Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

Superconductor Science and Technology

Development of a microwave SQUID multiplexer for superconducting transition-edge sensor bolometer arrays

Zhi-Fa Feng, Xian-Feng Zhou, M Y Li, Peizhan Li, Wen Zhang, Qi-Jun Yao, Jiaqiang Zhong, Wei Miao, V. P. Koshelets, Lyudmila V. Filippenko, M. Yu. Fominsky, Jing Li, Sheng-Cai Shi

Published Sep 1, 2026• 0 citations
Publisher

Abstract

Abstract A microwave SQUID multiplexer ( μ MUX) with a high multiplexing factor is a promising readout approach for large-scale superconducting transition-edge sensor (TES) bolometer arrays. This paper reports on the characteristics of 16-channel μ MUX prototype chips and a 60-channel readout module developed to read out TES bolometers for the Ali cosmic microwave background polarization telescope (AliCPT). We designed two different coupling structures between the resonator and the radio-frequency superconducting interference device: design A with a mutual inductance ( M T ) of 2.3 pH and design B with an M T of 6.5 pH. For design A, the mean resonator bandwidth ( Δ f BW ) and peak-to-peak frequency shift ( Δ f pp ) are approximately 610 kHz and 290 kHz, respectively. The measured mean open-loop current noise is less than 40 pA / Hz . Preliminary results indicate that crosstalk between adjacent channels is below 1% in our design A μ MUX chip. A measured channel with design B shows a Δ f BW of 586 kHz and a current noise of 33 pA / Hz , similar to the design A channels. In comparison, the Δ f pp of 803 kHz is much larger than the design A channels due to a larger M T . The readout module, consisting of two design A chips and two design B chips, shows 60 resonances, corresponding to a yield of 94%. In the future, we will place 32 design A channels within the same chip dimension to increase the channel density and build a larger readout module suitable for AliCPT TES arrays.

DOI
10.1088/1361-6668/aea818

Related papers

Development of Microwave SQUID Multiplexer for Readout of Transition-Edge Sensor Array

Zhi-Fa Feng, Xianfeng Zhou, Wen Zhang +12 more

Superconducting transition-edge sensors (TESs) with high sensitivity can detect electromagnetic wave radiations from millimeter/submillimeter, optical to x/γ rays, and have been successfully used in many fields. To improve detection efficiency and sensitivity, large-scale TES arrays are required in combination with multiplexing readout electronics. Compared to other multiplexing schemes, microwave SQUID multiplexing (μMUX), consisting of high-quality microwave superconducting resonators and RF SQUIDs, is most suitable since it provides a wider bandwidth (GHz) and consequently higher multiplexing factor. We designed two types of circuits with different mutual inductances (MT) between the resonator and the RF SQUID: 2.3 pH for the weak-coupling channel and 6.5 pH for the strong- coupling channel. The resonator and RF SQUID washers made of 150 nm Nb are first fabricated by magnetron-sputtering and reactive ion etching (RIE), followed by deposition of Nb/Al-AlOx/Nb trilayer and definition of the Josephson junctions of the RF SQUIDs. This work presents a μMUX demonstration chip with five channels with Q1values of 787 and 3626, and the measured frequency shifts (Δfpp) of ∼500 kHz and 4 MHz for the weak- and strong-coupling channels, respectively. The open-loop equivalent noise current, obtained from the measured phase noise and resonator responsivity, is ∼80 pA/ √Hz with the strong-coupling channel.

IEEE Transactions on Applied Superconductivity•Jan 14, 2026•2 citations

A microwave SQUID multiplexer optimized for bolometric applications

B. Dober, Zeeshan Ahmed, K. Arnold +27 more

A microwave superconducting quantum interference device multiplexer has been optimized for reading out large arrays of superconducting transition-edge sensor (TES) bolometers. We present the scalable cryogenic multiplexer chip design that may be used to construct an 1820-channel multiplexer for the 4–8 GHz rf band. The key metrics of yield, sensitivity, and crosstalk are determined through measurements of 455 readout channels, which span 4–5 GHz. The median white-noise level is 45 pA/Hz, evaluated at 2 Hz, with a 1/f knee ≤ 20 mHz after common-mode subtraction. The white-noise level decreases the sensitivity of a TES bolometer optimized for detection of the cosmic microwave background at 150 GHz by only 3%. The measured crosstalk between any channel pair is ≤ 0.3%.

arXiv:2010.07998•Applied Physics Letters•Feb 8, 2021•56 citations

Readout demonstration of 512 TES bolometers using a single microwave SQUID multiplexer (Conference Presentation)

