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Applied Physics Letters

Laser annealing enabled resistance reduction and stable frequency tuning of superconducting qubits

Lei Du, Hao-Ran Tao, Chi Zhang, Liang-Liang Guo, Yong Chen, Xin Tian, Hai-Feng Zhang, Zhi-Long Jia, Peng Duan, Guo‐Ping Guo

Published Feb 16, 2026• 0 citations
Publisher

Abstract

The scalability of superconducting quantum processors is hindered by frequency collisions among qubits, calling for precise and reliable frequency tuning techniques. Here, we develop a laser annealing platform and systematically investigate its effect on superconducting qubits. In contrast to previous reports that consistently observed an increase in the Josephson junction resistance Rn, we find that laser annealing can also reduce Rn by up to 24.9%, corresponding to a significant increase in qubit frequency with a tuning precision of 22.8 MHz. This complementary behavior enriches the phenomenology of laser annealing. Atomic-resolution scanning transmission electron microscopy and electron energy-loss spectroscopy analysis reveal a reduced Al coordination number and an increased oxygen vacancy concentration, which lower the effective barrier height and account for the decrease in Rn. Importantly, laser-annealed qubits maintain high coherence, and storage at −10 °C in high vacuum suppresses long-term resistance drift to below 0.5%. These results demonstrate that laser annealing provides a practical approach for stable and accurate frequency tuning. Beyond this, our findings suggest that the effect of laser annealing is richer than previously recognized and leave open the possibility of developing more versatile, potentially bidirectional frequency control for scalable superconducting quantum processors.

