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Hybrid-integrated quantum optics on a silicon nitride platform

Khaled Mnaymneh, Edith Yeung, David B. Northeast, Jeongwan Jin, Patrick Laferrière, S. Haffouz, Robin L. Williams, Philip J. Poole, Dan Dalacu

Published Jul 18, 2023• 0 citations
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Abstract

We present our progress towards scalable quantum-technology solutions on a silicon nitride platform. Using a pick-and-place technique, we demonstrate hybrid integration of single InAs quantum dots on a Si3N4 optical waveguide and show that the hybrid-integrated process does not ruin the single emitter properties, and may even enhance them.

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In this talk, we highlight our progress towards scalable quantum-tech solutions. We demonstrate hybrid integration of single InAs quantum dots on a Si3N4 optical waveguide platform and show that the hybridization process does not degrade the single emitter properties, and can even enhance them.

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Hybrid Integration of Solid-State Quantum Emitters with a Silicon Chip

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Efficient generation and control of quantum light on a chip is very important to achieve scalable quantum photonic systems. Solid-state quantum emitters can generate single photons with high efficiency, while silicon photonic circuits can manipulate them in an integrated device structure. Combining these two material platforms, therefore, enable us to utilize the advantages of both systems and make feasible integrated quantum photonic devices. We demonstrate hybrid integration of solid-state quantum dots to a silicon photonic device by using a pick-and-place technique and perform Hanbury-Brown and Twiss experiments on the silicon chip with integrated quantum emitters.

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Integrated Quantum Photonics

Iman Esmaeil Zadeh

In the past decades quantum optics has been at the forefront of quantum innovative technologies. For practical applications, scalable platforms for implementation of quantum optical circuits are vital. This thesis presents two new platforms for scalable implementation of quantum optical circuits, namely, modular approach and monolithic integration. Here, we take the first steps towards the integration of three main elements of every quantum optics circuits: Single-photon emitters, single-photon detectors, and quantum logics. Until now, most quantum optical circuits used separate platforms for single-photon generation and detection. The main challenge in the integration of these technologies, which have different requirements, has slowed down the research in the field. Here, we integrate sources and detectors by first fabricating the devices on their own platform and then transferring and combining them together. Plasma enhanced chemical vapor deposition of silicon nitride followed by etching optical waveguides connect these elements. Removing the Poissonian optical excitation field from the quantum circuit is necessary for integration. Classical optical excitation can be avoided if the sources are electrically pumped. However, fabrication of high-quality electrically pumped sources, suitable for integration, has been limited. The experiments described in chapter 4 are our first step towards addressing the mentioned problem. Defect-free nanowires are grown on <100> direction and their optoelectronic performance are characterized. Nanowire quantum dots, thanks to their waveguiding, purity, coherence and their potentials for deterministic integration with other optical circuits, are promising single-photon sources for on-chip quantum optics. However, precise control of the emission energy of the quantum dots by growth has not become possible yet. Chapter 5 describes a method for on-chip tuning of emission energy of nanowire quantum dots using strain fields. We show the emission energy of independent nanowire quantum dots can be brought into degeneracy without affecting their single-photon emission properties. The quantum optical components have to be routed and connected together to form functional circuits. On a chip, this is usually carried out using optical waveguides. Moreover, manipulation of single photons has to be done in a scalable fashion. Again optical waveguides and ring resonators are very good candidates for this task. Therefore, understanding the behavior of these circuits such as their losses, polarization dependence, and temperature behavior is important. The experiment described in chapter 6 studies the behavior of plasma enhanced silicon nitride waveguides in cryogenic temperatures. We concluded in this chapter that due to weak thermo-optic sensitivity of silicon nitride at cryogenic temperatures, the available thermal budget on the system should be carefully considered. An important step in achieving a scalable platform for quantum optical circuits is deterministic and efficient integration of single-photon sources. In chapter 7, we demonstrate successful integration of III-V nanowire quantum dots with silicon nitride waveguides. The nanowires are deterministically selected and transferred from the original growth chip to the new substrate where they are integrated with low-loss silicon nitride waveguides. Our measurements show that the integrated sources preserve their high quality emission properties. In chapter 8, we describe an alternative approach: amodular method for scalable quantum optics. The proposed technique is based on coupling the single-photon from sources into optical fibers where the photons can be processed and then fed into the single-photon detectors. This approach has high flexibility and is easier to implement but as described in the chapter, at the moment, losses in the interfaces between optical fibers and single-photon sources are a major limiting factor. We conclude the thesis with some possible future directions and exciting new results on integration of single-photon detectors with sources and waveguides. Finally, primary results on on-chip single-photon filtering and removal of the optical excitation field are demonstrated.