Bradley Dober, Zeeshan Ahmed, Jason E. Austermann +30 more

To enable the next-generation of bolometric cameras, we are developing the microwave SQUID multiplexer (μMUX). Upcoming receivers such as Simons Observatory, CCAT-prime, BICEP array, Ali-CPT, and CMB-S4 plan to instrument focal planes with 50,000-500,000 sensors. Sensor count is achieved by tiling many 150 mm-diameter densely packed detector arrays into these focal planes. The fabrication and quality of large-format bolometer arrays has been demonstrated and is now mature. In contrast, the readout technology required for next-generation receivers needs development. The sensitivity, low cross-talk, high multiplexing density, and small component size make the μMUX well-suited for this goal. In this approach, the TES signal modulates the inductance of an rf-SQUID that loads a high-Q microwave resonator. The coupled signal therefore modulates the microwave resonance frequency, which may be read out using homodyne techniques. By coupling each resonator to the same microwave feedline, many detectors can be read out on a single coaxial cable pair. The multiplexing density is in practice limited by signal bandwidth, allowable cross-talk, and the digitization bandwidth of room-temperature readout electronics. We present the design and performance of a scalable 64-channel multiplexer chip optimized for bolometric applications. We utilize a new quarter wave resonator design that increases the physical linear density by a factor of two, therefore achieving a smaller footprint for simplified detector packaging. Measurements of this design show 100 kHz resonator bandwidth, uniform 1.8 MHz frequency spacing, and an input referred current noise of 35 pA/√Hz that is well below the level of an optimized, background-limited TES bolometer. Using 8 daisy-chained and frequency scaled chips, we create a 512-channel multiplexer and use it to readout a 512 TES-bolometer array. We present the results of this large-scale μMUX demonstration including system yield, signal cross-talk, and an analysis of noise in various TES bias configurations. The result demonstrates the multiplexing density required to read out 2,000 sensors between 4-8 GHz.

Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XI•Jul 10, 2018•1 citation

Microwave SQUID Multiplexer for Cosmic Microwave Background Imagers

Bradley Dober, Daniel Becker, D. A. Bennett +9 more

Key performance characteristics are demonstrated for the microwave SQUID multiplexer ($\mu$MUX) coupled to transition edge sensor (TES) bolometers that have been optimized for cosmic microwave background (CMB) observations. In a 64-channel demonstration, we show that the $\mu$MUX produces a white, input referred current noise level of 29~pA$/\sqrt{\mathrm{Hz}}$ at -77~dB microwave probe tone power, which is well below expected fundamental detector and photon noise sources for a ground-based CMB-optimized bolometer. Operated with negligible photon loading, we measure 98~pA$/\sqrt{\mathrm{Hz}}$ in the TES-coupled channels biased at 65% of the sensor normal resistance. This noise level is consistent with that predicted from bolometer thermal fluctuation (i.e., phonon) noise. Furthermore, the power spectral density exhibits a white spectrum at low frequencies ($\sim$~100~mHz), which enables CMB mapping on large angular scales that constrain the physics of inflation. Additionally, we report cross-talk measurements that indicate a level below 0.3%, which is less than the level of cross-talk from multiplexed readout systems in deployed CMB imagers. These measurements demonstrate the $\mu$MUX as a viable readout technique for future CMB imaging instruments.

•Oct 11, 2017•0 citations

Microwave SQUID multiplexer for readout of transition-edge sensor array

Zhi-Fa Feng, Xin-Kai Yang, Wen Zhang +9 more

Superconducting transition-edge sensors (TESs) are highly sensitive detectors and can detect electromagnetic wave radiations from millimeter/submillimeter, optical to 𝑥/γrays, suitable for cosmology, astrophysics, quantum information, and biosensing. In principle, thousands of TESs even more are required to enhance the detection efficiency for large-scale survey. Among other multiplexing schemes, microwave SQUID multiplexer (μMUX), consisting of resonators and RF SQUIDs, has a bandwidth of several GHz, thus multiplexing factor on the order of thousands, more suitable for readout of large TES arrays. We designed and fabricated superconducting coplanar waveguide (CPW) resonators with a high qualityfactor and second-order gradient RF SQUID with two inductive coupling structures respectively. Then, we optimized the critical current density of the Josephson junction and measured the mutual inductance parameters of the second-order gradient structure SQUID, which are consistent with the simulation results. Finally, we fabricated a cryogenic μMUX chip based on RF SQUID and resonator. We discussed the results of the development of μMUX in more detail.