DOI
10.1063/5.0303700

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The scalability of superconducting quantum processors is hindered by frequency collisions among qubits, calling for precise and reliable frequency tuning techniques. Here, we develop a laser annealing platform and systematically investigate its effect on superconducting qubits. In contrast to previous reports that consistently observed an increase in the Josephson junction resistance Rn, we find that laser annealing can also reduce Rn by up to 24.9%, corresponding to a significant increase in qubit frequency with a tuning precision of 22.8 MHz. This complementary behavior enriches the phenomenology of laser annealing. Atomic-resolution scanning transmission electron microscopy and electron energy-loss spectroscopy analysis reveal a reduced Al coordination number and an increased oxygen vacancy concentration, which lower the effective barrier height and account for the decrease in Rn. Importantly, laser-annealed qubits maintain high coherence, and storage at −10 °C in high vacuum suppresses long-term resistance drift to below 0.5%. These results demonstrate that laser annealing provides a practical approach for stable and accurate frequency tuning. Beyond this, our findings suggest that the effect of laser annealing is richer than previously recognized and leave open the possibility of developing more versatile, potentially bidirectional frequency control for scalable superconducting quantum processors.
Abstract We propose a novel method for post-fabrication frequency trimming of superconducting qubits via RF-biased inductively coupled plasma (ICP) annealing. Junction resistance systematically increases with RF bias power, achieving a maximum increase of approximately 40% under O2 plasma and up to 180% under Ar plasma conditions. Specifically, oxygen-based ICP annealing notably improves qubit coherence, extending both relaxation (T 1) and coherence (T 2) times. Transmission Electron Microscopy (TEM) analysis indicates that the observed increase in junction resistance corresponds to structural changes and barrier thickening. Our results demonstrate that RF-biased ICP annealing provides a highly effective and controllable technique to tune qubit frequencies, representing a promising pathway toward improved coherence and scalability in superconducting quantum processors.
Scaling the number of qubits while maintaining high-fidelity quantum gates remains a key challenge for quantum computing. Presently, superconducting quantum processors with >50 qubits are actively available. For these systems, fixed-frequency transmons are attractive because of their long coherence and noise immunity. However, scaling fixed-frequency architectures proves challenging because of precise relative frequency requirements. Here, we use laser annealing to selectively tune transmon qubits into desired frequency patterns. Statistics over hundreds of annealed qubits demonstrate an empirical tuning precision of 18.5 MHz, with no measurable impact on qubit coherence. We quantify gate error statistics on a tuned 65-qubit processor, with median two-qubit gate fidelity of 98.7%. Baseline tuning statistics yield a frequency-equivalent resistance precision of 4.7 MHz, sufficient for high-yield scaling beyond 10 3 qubit levels. Moving forward, we anticipate selective laser annealing to play a central role in scaling fixed-frequency architectures.
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Superconducting quantum processors are one of the leading platforms for realizing scalable fault-tolerant quantum computation (FTQC). The recent demonstration of post-fabrication tuning of Josephson junctions using alternating-bias assisted annealing (ABAA) technique and a reduction in junction loss after ABAA illuminates a promising path towards precision tuning of qubit frequency while maintaining high coherence. Here, we demonstrate precision tuning of the maximum∣0⟩→∣1⟩\vert 0\rangle\rightarrow\vert 1\rangle∣0⟩→∣1⟩transition frequency(f01max⁡)(f_{01}^{\max})(f01max​)of tunable transmon qubits by performing ABAA at room temperature using commercially available test equipment. We characterize the impact of junction relaxation and aging on resistance spread after tuning, and demonstrate a frequency equivalent tuning precision of 7.7 MHz (0.17%) based on targeted resistance tuning on hundreds of qubits, with a resistance tuning range up to 18.5%. Cryogenic measurements on tuned and untuned qubits show evidence of improved coherence after ABAA with no significant impact on tunability. Despite a small global offset, we show an empiricalf01max⁡f_{01}^{\max}f01max​tuning precision of 18.4 MHz by tuning a set of multi-qubit processors targeting their designed Hamiltonians. We experimentally characterize high-fidelity parametric resonance iSWAP gates on two ABAA-tuned 9-qubit processors with fidelity as high as 99.51±0.20%\pm 0.20{\%}±0.20%. On the best-performing device, we measured across the device a median fidelity of 99.22% and an average fidelity of 99.13$\pm$0.12%. Yield modeling analysis predicts high detuning-edge-yield using ABAA beyond the 1000-qubit scale. These results demonstrate the cutting-edge capability of frequency targeting using ABAA and open up a new avenue to systematically improving Hamiltonian targeting and optimization for scaling high-performance superconducting quantum processors.
Recent advances in the alternating-bias-assisted annealing (ABAA) technique have successfully mitigated intrinsic Josephson-junction (JJ) fabrication variations. This new technique enables precision qubit frequency tuning alongside simplicity. However, it is critical to enhance tuning throughput and yield while investigating the factors that drive targeting performance as the technology scales. Here, we characterize ABAA tuning performance within a 150-mm wafer process flow and extend this technique to simultaneous, multi-channel tuning, demonstrating that a wafer-scale JJ resistance tuning precision of σ=0.50±0.05%σ=0.50\pm0.05\%σ=0.50±0.05% alongside a component-level yield of ≥98.8%\ge 98.8\%≥98.8% can be achieved. Furthermore, we demonstrate a strong correlation between yield, tuning speed, and junction breakdown voltage, establishing the latter as a vital process control parameter for meeting production goals. Finally, we demonstrate a successful implementation of ABAA tuning on a quad-module quantum processor (Rigetti Cepheus-1-36Q), where we achieve an empirical frequency targeting precision of σ∼30 MHzσ\sim 30\text{ MHz}σ∼30 MHz in both qubit and qubit-qubit detuning frequencies, contributing to high median two-qubit gate fidelities. These results confirm the efficacy and scalability of ABAA for high-precision Hamiltonian targeting, a critical enabler for modular superconducting quantum processor technology.
Scaling the number of qubits while maintaining high-fidelity quantum gates remains a key challenge for quantum computing. Presently, superconducting quantum processors with >50-qubits are actively available. For such systems, fixed-frequency transmons are attractive due to their long coherence and noise immunity. However, scaling fixed-frequency architectures proves challenging due to precise relative frequency requirements. Here we employ laser annealing to selectively tune transmon qubits into desired frequency patterns. Statistics over hundreds of annealed qubits demonstrate an empirical tuning precision of 18.5 MHz, with no measurable impact on qubit coherence. We quantify gate error statistics on a tuned 65-qubit processor, with median two-qubit gate fidelity of 98.7%. Baseline tuning statistics yield a frequency-equivalent resistance precision of 4.7 MHz, sufficient for high-yield scaling beyond 1000-qubit levels. Moving forward, we anticipate selective laser annealing to play a central role in scaling fixed-frequency architectures.