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The scalability of quantum photonic integrated circuits opens the path towards large-scale quantum computing and communication. To date, this scalability has been limited by the stochastic nature of the quantum light sources. Moreover, hybrid integration of different platforms will likely be necessary to combine state-of-the-art devices into a functioning architecture. Here, we demonstrate the active alignment and edge-coupling of arrays of ten site-controlled gallium arsenide quantum dots to an array of ten silicon nitride single-mode waveguides, at cryogenic temperatures. The coupling is facilitated by the fabrication of nanopillars, deterministically self-aligned around each quantum dot, leading to a high-yield and regular array of single-photon sources. An on-chip beamsplitter verifies the triggered emission of single photons into the silicon nitride chip. The low inhomogeneous broadening of the ensemble enables us to observe the spectral overlap of adjacent site-controlled emitters. Across the array of waveguides, the signal collected from each coupled quantum dot is consistently and reproducibly 0.17 relative to the free-space collection from the very same single-photon source. Comparing measurement with waveguide simulations, we infer that absolute coupling efficiencies of $\approx 5 \%$ are currently obtained between our quantum dots and the waveguides.

physics.opticsCross-listedarXiv:2512.07535•Dec 9, 2025
We present our progress towards scalable quantum-technology solutions on a silicon nitride platform. Using a pick-and-place technique, we demonstrate hybrid integration of single InAs quantum dots on a Si3N4 optical waveguide and show that the hybrid-integrated process does not ruin the single emitter properties, and may even enhance them.
Efficient generation and control of quantum light on a chip is very important to achieve scalable quantum photonic systems. Solid-state quantum emitters can generate single photons with high efficiency, while silicon photonic circuits can manipulate them in an integrated device structure. Combining these two material platforms, therefore, enable us to utilize the advantages of both systems and make feasible integrated quantum photonic devices. We demonstrate hybrid integration of solid-state quantum dots to a silicon photonic device by using a pick-and-place technique and perform Hanbury-Brown and Twiss experiments on the silicon chip with integrated quantum emitters.
In the past decades quantum optics has been at the forefront of quantum innovative technologies. For practical applications, scalable platforms for implementation of quantum optical circuits are vital. This thesis presents two new platforms for scalable implementation of quantum optical circuits, namely, modular approach and monolithic integration. Here, we take the first steps towards the integration of three main elements of every quantum optics circuits: Single-photon emitters, single-photon detectors, and quantum logics. Until now, most quantum optical circuits used separate platforms for single-photon generation and detection. The main challenge in the integration of these technologies, which have different requirements, has slowed down the research in the field. Here, we integrate sources and detectors by first fabricating the devices on their own platform and then transferring and combining them together. Plasma enhanced chemical vapor deposition of silicon nitride followed by etching optical waveguides connect these elements. Removing the Poissonian optical excitation field from the quantum circuit is necessary for integration. Classical optical excitation can be avoided if the sources are electrically pumped. However, fabrication of high-quality electrically pumped sources, suitable for integration, has been limited. The experiments described in chapter 4 are our first step towards addressing the mentioned problem. Defect-free nanowires are grown on <100> direction and their optoelectronic performance are characterized. Nanowire quantum dots, thanks to their waveguiding, purity, coherence and their potentials for deterministic integration with other optical circuits, are promising single-photon sources for on-chip quantum optics. However, precise control of the emission energy of the quantum dots by growth has not become possible yet. Chapter 5 describes a method for on-chip tuning of emission energy of nanowire quantum dots using strain fields. We show the emission energy of independent nanowire quantum dots can be brought into degeneracy without affecting their single-photon emission properties. The