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Materials Science in Semiconductor Processing

Impact of conductor losses and metal overetching on integrated superconducting coplanar waveguide resonators

Daniel Rocha-Aguilera, Gabriela Méndez‐Jerónimo, Joel Molina Reyes

Published Apr 28, 2025• 1 citation
Publisher
DOI
10.1016/j.mssp.2025.109614

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