Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

IEEE Sensors Letters

Microfabricated Shaped Rubidium Vapor Cell for Miniaturized Atomic Magnetometers

Yu Ji, Jintang Shang, Guoliang Li, Jin Zhang, Jianfeng Zhang

Published Jan 10, 2020• 23 citations
Publisher

Abstract

In this letter, we present a novel microfabricated shaped rubidium vapor cell with 3 cm optical path length for miniaturized atomic magnetometers. The novel shaped rubidium vapor cells are manufactured by a wafer-level fabrication process, and the process consists of the following three steps sequentially: first, wet etching to form oblong shallow cavity arrays; second, anodic bonding, glass reflowing, and wet etching to obtain a glass wafer with shaped structures; third, anodic bonding and chemical reaction to obtain the wafer-level shaped rubidium vapor cells. A miniaturized atomic magnetometer using the novel shaped rubidium vapor cell is characterized in the geomagnetic environment. The performance of the novel shaped rubidium vapor cell is compared with the traditional microfabricated rubidium vapor cell of a “glass–silicon–glass” sandwich structure. Results show that the measured geomagnetic field is 47.85 μT. It is demonstrated that the dispersive signal's slope of the novel shaped rubidium vapor cell is 15 times larger than that of the traditional one. Results also indicate that the miniaturized atomic magnetometer working in the geomagnetic environment has a magnetic noise spectral density of 3.5 pT/Hz1/2from 1 to 2 Hz.

DOI
10.1109/lsens.2020.2965737

Related papers

Magnetic Gradient Measurement Using Micro-Fabricated Shaped Rubidium Vapor Cell

Yu Ji, Jintang Shang, Jin Zhang +1 more

This paper presents a novel method to measure the magnetic gradient by an Mz atomic magnetometer using a micro-fabricated shaped rubidium vapor cell. The shaped vapor cell is fabricated by a chemical foaming process. Four micro radio frequency (RF) coils are mounted on the shaped rubidium vapor cell. Magnetic fields at the four points corresponding to the RF coils along the laser beam propagation are obtained by measuring Larmor frequency of the rubidium atoms inside the vapor cell. The magnetic gradients are also acquired with the measured magnetic fields. The measurement is performed in a magnetic shield environment. A dc electrical coil is taken to produce an existed magnetic field for the measurement and the theoretical magnetic field distribution is calculated. It is demonstrated that the measured magnetic fields and magnetic gradients correspond well with the calculated ones. Results show that the absolute error of the magnetic field is less than 0.1 μT, the relative error of the magnetic field is below 0.8%, and the relative error of the magnetic gradient is below 5.5%. Results also indicate that the atomic magnetometer has a sensitivity of 5 pT/Hz1/2from 1 to 2 Hz. The Mz atomic magnetometer is potentially useful for applications requiring gradient field information.

IEEE Transactions on Magnetics•May 30, 2019•12 citations

Microfabricated multi-axis cell for integrated atomic devices

Linda Péroux, A. Dewilde, Andrei Mursa +12 more

Abstract Microfabricated alkali vapor cells enable the miniaturization of atomic sensors, but require collective wafer-level integration of complex features. In many applications-including magnetometers, gyroscopes, magneto-optical traps, and fluorescence imaging-multiple optical accesses are needed to enhance performance. Yet, achieving this without compromising manufacturability remains challenging. In this work, we present a wafer-level fabrication approach that enables three orthogonal optical pathways in microfabricated alkali vapor cells, using fully scalable and collective processes. Our method relies on the thermal reflow of glass preforms, shaped by laser-assisted etching (LAE) and bonded between silicon frames. The relatively low surface roughness produced by LAE allows for effective reflow, which further smooths the surfaces without significantly compromising the optical planarity of the windows. This process results in multi-axis vapor cells featuring embedded, optics-grade lateral windows. We evaluate the device performance through both single-beam and dual-beam atomic magnetometry measurements. Magnetic sensitivities better than 200 fT Hz − 1 are demonstrated along each of the three orthogonal axes, confirming the potential of the approach for tri-axis magnetic field sensing at sub-picotesla resolution. This fabrication strategy opens new perspectives for versatile, high-performance atomic sensors, fully compatible with wafer-level integration and mass production.

