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MEMS enabled Fabry-Perot cavity for cQED experiments

Francisco Benito

Published Jan 1, 2011• 0 citations
OpenAlex

Abstract

The development of novel experimental techniques in atomic physics is allowing for the manipulation and control of atoms in structured silicon chips. These new techniques to manipulate atoms in a chip require building micro systems on chip that support actuation, alignment control and tunability for each micro component, which requires a significant integration effort. One example of a new experimental technique in atomic physics is the realization of optical cavities which is a very attractive model for quantum information and communication, because it permits the study of light-matter effect. The important exigency of an integrated micro cavity consisting of a micro mirror and a fiber optics cable are; alignment between them to form a small cavity volume and actuation to allow for adjusment of the cavity length. In this Master thesis the fabrication of 1-D v-shape or chevron thermal actuator is proposed based on the following characteristics: the actuator exploits the thermal expansion property of silicon to generate mechanical actuation, offers linear in-plane displacement, large force in small area compared to other actuators schemes and a shuttle that is capable of carrying an optical fiber that creates an optical cavity between it and a micro-mirror. Additionally, fabrication and characterization techniques are also described for the highly reflective (99.9988\\%) micro-mirrors.

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The development of novel experimental techniques in atomic physics is allowing for the manipulation and control of atoms in structured silicon chips. These new techniques to manipulate atoms in a chip require building micro systems on chip that support actuation, alignment control and tunability for each micro component, which requires a significant integration effort. One example of a new experimental technique in atomic physics is the realization of optical cavities which is a very attractive model for quantum information and communication, because it permits the study of light-matter effect. The important exigency of an integrated micro cavity consisting of a micro mirror and a fiber optics cable are; alignment between them to form a small cavity volume and actuation to allow for adjusment of the cavity length. In this Master thesis the fabrication of 1-D v-shape or chevron thermal actuator is proposed based on the following characteristics: the actuator exploits the thermal expansion property of silicon to generate mechanical actuation, offers linear in-plane displacement, large force in small area compared to other actuators schemes and a shuttle that is capable of carrying an optical fiber that creates an optical cavity between it and a micro-mirror. Additionally, fabrication and characterization techniques are also described for the highly reflective (99.9988\%) micro-mirrors.
The field of atom chips is a relatively new area of research which is rapidly becoming of great interest to the scientific community. It started out as a small branch of cold atom physics which has quickly grown into a multidisciplinary\nsubject. It now encompasses topics from fundamental atomic and quantum theory, optics and laser science, to the engineering of ultra sensitive sensors.\n\nIn this thesis the first steps are taken towards a truly integrated atom chip device for real world applications. Multiple devices are presented that allow the trapping, cooling, manipulation and counting of atoms. Each device presents a new component required for the integration and miniaturisation of atom chips\ninto a single device, capable of being used as a sensor.\n\nInitially, a wire trap was created capable of trapping and splitting a cloud of BoseEinstein condensate (BEC) for use in atom interferometry. Using this chip a BEC has been successfully created, trapped and coherent splitting of this cloud has been achieved.\n\nSubsequently, the integration and simplification of the initial trapping process was approached. In all the experiments to date, atoms are initially collected from a warm vapour by a magneto-optical trap (MOT). This thesis presents a new approach in which microscopic pyramidal MOTs’ are integrated into the chip itself. This greatly reduces the number of optical components and helps to simplify the process significantly.\n\nAlso presented is a method for creating a planar-concave micro-cavity capable of single atom detection. One such cavity consists of a concave mirror fabricated in silicon and the planar tip of an optical fibre. The performance of the resonators\nis highly dependent on the surface roughness and shape profile of the concave mirrors therefore a detailed study into the fabrication technique and its effects on these parameters was undertaken. Using such cavities single atom detection has been shown to be possible. These cavities have also been sccessfully integrated into an atom wire guide.\n\nFinally a co-sputtered amorphous silicon/titanium (a-Si/Ti) nanocomposite material was created and studied for its use as a novel structural material. This material is potentially suitable for integrated circuitry (IC)/Micro-electromechanical-\nsystems (MEMS) integration. The material’s electrical and\nstructural properties were investigated and initial results suggest that a-Si/Ti has the potential to be a compelling structural material for future IC/MEMS integration.\n\nTo build all of these devices, a full range of standard microfabrication techniques was necessary as well as some non standard processes that required considerable process development such as the electrochemical deposition.\n\nThis thesis presents a tool box of fabrication techniques for creating various components capable of different tasks that can be integrated into a single device. Each component has been successfully demonstrated in laboratory conditions. This represents a significant step toward a real world atom chip device.
