We present the concept of inline detection with integrated superconducting nanowire single-photon detectors (SNSPDs), a promising approach to miniaturize quantum photonic circuits. By cascading multiple nanowires with controlled partial absorption along a single waveguide, complex detection functionalities can be realized within a compact footprint. To enable inline detectors, we developed an unconventional integration platform based on photonic bound states in etchless polymer waveguides that mitigates parasitic losses at the detectors termination. We demonstrate integrated devices with on-chip efficiency exceeding 80%, recovery time of less than 2 ns, and intrinsic jitter of less than 70 ps. As a proof of principle, we implement an inline Hanbury Brown and Twiss interferometry and photon number resolving detector. With a footprint of 60 × 6 µm², it is one of the most compact demonstrations of its kind to date. The concept of inline quantum measurements could be further developed to support miniaturization of more complex circuit functionalities, such as higher-order correlation measurements, quantum state tomography, and multi-photon subtraction within a compact footprint.
We present the concept of inline detection with integrated superconducting nanowire single-photon detectors (SNSPDs), a promising approach to miniaturize quantum photonic circuits. By cascading multiple nanowires with controlled partial absorption along a single waveguide, complex detection functionalities can be realized within a compact footprint. To enable inline detectors, we developed an unconventional integration platform based on photonic bound states in etchless polymer waveguides that mitigates parasitic losses at the detectors termination. We demonstrate integrated devices with on-chip efficiency exceeding 80%, recovery time of less than 2 ns, and intrinsic jitter of less than 70 ps. As a proof of principle, we implement an inline Hanbury Brown and Twiss interferometry and photon number resolving detector. With a footprint of 60 × 6 µm², it is one of the most compact demonstrations of its kind to date. The concept of inline quantum measurements could be further developed to support miniaturization of more complex circuit functionalities, such as higher-order correlation measurements, quantum state tomography, and multi-photon subtraction within a compact footprint.
We report the realization of inline quantum measurements with waveguide-integrated superconducting nanowire single-photon detectors (SNSPDs). To suppress parasitic scattering at detector terminations, while ensuring compatibility with standard photonic substrates and cryogenic operation, we developed a photonic bound state in the continuum (BIC) platform based on etchless polymer waveguides. We show BIC-coupled inline detectors with on-chip efficiency exceeding 80%, recovery time of less than 2 ns, and intrinsic jitter of less than 70 ps. As a proof of principle, we implement Hanbury Brown and Twiss interferometry and photon-number resolution with two collinear detectors within a footprint of 60 × 6 µm 2 . The concept of inline quantum measurements could be further developed to support more complex circuit functionalities, such as higher-order correlation measurements, quantum state tomography, and multi-photon subtraction, within a compact architecture.
We report the realization of inline quantum measurements with waveguide-integrated superconducting nanowire single-photon detectors (SNSPDs). To suppress parasitic scattering at detector terminations, while ensuring compatibility with standard photonic substrates and cryogenic operation, we developed a photonic bound states in the continuum (BIC) platform based on etchless polymer waveguides. We show BIC-coupled inline detectors with on-chip efficiency exceeding 80%, recovery time of less than 2 ns, and intrinsic jitter of less than 70 ps. As a proof of principle, we implement Hanbury Brown and Twiss interferometry and photon number resolution with two collinear detectors within a footprint of 60⋅6μm2. The concept of inline quantum measurements could be further developed to support more complex circuit functionalities, such as higher-order correlation measurements, quantum state tomography, and multi-photon subtraction, within a compact architecture.
Advancements in integrated photonics have enabled the miniaturization and scaling of complex photonic circuits, providing stability and reliability beyond the capabilities of conventional bulk setups. A central component of quantum photonic circuits is the single-photon detector, responsible for quantum state measurement. Due to the stringent performance requirements of quantum applications, superconducting nanowire single-photon detectors (SNSPDs) have emerged as the preferred detection technology, offering superior efficiency, low noise, and high timing resolution. While tabletop SNSPDs are now mature, commercially available and contributed to significant progress in quantum computing and communication, their integration into photonic circuits is still in its infancy. Integrated SNSPDs have shown the potential to not only match but surpass tabletop detectors in several performance metrics. Nevertheless, demonstrations have largely focused on individual integrated detectors, with limited investigation into more complex integrated circuits and advanced functionalities. In this thesis, we present a novel integration platform based on photonic bound states in the continuum (BICs) to address a critical limitation of conventional SNSPD designs, where nanowires placed directly atop the waveguide core are constrained by the core geometry. The etchless nature of our BIC waveguides provides a flat surface that decouples the design of the electronic readout circuitry below from the optical circuit layer above, enabling innovative integrated-nanowire geometries and facilitating large-scale integration of SNSPDs with CMOS-compatible circuits. We established a complete fabrication and characterization workflow for integrating NbTiN-based superconducting nanowires with BIC waveguides. Our integrated detectors achieved state-of-the-art performance, including detection efficiencies exceeding 70%, intrinsic jitter below 70 ps, and ultrafast recovery times (~1.7 ns). These results pave the way toward GHz-rate