Infrared, Millimeter-Wave, and Terahertz Technologies•Oct 12, 2023•0 citations

Design, Fabrication, and Characterization of Microwave Multiplexing SQUID Prototype

Mengjie Song, Yixian Deng, Zhengwei Li +14 more

Abstract The readout system with a high multiplexing ratio has become a bottleneck limiting the application of large-scale Transition Edge Sensor (TES) detector arrays. In recent years, the microwave superconducting quantum interference device (SQUID) multiplexer has emerged as a key technology for effectively reading large-scale cryogenic detector arrays. Currently, the microwave SQUID multiplexer is being adopted by an increasing number of experiments due to its capability of achieving a multiplexing ratio of 2000:1 within the readout bandwidth. In this study, we developed a 32-channel microwave SQUID multiplexer prototype. And we measured 8 channels of the prototype. The measured equivalent noise current of the prototype reached 154 pA/√ Hz.

arXiv:2603.29613•Journal of Low Temperature Physics•Aug 20, 2026•2 citations
Abstract A microwave SQUID multiplexer ( μ MUX) with a high multiplexing factor is a promising readout approach for large-scale superconducting transition-edge sensor (TES) bolometer arrays. This paper reports on the characteristics of 16-channel μ MUX prototype chips and a 60-channel readout module developed to read out TES bolometers for the Ali cosmic microwave background polarization telescope (AliCPT). We designed two different coupling structures between the resonator and the radio-frequency superconducting interference device: design A with a mutual inductance ( M T ) of 2.3 pH and design B with an M T of 6.5 pH. For design A, the mean resonator bandwidth ( Δ f BW ) and peak-to-peak frequency shift ( Δ f pp ) are approximately 610 kHz and 290 kHz, respectively. The measured mean open-loop current noise is less than 40 pA / Hz . Preliminary results indicate that crosstalk between adjacent channels is below 1% in our design A μ MUX chip. A measured channel with design B shows a Δ f BW of 586 kHz and a current noise of 33 pA / Hz , similar to the design A channels. In comparison, the Δ f pp of 803 kHz is much larger than the design A channels due to a larger M T . The readout module, consisting of two design A chips and two design B chips, shows 60 resonances, corresponding to a yield of 94%. In the future, we will place 32 design A channels within the same chip dimension to increase the channel density and build a larger readout module suitable for AliCPT TES arrays.
Superconducting transition-edge sensors (TESs) with high sensitivity can detect electromagnetic wave radiations from millimeter/submillimeter, optical to x/γ rays, and have been successfully used in many fields. To improve detection efficiency and sensitivity, large-scale TES arrays are required in combination with multiplexing readout electronics. Compared to other multiplexing schemes, microwave SQUID multiplexing (μMUX), consisting of high-quality microwave superconducting resonators and RF SQUIDs, is most suitable since it provides a wider bandwidth (GHz) and consequently higher multiplexing factor. We designed two types of circuits with different mutual inductances (MT) between the resonator and the RF SQUID: 2.3 pH for the weak-coupling channel and 6.5 pH for the strong- coupling channel. The resonator and RF SQUID washers made of 150 nm Nb are first fabricated by magnetron-sputtering and reactive ion etching (RIE), followed by deposition of Nb/Al-AlOx/Nb trilayer and definition of the Josephson junctions of the RF SQUIDs. This work presents a μMUX demonstration chip with five channels with Q1values of 787 and 3626, and the measured frequency shifts (Δfpp) of ∼500 kHz and 4 MHz for the weak- and strong-coupling channels, respectively. The open-loop equivalent noise current, obtained from the measured phase noise and resonator responsivity, is ∼80 pA/ √Hz with the strong-coupling channel.
A microwave superconducting quantum interference device multiplexer has been optimized for reading out large arrays of superconducting transition-edge sensor (TES) bolometers. We present the scalable cryogenic multiplexer chip design that may be used to construct an 1820-channel multiplexer for the 4–8 GHz rf band. The key metrics of yield, sensitivity, and crosstalk are determined through measurements of 455 readout channels, which span 4–5 GHz. The median white-noise level is 45 pA/Hz, evaluated at 2 Hz, with a 1/f knee ≤ 20 mHz after common-mode subtraction. The white-noise level decreases the sensitivity of a TES bolometer optimized for detection of the cosmic microwave background at 150 GHz by only 3%. The measured crosstalk between any channel pair is ≤ 0.3%.
