Focused ion-beam (FIB) technology has been used to fabricate miniature Nb DC SQUIDs (superconducting quantum interference devices) which incorporate resistively shunted microbridge junctions and a central loop with a hole diameter ranging from 1058 to 50 nm. The smallest device, with a 50 nm hole diameter, has a white flux noise level of 2.6 µΦ 0 Hz −1/2 at 10 4 Hz. The scaling of the flux noise properties and focusing effect of the SQUID with the hole size were examined. The observed low frequency flux noises of different devices were compared with the contribution due to the spin fluctuation of defects introduced during FIB processing and of thermally activated flux hopping in the SQUID washer.
Focused ion-beam (FIB) technology has been used to fabricate miniature Nb DC SQUIDs (superconducting quantum interference devices) which incorporate resistively shunted microbridge junctions and a central loop with a hole diameter ranging from 1058 to 50 nm. The smallest device, with a 50 nm hole diameter, has a white flux noise level of 2.6 µΦ 0 Hz −1/2 at 10 4 Hz. The scaling of the flux noise properties and focusing effect of the SQUID with the hole size were examined. The observed low frequency flux noises of different devices were compared with the contribution due to the spin fluctuation of defects introduced during FIB processing and of thermally activated flux hopping in the SQUID washer.
We have fabricated dc superconducting quantum interference devices (SQUIDs) incorporating Nb/Al-oxide/Nb Josephson junctions in both stripline and washer geometries. Low-frequency noise in excess of that predicted by the resistively-shunted junction model is present in both geometries and is demonstrated to be flux noise. This flux noise is not environmental. Improvements in fabrication processing over the past four years have reduced the level of this flux noise. SQUIDs are now fabricated with PdAu resistors, Nb wiring layers, and SiO/sub 2/ interlayer dielectric. In our best well-coupled SQUIDs, the white-noise energy sensitivity is 5/spl times/10/sup -31/ J/spl middot/s, with a 1/f knee below 0.1 Hz. We believe further reduction in the flux noise might be obtained with the use of on-chip flux shielding and/or trapping structures.
For the fabrication of nanoscale SQUIDs, for example having loop diameters of order 1 µm or smaller, the conventional trilayer window-type Josephson junctions are too large. Instead, we consider the use of nanobridge junctions with dimensions of order 100 nm. The problem of hysteresis in the junctions' current–voltage characteristic (IVC) is avoided by depositing a gold overlayer, which serves as both a thermal and electrical shunt. Noise measurement of dc SQUIDs which incorporate such Nb nanobridges as the Josephson junctions are reported. Devices having different IVCs were fabricated and characterized. The best device has a flux noise of 5 × 10 −6 Φ 0 Hz −1/2 at 4.2 K, and there is no significant increase in the noise level in a static magnetic field up to 2 mT. Techniques for increasing the voltage modulation depth, and hence improving the flux noise performance, are discussed.
We report on the low-frequency noise performance of niobium dc superconducting quantum interference devices (SQUIDs), which contain nanobridges fabricated by focused ion beam lithography as the active Josephson elements. The devices have feature sizes down to 70 nm. We have measured devices of different loop sizes in two readout configurations: nano-scale loop sizes in small signal mode using a series SQUID array as a low-temperature pre-amplifier, and larger micron-scale loop sizes in a conventional flux-locked loop. We investigate the different contributions to the low frequency noise and report on electrical measurements made in applied magnetic fields of up to 0.5 T (in-plane) and 0.1 T (perpendicular to the plane) at operating temperatures around 7 K. We compare the measurements with the existing theories of noise in a dc SQUID.
Abstract In this paper a nanofabrication process, based on a focused ion beam (FIB) nanosculpting technique, for high sensitivity three-dimensional nanoscale superconducting quantum interference devices (nanoSQUIDs) is reported. The crucial steps of the fabrication process are described, as are some peculiar features of the superconductor–normal metal–insulator–superconductor (SNIS) Josephson junctions, which may useful for applications in cryocooler systems. This fabrication procedure is employed to fabricate sandwich nanojunctions and high sensitivity nanoSQUIDs. Specifically, the superconductive nanosensors have a rectangular loop of 1 × 0.2–0.4 μ m 2 interrupted by two square Nb/Al–AlO x /Nb SNIS Josephson junctions with side lengths of 0.3 μ m. The characterization of a typical nanoSQUID has been carried out and a spectral density of magnetic flux noise as low as 0.8 μ Φ 0 Hz –1/2 has been measured.
YBa2Cu3O7 24∘ (30∘) bicrystal grain boundary junctions (GBJs), shunted with 60\,nm (20\,nm) thick Au, were fabricated by focused ion beam milling with widths 80nm≤w≤7.8μm. At 4.2\,K we find critical current densities jc in the 105A/cm2 range %\dkc{\#1} (without a clear dependence on w) and an increase in resistance times junction area ρ with an approximate scaling ρ∝w1/2. For the narrowest GBJs jcρ≈100μV, which is promising for the realization of sensitive nanoSQUIDs for the detection of small spin systems. We demonstrate that our fabrication process allows the realization of sensitive nanoscale dc SQUIDs; for a SQUID with w≈100\,nm wide GBJs we find an rms magnetic flux noise spectral density of SΦ1/2≈4μΦ0/Hz1/2 in the white noise limit. We also derive an expression for the spin sensitivity Sμ1/2, which depends on SΦ1/2, on the location and orientation of the magnetic moment of a magnetic particle to be detected by the SQUID, and on the SQUID geometry. For the not optimized SQUIDs presented here, we estimate Sμ1/2=390μB/Hz, which could be further improved by at least an order of magnitude.
Superconducting QUantum Interference Devices (SQUIDs) based on nanobridge junctions have shown increasing promise for single particle detection. This paper describes the development of the fabrication of improved and reproducible nanobridge junctions fabricated by focused ion beam (FIB) milling from niobium thin films. Although the very low noise properties of nanobridge SQUIDs are well known, the nature of the milling process is little understood at the level of local superconducting properties. In this paper, we report the results for nanobridge Josephson devices and SQUIDs, which we believe are the first to be made by Xenon (Xe) FIB milling. Temperature-dependent current-voltage behavior, microwave-induced Shapiro steps, and SQUID response to magnetic fields have been measured. We make preliminary comparisons with nominally identical devices milled from Nb thin films using either Xe or Ga ions.