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Journal of Microelectromechanical Systems

Compact Multi-Point Quantum Magnetometer With a Molded Foaming 3D MEMS Vapor Cell for Magnetic Localization

Jianfeng Zhang, Jintang Shang

Published Apr 4, 2025• 1 citation
Publisher

Abstract

Currently, medical magnetic localization necessitates complex and costly gradient coil systems, primarily due to the limited sensitivity of the magnetic sensors in use. This article presents a highly sensitive, compact multipoint quantum magnetometer (CMQM) characterized by a straightforward design and low cost. The core of the sensor is a MEMS 3D Rubidium (Rb) atomic cell with an optical path of 3.0 cm, which is manufactured through a mold foaming process. The size of the compact sensor head is less than 11.5 cm3. The CMQM obtains magnetic field magnitude at six points by measuring Larmor frequency of rubidium atoms within corresponding positions. A uniform magnetic field coils is calibrated with the CMQM within a ferromagnetic shield. The vector synthesis method is used to enhance the accuracy by reducing interference from remanent magnetic field. The deviation between the measured magnetic field and those predicted using closed cylinder approximation (CCA) is less than 1.1%. The magnetic noise density at different points varies between 2.289 pT/Hz1/2and 6.015 pT/Hz1/2. The effective magnetic resolution of the CMQM is ~0.65 nT. Theoretical spatial resolution of the CMQM can reach to$17.5~\mu $m with a simple circular coil. [2024-0230]

DOI
10.1109/jmems.2025.3553291

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Recent advances in chip scale magnetic quantum sensing have produced platforms that pair unprecedented sensitivity with extreme miniaturization. Here, we demonstrate a hybrid quantum sensor by combining Nitrogen-Vacancy (NV) centers in diamond with a rubidium (Rb) vapor cell, designed for precise magnetic field measurements and quantum exploration. The hybrid comagnetometer leverages the high resolution vector magnetic sensing of NV centers along with the high scalar field sensitivity of the Rb vapor, enhancing the estimation of the magnetic field in terms of magnitude, direction and spatial distribution. A micromachined mm scale vapor cell containing Rb atoms is paired with a bulk diamond, enabling optical and microwave control of both quantum systems for integrated field estimation. Simulations and experimental results confirm the improved accuracy of the system in magnetic field measurements, demonstrating a beyond 10 dB improvement. This NV and Rb platform offers a versatile route toward portable, sensitive magnetometry and opens new possibilities for integrated, multi-modal quantum sensing.
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In this letter, we present a novel microfabricated shaped rubidium vapor cell with 3 cm optical path length for miniaturized atomic magnetometers. The novel shaped rubidium vapor cells are manufactured by a wafer-level fabrication process, and the process consists of the following three steps sequentially: first, wet etching to form oblong shallow cavity arrays; second, anodic bonding, glass reflowing, and wet etching to obtain a glass wafer with shaped structures; third, anodic bonding and chemical reaction to obtain the wafer-level shaped rubidium vapor cells. A miniaturized atomic magnetometer using the novel shaped rubidium vapor cell is characterized in the geomagnetic environment. The performance of the novel shaped rubidium vapor cell is compared with the traditional microfabricated rubidium vapor cell of a “glass–silicon–glass” sandwich structure. Results show that the measured geomagnetic field is 47.85 μT. It is demonstrated that the dispersive signal's slope of the novel shaped rubidium vapor cell is 15 times larger than that of the traditional one. Results also indicate that the miniaturized atomic magnetometer working in the geomagnetic environment has a magnetic noise spectral density of 3.5 pT/Hz1/2from 1 to 2 Hz.