quantum optical components have to be routed and connected together to form functional circuits. On a chip, this is usually carried out using optical waveguides. Moreover, manipulation of single photons has to be done in a scalable fashion. Again optical waveguides and ring resonators are very good candidates for this task. Therefore, understanding the behavior of these circuits such as their losses, polarization dependence, and temperature behavior is important. The experiment described in chapter 6 studies the behavior of plasma enhanced silicon nitride waveguides in cryogenic temperatures. We concluded in this chapter that due to weak thermo-optic sensitivity of silicon nitride at cryogenic temperatures, the available thermal budget on the system should be carefully considered. An important step in achieving a scalable platform for quantum optical circuits is deterministic and efficient integration of single-photon sources. In chapter 7, we demonstrate successful integration of III-V nanowire quantum dots with silicon nitride waveguides. The nanowires are deterministically selected and transferred from the original growth chip to the new substrate where they are integrated with low-loss silicon nitride waveguides. Our measurements show that the integrated sources preserve their high quality emission properties. In chapter 8, we describe an alternative approach: amodular method for scalable quantum optics. The proposed technique is based on coupling the single-photon from sources into optical fibers where the photons can be processed and then fed into the single-photon detectors. This approach has high flexibility and is easier to implement but as described in the chapter, at the moment, losses in the interfaces between optical fibers and single-photon sources are a major limiting factor. We conclude the thesis with some possible future directions and exciting new results on integration of single-photon detectors with sources and waveguides. Finally, primary results on on-chip single-photon filtering and removal of the optical excitation field are demonstrated.
Photonic integrated quantum circuits could fully unlock quantum systems' potential. However,monololithic platforms face several challenges. We explore hybrid quantum photonic integration, combining different photonic materials to mitigate monolithic approaches disadvantages . Our work introduces hybrid circuits integrating different quantum sources and materials. We present a technique integrating nanowire single photon sources with silicon nitride waveguides, enabling circuit reconfiguration and emission wavelength control using heat, and strain tuning which is compatible with superconducting single photon detectors . We realize a full quantum transceiver on chip using on demand single photon sources and SNSPDS, in additio to dispersion engineering of superconducting transmission lines for SNSPDs multi-pixel integration. We discuss progress towards room-temperature quantum integrated photonics using hexagonal boron nitride quantum emitters. Finally, we delve into scalable generation and quantum state reconstruction of W-states and construction using phase retrieval algorithms, and ongoing research on topological photonics, and photonic lattices.
The scalability of quantum photonic integrated circuits opens the path towards large-scale quantum computing and communication. To date, this scalability has been limited by the stochastic nature of the quantum light sources. Moreover, hybrid integration of different platforms will likely be necessary to combine state-of-the-art devices into a functioning architecture. Here, we demonstrate the active alignment and edge-coupling of arrays of ten site-controlled gallium arsenide quantum dots to an array of ten silicon nitride single-mode waveguides, at cryogenic temperatures. The coupling is facilitated by the fabrication of nanopillars, deterministically self-aligned around each quantum dot, leading to a high-yield and regular array of single-photon sources. An on-chip beamsplitter verifies the triggered emission of single photons into the silicon nitride chip. The low inhomogeneous broadening of the ensemble enables us to observe the spectral overlap of adjacent site-controlled emitters. Across the array of waveguides, the signal collected from each coupled quantum dot is consistently and reproducibly 0.17 relative to the free-space collection from the very same single-photon source. Comparing measurement with waveguide simulations, we infer that absolute coupling efficiencies of ≈5%\approx 5 \%≈5% are currently obtained between our quantum dots and the waveguides.