58 D 5 / 2 → 60 P 3 / 2 transition using Autler-Townes splitting and observe the expected linear dependence with field strength. This work demonstrates that the all-glass bonding approach offers a highly durable low-loss cell alternative for miniaturized millimeter wave and microwave quantum sensing, with the potential to flexibly incorporate a range of other dielectric and semiconductor materials and integrate with photonic and electronic technologies.
Characteristics of a diffusion-bonded sapphire cell for optical experiments with hot metal vapors were investigated. The sapphire cell consisted of sapphire-crystal plates and a borosilicate-glass tube, which were bonded to each other by diffusion bonding without any binders or glues. The glass tube was attached to a vacuum manifold using the standard method applied in glass processing, filled with a small amount of Rb metal by chasing with a torch, and then sealed. The cell was baked at high temperatures, and optical experiments were then performed using rubidium atoms at room temperature. The sapphire cell was found to be vacuum tight, at least up to 350°C, and the sapphire walls remained clear over all temperatures. From the optical experiments, the generation of a background gas was indicated after baking at 200°C. The background gas pressure was low enough to avoid pressure broadening of absorption lines but high enough to cause velocity-changing collisions of Rb atoms. The generated gas pressure decreased at higher temperatures, probably due to chemical reactions.