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Waveguide-integrated superconducting nanowire single-photon detectors

Filippo Martinelli

Published Jan 1, 2025• 0 citations
Publisher

Abstract

Advancements in integrated photonics have enabled the miniaturization and scaling of complex photonic circuits, providing stability and reliability beyond the capabilities of conventional bulk setups. A central component of quantum photonic circuits is the single-photon detector, responsible for quantum state measurement. Due to the stringent performance requirements of quantum applications, superconducting nanowire single-photon detectors (SNSPDs) have emerged as the preferred detection technology, offering superior efficiency, low noise, and high timing resolution. While tabletop SNSPDs are now mature, commercially available and contributed to significant progress in quantum computing and communication, their integration into photonic circuits is still in its infancy. Integrated SNSPDs have shown the potential to not only match but surpass tabletop detectors in several performance metrics. Nevertheless, demonstrations have largely focused on individual integrated detectors, with limited investigation into more complex integrated circuits and advanced functionalities. In this thesis, we present a novel integration platform based on photonic bound states in the continuum (BICs) to address a critical limitation of conventional SNSPD designs, where nanowires placed directly atop the waveguide core are constrained by the core geometry. The etchless nature of our BIC waveguides provides a flat surface that decouples the design of the electronic readout circuitry below from the optical circuit layer above, enabling innovative integrated-nanowire geometries and facilitating large-scale integration of SNSPDs with CMOS-compatible circuits. We established a complete fabrication and characterization workflow for integrating NbTiN-based superconducting nanowires with BIC waveguides. Our integrated detectors achieved state-of-the-art performance, including detection efficiencies exceeding 70%, intrinsic jitter below 70 ps, and ultrafast recovery times (~1.7 ns). These results pave the way toward GHz-rate quantum state measurements, essential for scalable quantum photonic processors. Leveraging the design flexibility of BIC waveguides, we introduce the concept of inline detection with SNSPDs which exploits their unique ability to precisely engineer absorption through nanowire length control. By cascading multiple partially absorbing SNSPDs, it is possible to significantly reduce the number of required optical components and miniaturize complex quantum measurement setups within an extremely compact footprint. Traditional integration geometries prevent such implementations due to significant scattering losses at nanowire terminations, which limit the feasibility of cascaded designs. On the other hand, the design flexibility provided by our BIC platform makes it ideal for development of inline detection schemes. As a proof-of-concept, we use inline detection to miniaturize two fundamental quantum optics tools: an integrated Hanbury Brown and Twiss (HBT) interferometer and a photon-number-resolving (PNR) detector. We replicated the functionalities of these setups using only two nanowires integrated along a single waveguide. These devices show extremely compact footprint, highlighting the scalability potential of our approach. We validated these devices through characterization of a single-photon source and the discrimination of collinear photon pairs. The experimental results aligned well with previous literature and theoretical predictions, confirming the reliability of our integration method. Overall, this work presents a novel approach to quantum measurements within integrated quantum photonic circuits. Inline detection represents a step forward in quantum integrated photonics, moving from individual device demonstrations toward functional quantum circuits. By introducing our BIC-based integration platform, we simplify detector design and fabrication, lowering barriers to the development of inline detection circuits and opening new opportunities in multiphoton quantum state measurements, single-photon spectroscopy, and multiphoton subtraction.