We report the development of a fiber-based, tunable optical cavity with open access. The cavity is of the Fabry-Perot type and is formed with miniature spherical mirrors positioned on the end of single- or multi-mode optical fibers by a transfer technique which involves lifting a high-quality mirror from a smooth convex substrate, either a ball lens or micro-lens. The cavities typically have a finesse of sim1,000\\sim 1,000sim1,000 and a mode volume of 600 mu\\mumum3^33. We demonstrate the detection of small ensembles of cold Rb atoms guided through such a cavity on an atom chip.
This thesis reports on the development of an array of plane-concave Fabry-Perot microcavities containing atoms (or other quantum emitters), interconnected by UV-written waveguides on a silica-on-silicon chip. The microcavities are formed by a mirror coated on the end facet of the chip and an array of spherical micromirrors etched on silicon. This is to our knowledge the first attempt at implementing the emerging coupled-cavities QED paradigm. The device we propose possesses a degree of control, flexibility and tuning unmatched in other suggested implementations: The atoms can be manipulated inside the cavity by auxiliary lasers and the cavity-cavity coupling rate as well as the atom-cavity coupling can be tuned. It is highly scalable. Calculation of the complete (classical) optical spectrum of the device is presented. The quantum dynamics that may eventually be observed has also been studied. Waveguide chips containing couplers and phase shifter have been fabricated. We have successfully demonstrated the operation of the elementary sub-systems: the strong optical coupling between a microcavity and a waveguide resonator, and the tunable strong coupling between two evanescently coupled waveguide resonators. No experiments with atoms or other quantum emitters were attempted, because the waveguide propagation loss is so large that no quantum physics can be observed. There is hope that this can be overcome in the future by using other waveguide technologies.
The development of a fiber-based, tunable optical cavity with open access is reported. The cavity is of the Fabry-Pérot type and is formed with miniature spherical mirrors positioned on the end of single- or multimode optical fibers by a transfer technique, which involves lifting a high-quality mirror from a smooth convex substrate, either a ball lens or microlens. The cavities typically have a finesse of ∼1000 and a mode volume of 600μm3. The detection of small ensembles of cold Rb atoms guided through such a cavity on an atom chip is demonstrated.
The system comprised of an atom strongly coupled to photons, known as cavity quantum electrodynamics (QED), provides a rich experimental setting for quantum information processing, both in the implementation of quantum logic gates and in the development of quantum networks. Moreover, studies of cavity QED will help elucidate the dynamics of continuously observed open quantum systems with quantum-limited feedback. To achieve these goals in cavity QED, a neutral atom must be tightly confined inside a high-finesse cavity with small mode volume for long periods of time. Microfabricated wires on a substrate---known as an atom chip---can create a sufficiently high-curvature magnetic potential to trap atoms in the Lamb-Dicke regime. We have recently integrated an optical fiber Fabry-Perot cavity with such a device. The microwires allow the on-chip collection and laser cooling of neutral atoms, and allow the magnetic waveguiding of these atoms to an Ioffe trap inside the cavity mode. Magnetically trapped intracavity atoms have been detected with this cavity QED system. A similar experiment employing microdisks and photonic bandgap cavities is nearing completion. With these more exotic cavities, a robust and scalable atom-cavity chip system will deeply probe the strong coupling regime of cavity QED with magnetically trapped atoms. Atom chips have found great success in producing and manipulating Bose-Einstein condensates and in creating novel atom optical elements. An on-chip BEC has been attained in a miniaturized system incorporating an atom chip designed for atom interferometry and for studies of Josephson effects of a BEC in a double-well potential. Using similar microfabrication techniques, we created and demonstrated a specular magnetic atom mirror formed from a standard computer hard drive. This device, in conjunction with micron-sized charged circular pads, can produce a 1-D ring trap which may prove useful for studying Tonks gases in a ring geometry and for creating devices such as a SQUID-like system for neutral atoms. This thesis describes the fabrication and employment of these atoms chips in experiments at both Caltech and Munich, the latter in collaboration with Professors Theodore Haensch and Jakob Reichel at the Max Planck Institute for Quantum Optics.
We have fabricated curved optical micromirrors on silicon. We expect to be able to form open optical cavities between these mirrors and plane mirrors coated on the ends of optical fibres. The curved mirror templates have been prepared with less than 10 nm surface roughness by means of isotropic chemical etching. Two different methods are used for the fabrication of the mirrors: the first method uses a silicon oxide mask, while the second uses dry etching to form an indentation in the silicon surface that is opened out by wet isotropic etching. After coating the silicon substrate with gold, good quality mirrors are obtained with R ∼ 98% in the near infra-red. We find that a reflectivity of approximately 98% can be achieved by this method. Cavities formed from these mirrors will be useful for manipulating single atoms.