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IEEE Microwave Magazine

Microwave and Millimeter-Wave Low-Temperature Superconductor Devices

Raafat R. Mansour

Published May 9, 2025• 3 citations
Publisher

Abstract

Superconductor-based microwave and millimeter-wave components play a crucial role in various applications, particularly in superconductor-based digital receivers and superconductor-based quantum computing systems. This article aims to provide an overview of recent advancements in superconductor microwave and millimeter-wave devices implemented in a multilayer nio­bium fabrication process. These devices cover a broad frequency range, from 300 MHz to 100 GHz, and include bandpass/band-reject filters, wideband cou­plers, niobium-based microelectromechanical sys­tems switches, phase shifters, filters-based power protection circuits, phase shifter-based power limiters, tunable attenuators, and supercon­ductor-based magnet-less circulators.

DOI
10.1109/mmm.2025.3540315

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Superconductor-based microwave and millimeter-wave components play a crucial role in various applications, particularly in superconductor-based digital receivers and superconductor-based quantum computing systems. This article aims to provide an overview of recent advancements in superconductor microwave and millimeter-wave devices implemented in a multilayer nio­bium fabrication process. These devices cover a broad frequency range, from 300 MHz to 100 GHz, and include bandpass/band-reject filters, wideband cou­plers, niobium-based microelectromechanical sys­tems switches, phase shifters, filters-based power protection circuits, phase shifter-based power limiters, tunable attenuators, and supercon­ductor-based magnet-less circulators.
A wide variety of applications, ranging from radio-frequency (RF) receivers for broadband communications and signal detection, on earth and in space, would benefit from high-performance superconductor analog-to-digital converters (ADCs), based on magnetic flux quantization and fast switching Josephson junctions. Superconductor ADCs are capable of very high sample rates (100 GHz or more), very high linearity, and high sensitivity. Nyquist-rate ADCs use the high sample rate to digitize a wide instantaneous bandwidth (tens of GHz) and are useful for wideband spectrum monitoring as well as high-end scientific instrumentation. Delta and delta-sigma oversampling ADCs use the high linearity to achieve programmable trade-off between dynamic range and instantaneous bandwidth. These lowpass and bandpass ADCs have been used for direct digitization of narrower (tens to hundreds of MHz) RF bands in the 1-20 GHz range for a variety of communications, intelligence, electronic warfare, and radar applications. Another application area of these cryogenic ADCs is for outputs of cryogenic sensor arrays and terahertz mixers. Recent advances in various classes of ADCs for different applications are described.
Superconducting microelectronics (SME) technology has the potential of realizing very high speed digital receivers capable of performing direct digitization of radio frequency signals with very low power consumption. The SME receiver is implemented on a single chip using Niobium based low temperature superconductive (LTS) Josephson Junction (JJ) technology by HYPRES. Analogue RF filters are still required at the receiver front end and are key components of the overall superconductor digital receiver. SME receivers usually require two types of RF filters; a wideband bandpass filter and a bandstop filter (a notch filter). The notch filter is required to eliminate interference and unwanted signals in the passband. In this thesis, design of highly miniaturized lumped element wideband and bandstop filters is investigated and some challenges are addressed. The filters are fabricated by the HYPRES process and therefore can be integrated with the SME receiver on the same chip. \nIn a wideband filter, the coupling between the adjacent resonators is high. Achieving such a strong coupling is one of the challenges of designing wideband filters. The wideband filters realized with distributed elements usually suffer from very low spurious frequency. As the bandwidth of the filter becomes wider, the spurious peak of the second harmonic gets closer to the passband of the filter. In the first part of this work, the possibility of realizing lumped element superconducting bandpass filters (BPF) with a relative bandwidth of 80% is investigated. \nIn the second part of the thesis, design and realization of lumped element superconducting bandstop filters (BSF) is discussed. The challenge for designing a bandstop filter is providing a good match over a wide frequency range. So narrowband inverters cannot be used. Instead, usually λ/4 matched transmission lines provide 90° phase shift between the resonators of a notch filter. The possibility of replacing the long transmission line with other means or eliminating the inverters and using both shunt and series resonators are investigated. Having both series and shunt resonators introduces some new challenges that are addressed in the thesis and discussed thoroughly. \nA tunable notch resonator is presented. The tunability is provided by a superconducting MEMS varactor that is realized in our group by doing some post processing on the device fabricated by HYPRES. The tunability range of the device at cryogenic temperatures is investigated. A 3-pole tunable BSF is also designed that uses the same tunable resonators. The tunability of the filter is investigated through simulation.
Superconductive technology offers unparalleled digital and mixed-signal circuit performance, advancing digital processing from baseband to RF stages. This allows elimination of analog filters and mixers with generally poorly controlled phase performance, causing intersymbol interference limiting an overall communication system performance. HYPRES has been developing superconducting circuit components for application to digital RF communication transceivers. The components include low-pass and band-pass analog-to-digital converters, digital decimation and correlation-based filters, digital up/down-converters, and low-time-jitter clock sources. All of these are based on ultra-fast Rapid Single Flux Quantum (RSFQ) digital circuits, with clock rates up to 20 GHz demonstrated with 3-micron technology, and being scaled to 40 GHz and above. In this paper, we will discuss design and performance of some of these components. 1.
This article presents a low-temperature superconductor (LTS)-based microwave phase shifter. The device utilizes a superconducting hybrid coupler monolithically integrated with two tunable reflective loads. An array of radio frequency superconducting quantum interference devices (rf-SQUIDs) is used to achieve inductive tuning in reflective loads, resulting in a broadband true time delay phase shift. The rf-SQUIDs are current controlled using an on-chip dc bias circuitry. The proof-of-concept fabricated device provides excellent RF performance in theX{X}X- and Ku -band with a phase shift of 49° at 10 GHz and 67° at 15 GHz. The insertion loss is < 1.5 dB for the entire range from 8 to 18 GHz. The methods to further improve the obtained phase shift are discussed. The overall device has a chip footprint of 0.6 mm2 and is fabricated using MIT-Lincoln Lab (MIT-LL) SFQ5ee eight-layer Niobium (Nb)-based superconducting fabrication process.
The results of development and investigations of ultra-low-noise waveguide and quasioptical receivers of millimeter wave band region based on SIS mixers are presented. The possible cryogenic components of millimeter wave band receivers based on SIS junctions such as dc SQUID IF amplifiers, SIS noise sources, cooled ferrite phase-shifters-modulators, superconducting mm-wave local oscillators, superconducting analog-to-digital converters were designed, produced and experimentally studied. The prospects of creation the entirely superconducting integrated receiving circuits containing all mentioned above superconducting components are discussed.
All-refractory material superconducting millimeter-wave oscillators have been designed and investigated experimentally with different superconductor-insulator-superconductor (SIS) mixers integrated on the same chip. Tested structures include a flux-flow oscillator (FFO) based on a long Josephson junction, a coupling section, and an SIS detector with tuned out junction capacitance. Coupling sections were designed as multistep microstrip quarter-wave impedance transformers. All junctions have been fabricated on the basis of a high-quality trilayer Nb-AlO/sub x/-Nb process. Microwave oscillations in the frequency range 75-500 GHz have been detected experimentally. The level of delivered power was estimated from the pumped I-V curve of the strongly coupled single junction detector. Coupled power levels higher than 0.1 mu W at 256 GHz were achieved. A spectral linewidth of the FFO of less than 1 MHz has been estimated experimentally. The first attempt to create an integrated receiver based on an FFO and an SIS array mixer integrated on the same chip was made in the 2-mm wavelength band.>