DOI
10.32657/10356/218736

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•Jan 1, 2025•0 citations
Advancements in integrated photonics have enabled the miniaturization and scaling of complex photonic circuits, providing stability and reliability beyond the capabilities of conventional bulk setups. A central component of quantum photonic circuits is the single-photon detector, responsible for quantum state measurement. Due to the stringent performance requirements of quantum applications, superconducting nanowire single-photon detectors (SNSPDs) have emerged as the preferred detection technology, offering superior efficiency, low noise, and high timing resolution. While tabletop SNSPDs are now mature, commercially available and contributed to significant progress in quantum computing and communication, their integration into photonic circuits is still in its infancy. Integrated SNSPDs have shown the potential to not only match but surpass tabletop detectors in several performance metrics. Nevertheless, demonstrations have largely focused on individual integrated detectors, with limited investigation into more complex integrated circuits and advanced functionalities. In this thesis, we present a novel integration platform based on photonic bound states in the continuum (BICs) to address a critical limitation of conventional SNSPD designs, where nanowires placed directly atop the waveguide core are constrained by the core geometry. The etchless nature of our BIC waveguides provides a flat surface that decouples the design of the electronic readout circuitry below from the optical circuit layer above, enabling innovative integrated-nanowire geometries and facilitating large-scale integration of SNSPDs with CMOS-compatible circuits. We established a complete fabrication and characterization workflow for integrating NbTiN-based superconducting nanowires with BIC waveguides. Our integrated detectors achieved state-of-the-art performance, including detection efficiencies exceeding 70%, intrinsic jitter below 70 ps, and ultrafast recovery times (~1.7 ns). These results pave the way toward GHz-rate quantum state measurements, essential for scalable quantum photonic processors. Leveraging the design flexibility of BIC waveguides, we introduce the concept of inline detection with SNSPDs which exploits their unique ability to precisely engineer absorption through nanowire length control. By cascading multiple partially absorbing SNSPDs, it is possible to significantly reduce the number of required optical components and miniaturize complex quantum measurement setups within an extremely compact footprint. Traditional integration geometries prevent such implementations due to significant scattering losses at nanowire terminations, which limit the feasibility of cascaded designs. On the other hand, the design flexibility provided by our BIC platform makes it ideal for development of inline detection schemes. As a proof-of-concept, we use inline detection to miniaturize two fundamental quantum optics tools: an integrated Hanbury Brown and Twiss (HBT) interferometer and a photon-number-resolving (PNR) detector. We replicated the functionalities of these setups using only two nanowires integrated along a single waveguide. These devices show extremely compact footprint, highlighting the scalability potential of our approach. We validated these devices through characterization of a single-photon source and the discrimination of collinear photon pairs. The experimental results aligned well with previous literature and theoretical predictions, confirming the reliability of our integration method. Overall, this work presents a novel approach to quantum measurements within integrated quantum photonic circuits. Inline detection represents a step forward in quantum integrated photonics, moving from individual device demonstrations toward functional quantum circuits. By introducing our BIC-based integration platform, we simplify detector design and fabrication, lowering barriers to the development of inline detection circuits and opening new opportunities in multiphoton quantum state measurements, single-photon spectroscopy, and multiphoton subtraction.
We report the realization of inline quantum measurements with waveguide-integrated superconducting nanowire single-photon detectors (SNSPDs). To suppress parasitic scattering at detector terminations, while ensuring compatibility with standard photonic substrates and cryogenic operation, we developed a photonic bound states in the continuum (BIC) platform based on etchless polymer waveguides. We show BIC-coupled inline detectors with on-chip efficiency exceeding 80%, recovery time of less than 2 ns, and intrinsic jitter of less than 70 ps. As a proof of principle, we implement Hanbury Brown and Twiss interferometry and photon number resolution with two collinear detectors within a footprint of 60⋅660 \cdot 660⋅6 μm2μm^2μm2. The concept of inline quantum measurements could be further developed to support more complex circuit functionalities, such as higher-order correlation measurements, quantum state tomography, and multi-photon subtraction, within a compact architecture.
We report the realization of inline quantum measurements with waveguide-integrated superconducting nanowire single-photon detectors (SNSPDs). To suppress parasitic scattering at detector terminations, while ensuring compatibility with standard photonic substrates and cryogenic operation, we developed a photonic bound state in the continuum (BIC) platform based on etchless polymer waveguides. We show BIC-coupled inline detectors with on-chip efficiency exceeding 80%, recovery time of less than 2 ns, and intrinsic jitter of less than 70 ps. As a proof of principle, we implement Hanbury Brown and Twiss interferometry and photon-number resolution with two collinear detectors within a footprint of 60 × 6 µm 2 . The concept of inline quantum measurements could be further developed to support more complex circuit functionalities, such as higher-order correlation measurements, quantum state tomography, and multi-photon subtraction, within a compact architecture.
Nanophotonic integrated circuits are emerging as a promising platform for quantum photonics. A key building block are waveguide integrated detectors with superior performance. Detectors based on superconductor nanowires (SNSPDs) attached to optical waveguides have been shown to provide high efficiency and good timing performance, as well as broad bandwidth. To move towards applications in high bandwidth quantum communication and processing, ultrafast single-photon detectors with high efficiency are needed. The speed of meander type SNSPDs is limited because the required high absorption efficiency necessitates long nanowires deposited on top of the waveguide. This enhances the kinetic inductance and makes the detectors slow. We overcome this problem by aligning the nanowire perpendicular to the waveguide to realize devices with a length below 1 µm. By integrating the nanowire into a photonic crystal cavity, we recover high absorption efficiency, thus enhancing the detection efficiency by more than an order of magnitude. Our cavity enhanced superconducting nanowire detectors are fully embedded in silicon nanophotonic circuits and efficiently detect single photons at telecom wavelengths. The detectors possess sub-nanosecond decay (~ 120 ps) and recovery times (~ 510 ps), and thus show potential for GHz count rates at low timing jitter (~ 32 ps).