To enable the next-generation of bolometric cameras, we are developing the microwave SQUID multiplexer (μMUX). Upcoming receivers such as Simons Observatory, CCAT-prime, BICEP array, Ali-CPT, and CMB-S4 plan to instrument focal planes with 50,000-500,000 sensors. Sensor count is achieved by tiling many 150 mm-diameter densely packed detector arrays into these focal planes. The fabrication and quality of large-format bolometer arrays has been demonstrated and is now mature. In contrast, the readout technology required for next-generation receivers needs development. The sensitivity, low cross-talk, high multiplexing density, and small component size make the μMUX well-suited for this goal. In this approach, the TES signal modulates the inductance of an rf-SQUID that loads a high-Q microwave resonator. The coupled signal therefore modulates the microwave resonance frequency, which may be read out using homodyne techniques. By coupling each resonator to the same microwave feedline, many detectors can be read out on a single coaxial cable pair. The multiplexing density is in practice limited by signal bandwidth, allowable cross-talk, and the digitization bandwidth of room-temperature readout electronics. We present the design and performance of a scalable 64-channel multiplexer chip optimized for bolometric applications. We utilize a new quarter wave resonator design that increases the physical linear density by a factor of two, therefore achieving a smaller footprint for simplified detector packaging. Measurements of this design show 100 kHz resonator bandwidth, uniform 1.8 MHz frequency spacing, and an input referred current noise of 35 pA/√Hz that is well below the level of an optimized, background-limited TES bolometer. Using 8 daisy-chained and frequency scaled chips, we create a 512-channel multiplexer and use it to readout a 512 TES-bolometer array. We present the results of this large-scale μMUX demonstration including system yield, signal cross-talk, and an analysis of noise in various TES bias configurations. The result demonstrates the multiplexing density required to read out 2,000 sensors between 4-8 GHz.
Key performance characteristics are demonstrated for the microwave SQUID multiplexer (μ\muμMUX) coupled to transition edge sensor (TES) bolometers that have been optimized for cosmic microwave background (CMB) observations. In a 64-channel demonstration, we show that the μ\muμMUX produces a white, input referred current noise level of 29~pA/Hz/\sqrt{\mathrm{Hz}}/Hz​ at -77~dB microwave probe tone power, which is well below expected fundamental detector and photon noise sources for a ground-based CMB-optimized bolometer. Operated with negligible photon loading, we measure 98~pA/Hz/\sqrt{\mathrm{Hz}}/Hz​ in the TES-coupled channels biased at 65% of the sensor normal resistance. This noise level is consistent with that predicted from bolometer thermal fluctuation (i.e., phonon) noise. Furthermore, the power spectral density exhibits a white spectrum at low frequencies (∼\sim∼~100~mHz), which enables CMB mapping on large angular scales that constrain the physics of inflation. Additionally, we report cross-talk measurements that indicate a level below 0.3%, which is less than the level of cross-talk from multiplexed readout systems in deployed CMB imagers. These measurements demonstrate the μ\muμMUX as a viable readout technique for future CMB imaging instruments.
Superconducting transition-edge sensors (TESs) are highly sensitive detectors and can detect electromagnetic wave radiations from millimeter/submillimeter, optical to 𝑥/γrays, suitable for cosmology, astrophysics, quantum information, and biosensing. In principle, thousands of TESs even more are required to enhance the detection efficiency for large-scale survey. Among other multiplexing schemes, microwave SQUID multiplexer (μMUX), consisting of resonators and RF SQUIDs, has a bandwidth of several GHz, thus multiplexing factor on the order of thousands, more suitable for readout of large TES arrays. We designed and fabricated superconducting coplanar waveguide (CPW) resonators with a high qualityfactor and second-order gradient RF SQUID with two inductive coupling structures respectively. Then, we optimized the critical current density of the Josephson junction and measured the mutual inductance parameters of the second-order gradient structure SQUID, which are consistent with the simulation results. Finally, we fabricated a cryogenic μMUX chip based on RF SQUID and resonator. We discussed the results of the development of μMUX in more detail.
Abstract The readout system with a high multiplexing ratio has become a bottleneck limiting the application of large-scale Transition Edge Sensor (TES) detector arrays. In recent years, the microwave superconducting quantum interference device (SQUID) multiplexer has emerged as a key technology for effectively reading large-scale cryogenic detector arrays. Currently, the microwave SQUID multiplexer is being adopted by an increasing number of experiments due to its capability of achieving a multiplexing ratio of 2000:1 within the readout bandwidth. In this study, we developed a 32-channel microwave SQUID multiplexer prototype. And we measured 8 channels of the prototype. The measured equivalent noise current of the prototype reached 154 pA/√ Hz.