quantum state measurements, essential for scalable quantum photonic processors. Leveraging the design flexibility of BIC waveguides, we introduce the concept of inline detection with SNSPDs which exploits their unique ability to precisely engineer absorption through nanowire length control. By cascading multiple partially absorbing SNSPDs, it is possible to significantly reduce the number of required optical components and miniaturize complex quantum measurement setups within an extremely compact footprint. Traditional integration geometries prevent such implementations due to significant scattering losses at nanowire terminations, which limit the feasibility of cascaded designs. On the other hand, the design flexibility provided by our BIC platform makes it ideal for development of inline detection schemes. As a proof-of-concept, we use inline detection to miniaturize two fundamental quantum optics tools: an integrated Hanbury Brown and Twiss (HBT) interferometer and a photon-number-resolving (PNR) detector. We replicated the functionalities of these setups using only two nanowires integrated along a single waveguide. These devices show extremely compact footprint, highlighting the scalability potential of our approach. We validated these devices through characterization of a single-photon source and the discrimination of collinear photon pairs. The experimental results aligned well with previous literature and theoretical predictions, confirming the reliability of our integration method. Overall, this work presents a novel approach to quantum measurements within integrated quantum photonic circuits. Inline detection represents a step forward in quantum integrated photonics, moving from individual device demonstrations toward functional quantum circuits. By introducing our BIC-based integration platform, we simplify detector design and fabrication, lowering barriers to the development of inline detection circuits and opening new opportunities in multiphoton quantum state measurements, single-photon spectroscopy, and multiphoton subtraction.
Photonic-integrated circuits have emerged as a scalable platform for complex quantum systems. A central goal is to integrate single-photon detectors to reduce optical losses, latency and wiring complexity associated with off-chip detectors. Superconducting nanowire single-photon detectors (SNSPDs) are particularly attractive because of high detection efficiency, sub-50-ps jitter and nanosecond-scale reset time. However, while single detectors have been incorporated into individual waveguides, the system detection efficiency of multiple SNSPDs in one photonic circuit-required for scalable quantum photonic circuits-has been limited to <0.2%. Here we introduce a micrometer-scale flip-chip process that enables scalable integration of SNSPDs on a range of photonic circuits. Ten low-jitter detectors are integrated on one circuit with 100% device yield. With an average system detection efficiency beyond 10%, and estimated on-chip detection efficiency of 14-52% for four detectors operated simultaneously, we demonstrate, to the best of our knowledge, the first on-chip photon correlation measurements of non-classical light.
Nanophotonic integrated circuits are emerging as a promising platform for quantum photonics. A key building block are waveguide integrated detectors with superior performance. Detectors based on superconductor nanowires (SNSPDs) attached to optical waveguides have been shown to provide high efficiency and good timing performance, as well as broad bandwidth. To move towards applications in high bandwidth quantum communication and processing, ultrafast single-photon detectors with high efficiency are needed. The speed of meander type SNSPDs is limited because the required high absorption efficiency necessitates long nanowires deposited on top of the waveguide. This enhances the kinetic inductance and makes the detectors slow. We overcome this problem by aligning the nanowire perpendicular to the waveguide to realize devices with a length below 1 µm. By integrating the nanowire into a photonic crystal cavity, we recover high absorption efficiency, thus enhancing the detection efficiency by more than an order of magnitude. Our cavity enhanced superconducting nanowire detectors are fully embedded in silicon nanophotonic circuits and efficiently detect single photons at telecom wavelengths. The detectors possess sub-nanosecond decay (~ 120 ps) and recovery times (~ 510 ps), and thus show potential for GHz count rates at low timing jitter (~ 32 ps).
Fast and efficient detection of single photons with high timing accuracy is a crucial requirement in most quantum optics experiments and enables novel sensing and imaging solutions. Superconducting nanowire single-photon detectors (SNSPD) achieve technology-leading performance in terms of detection efficiency, dark count rate, timing jitter, and detector dead times. However, conventional SNSPDs with high system detection efficiency typically rely on resonant enhancement of the absorption efficiency, thus only achieving attractive detector benchmarks over narrow spectral windows. Waveguide-integrated SNSPDs allow for leveraging the wideband material absorption in superconducting nanowires by absorbing light in a traveling-wave geometry but have been limited to low system detection efficiencies due to interface losses when coupling to optical fibers. Here, we show how high system detection efficiencies of 22%–73% are realized over a broad wavelength range from 532 nm to 1640 nm in a single waveguide-integrated SNSPD device. We accomplish efficient coupling between optical fibers and waveguide-integrated nanowire detectors by employing a 3D interface, produced in direct laser writing, that relies on total internal reflection for achieving a broad transmission bandwidth. We further find low timing jitter of 25.7 ps and detector decay times of 9.8 ns, allowing for single-photon counting with high repetition rates up to 100 MHz. Our work paves the way for an efficient single-photon detector solution that combines the spectral requirements of an extremely wide range of quantum optics experiments in a single device. The coupling approach and SNSPD-integration with nanophotonic circuits are further well-suited for realizing large-scale detector arrays.