We present the concept of inline detection with integrated superconducting nanowire single-photon detectors (SNSPDs), a promising approach to miniaturize quantum photonic circuits. By cascading multiple nanowires with controlled partial absorption along a single waveguide, complex detection functionalities can be realized within a compact footprint. To enable inline detectors, we developed an unconventional integration platform based on photonic bound states in etchless polymer waveguides that mitigates parasitic losses at the detectors termination. We demonstrate integrated devices with on-chip efficiency exceeding 80%, recovery time of less than 2 ns, and intrinsic jitter of less than 70 ps. As a proof of principle, we implement an inline Hanbury Brown and Twiss interferometry and photon number resolving detector. With a footprint of 60 × 6 µm², it is one of the most compact demonstrations of its kind to date. The concept of inline quantum measurements could be further developed to support miniaturization of more complex circuit functionalities, such as higher-order correlation measurements, quantum state tomography, and multi-photon subtraction within a compact footprint.
Fast and efficient detection of single photons with high timing accuracy is a crucial requirement in most quantum optics experiments and enables novel sensing and imaging solutions. Superconducting nanowire single-photon detectors (SNSPD) achieve technology-leading performance in terms of detection efficiency, dark count rate, timing jitter, and detector dead times. However, conventional SNSPDs with high system detection efficiency typically rely on resonant enhancement of the absorption efficiency, thus only achieving attractive detector benchmarks over narrow spectral windows. Waveguide-integrated SNSPDs allow for leveraging the wideband material absorption in superconducting nanowires by absorbing light in a traveling-wave geometry but have been limited to low system detection efficiencies due to interface losses when coupling to optical fibers. Here, we show how high system detection efficiencies of 22%–73% are realized over a broad wavelength range from 532 nm to 1640 nm in a single waveguide-integrated SNSPD device. We accomplish efficient coupling between optical fibers and waveguide-integrated nanowire detectors by employing a 3D interface, produced in direct laser writing, that relies on total internal reflection for achieving a broad transmission bandwidth. We further find low timing jitter of 25.7 ps and detector decay times of 9.8 ns, allowing for single-photon counting with high repetition rates up to 100 MHz. Our work paves the way for an efficient single-photon detector solution that combines the spectral requirements of an extremely wide range of quantum optics experiments in a single device. The coupling approach and SNSPD-integration with nanophotonic circuits are further well-suited for realizing large-scale detector arrays.
Superconducting nanowire single-photon detectors (SNSPDs) are renowned for their high detection efficiency, low dark count rate, and fast timing resolution, which have emerged as an essential device in quantum technologies, including quantum computing and communication, which also significantly benefits classical applications such as deep-space communication, neuromorphic computing, and light detection and ranging (LiDAR). However, designing and customizing SNSPD into versatile functionalities to satisfy these intensive requirements poses significant challenges, including thin-film deposition, nanofabrication, electrical integration, and light delivery strategies. While prior work has typically optimized individual steps – such as fabrication or characterization – there is a lack of reported systematic, integrated frameworks that span all stages from device design to performance benchmarking. This gap hinders broader adoption of the technology across scientific and industrial communities and limits the rigorous exploration of advanced detection concepts. This thesis aims to establish an end-to-end workflow for the customizable fabrication and comprehensive characterization of superconducting nanowire single-photon detectors, and to demonstrate that such a platform is essential for the investigation of diverse single-photon detection architectures. It begins with the optimization of NbTiN thin-film deposition utilizing an ultrahigh vacuum sputtering system. By systematically identifying and optimizing key deposition parameters, we achieve NbTiN films with targeted superconducting properties along with high uniformity and reproducibility. This fast and reliable workflow establishes a solid foundation for detector fabrication and provides instructions for flexible control over film properties. Furthermore, effective nanofabrication protocols for the high-quality SNSPDs were elaborated, along with the specialized cryogenic packaging techniques for reliable electrical and optical integration. The achieved devices demonstrated performance metrics comparable to commercial systems. The implementation of this full fabrication—characterization cycle also enabled flexible exploration of advanced detector architectures. For example, we investigated superconducting microbridge single-photon detectors (SMSPDs) as a complementary platform, demonstrating a fivefold enhancement in signal-to-noise ratio and a tenfold reduction in recovery time relative to conventional SNSPDs. These results provide quantitative insight into detector design trade-offs. Within this framework, photon-number-resolving (PNR) detection using SNSPDs was further investigated as an essential function for advanced quantum and classical applications. We presented innovative detector architectures—interleaved multi-pixel arrays and multilayer coherent absorption structures—to overcome limitations inherent in conventional multiplexing methods, such as nonuniform detection, temporal degradation, and crosstalk. An interleaved multi-pixel SNSPD array with up to four-photon resolution was achieved with uniform detection, as well as a multilayer architecture based on coherent absorption with uniform and near-unity absorption efficiency. Importantly, a theoretical comparison between these two architectures was conducted to evaluate their absorption efficiency and PNR performance, offering insights into structural optimization and device scalability for advanced PNR detectors. Overall, this thesis establishes a fully in-house SNSPD fabrication and characterization capability, providing a robust foundation for the development, customization, and evaluation of high-performance superconducting single-photon detectors. This platform enables reproducible design optimization, quantitative performance benchmarking, and systematic exploration of detector architectures. By integrating fabrication, characterization, and architectural innovation within a consistent workflow, it facilitates both fundamental investigation and application-driven advancement of single-photon detection technologies in our laboratory and the broader research community in Singapore.