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IEEE Electron Devices Technology & Manufacturing Conference (EDTM)

Chip-scale cooling of cryogenic microsystems

Mika Prunnila

Published Mar 1, 2026• 0 citations
Publisher

Abstract

Advancements in cryo-enabled fields like space electronics and quantum information increasingly demand efficient cooling of chips down to deep cryogenic temperatures. In this work, we present an overview of recent progress in chip-scale cooling technologies for cryogenic microsystems. We, especially, discuss the underlying operational principles and technological innovations of tunnel junction coolers and adiabatic field refrigeration methods, emphasizing their significance for on-chip cooling and scalable general purpose cooling platforms.

DOI
10.1109/edtm65772.2026.11497115

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