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Journal of Applied Physics

Programmable multiple ion beams based on a magneto-optical trap ion source

H W Wang, Haoyu Huang, Jianing Sun, Chunkai Xu, Enliang Wang, Xu Shan, Xiangjun Chen

Published May 15, 2026• 0 citations
Publisher

Abstract

We report a programmable multiple ion beam system developed by combing a magneto-optical trap ion source with a spatial light modulator (SLM). Neutral rubidium atoms are trapped into a magneto-optical trap and cooled to 700 μK. An excitation laser beam, the intensity distribution of which is shaped into a square array by the SLM, selectively excites the cold atoms, which are subsequently ionized by an ionization laser beam. The ions are then extracted by an electric field to produce multiple ion beams. A 3×3 ion beam array has been generated. The size of each beams is 180 μm, and the transversal reduced emittance of multiple ion beams at the source is evaluated to be 1.65 × 10−9 m radeV. We also demonstrate the generation of ion bunches with a user-defined spatial pattern. In the future, by integrating this programmable multiple ion beam system with high reduction ion optics, it is possible to generate nanoscale multiple focused ion beams for the potential applications in maskless patterning and direct writing lithography.

DOI
10.1063/5.0302075

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We report on the demonstration of a low emittance, high brightness ion source based on magneto-optically trapped neutral atoms. Our source has ion optical properties comparable to or better than those of the commonly used liquid metal ion source. In addition, it has several advantages that offer new possibilities, including high resolution ion microscopy with ion species tailored for specific applications, contamination-free ion milling, and nanoscale implantation of a variety of elements, either in large quantities, or one at a time, deterministically. Using laser-cooled Cr atoms, we create an ion beam with a normalized rms (root-mean-square) emittance of 6.0 x 10 (-7) mm mrad M e V and approximately 0.25 pA of current, yielding a brightness as high as 2.25 A cm (-2) sr (-1) eV (-1). These values of emittance and brightness show that, with suitable ion optics, an ion beam with a useful amount of current can be produced and focused to spot sizes of less than 1 nm.
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We demonstrate loading of ions into a surface-electrode trap (SET) from a remote, laser-cooled source of neutral atoms. We first cool and load $\ensuremath{\sim}$106{10}^{6}106 neutral 88{}^{88}88Sr atoms into a magneto-optical trap from an oven that has no line of sight with the SET. The cold atoms are then pushed with a resonant laser into the trap region where they are subsequently photoionized and trapped in an SET operated at a cryogenic temperature of 4.6 K. We present studies of the loading process and show that our technique achieves ion loading into a shallow (15 meV depth) trap at rates as high as 125 ions/s while drastically reducing the amount of metal deposition on the trap surface as compared with direct loading from a hot vapor. Furthermore, we note that due to multiple stages of isotopic filtering in our loading process, this technique has the potential for enhanced isotopic selectivity over other loading methods. Rapid loading from a clean, isotopically pure, and precooled source may enable scalable quantum-information processing with trapped ions in large, low-depth surface-trap arrays that are not amenable to loading from a hot atomic beam.