arXiv:2509.22456•Journal of Physics Photonics•Dec 2, 2025•1 citation

Improvement of Sensitivity by Using Microfabricated Spherical Alkali Vapor Cells for Chip-Scale Atomic Magnetometers

Yu Ji, Jintang Shang, Qi Gan +2 more

The designs of microfabricated alkali vapor cells play an important role when the atomic magnetometers are developing toward on-chip integration. This paper presents microfabricated spherical alkali vapor cells with improved sensitivity for chip-scale atomic magnetometers. A microfabricated spherical rubidium vapor cell and a traditional microfabricated planar rubidium vapor cell are designed for comparison, which are of the same volume and interconnected by a microchannel to acquire equal inner buffer gas pressure. In chip-scale spin-exchange relaxation-free (SERF) atomic magnetometers, the rubidium polarization lifetimes of three pairs of spherical and planar vapor cells at different buffer gas pressures of 0.35, 0.73, and 2.00 amg are measured, respectively. The sensitivity of SERF atomic magnetometers using the vapor cells at a 0.35-amg buffer gas pressure is also measured. The results show that the transverse polarization lifetime of the spherical vapor cell is 2.46, 1.44, and 1.05 times that of the planar one at 0.35-, 0.73-, and 2.00-amg buffer gas pressures, respectively. Combining the improved polarization lifetime and increased optical path length, chip-scale SERF atomic magnetometer using the microspherical vapor cell has the sensitivity of 60 fT/Hz1/2from 5 to 15 Hz, while that based on the planar one is demonstrated with the sensitivity of 400 fT/Hz1/2from 5 to 15 Hz.

IEEE Transactions on Components Packaging and Manufacturing Technology•Sep 3, 2018•22 citations

Micro-fabricated caesium vapor cell with 5 mm optical path length

T. Dyer, Stuart J. Ingleby, Camelia C. Dunare +4 more

Micro-fabricated vapor cells have applications in a number of emerging quantum technology-based devices including miniaturized atomic magnetometers, atomic clocks, and frequency references for laser systems. Increasing the cell optical path length (OPL) and smallest cell dimension are normally desirable to increase the signal to noise ratio (SNR) and minimize the de-polarization rate due to collisions between atomic or molecular species and the cell walls. This paper presents a fully wafer-level scalable fabrication process to manufacture vapor cells with dimensions approaching those of glass-blown cells. The fabrication process is described, and spectroscopic measurements (optical absorption and magnetic resonance) are reported. A magnetic resonance linewidth of 350 Hz is demonstrated, and this is the smallest linewidth reported to date for a micro-fabricated vapor cell.

Journal of Applied Physics•Nov 22, 2022•12 citations

Preparation of a Micro Rubidium vapor cell and its integration in a chip-scale atomic magnetometer

Yu Ji, Jintang Shang, You‐Peng Chen +1 more

Micro Rubidium vapor cell has very important research values in many fields including atomic magnetometer, atomic clock, atomic gyroscope and so on. In this study, a new method to fabricate the micro Rubidium vapor cell has been investigated and uniform wafer-level micro Rubidium vapor cells, which could be used in atomic devices, have been prepared successfully by the proposed process. First of all, the fabrication process is introduced. Then the prepared uniform wafer-level micro Rubidium vapor cell has been characterized by Energy Dispersive Spectroscopy (EDS) and Ultraviolet spectrophotometer. And the result demonstrates the existing of Rubidium and shows that the SNR (Signal to Noise Ratio) of the micro Rubidium vapor cell is high, which suits for atomic devices as well as other applications. At last, its integration in a Chip-Scale atomic magnetometer is presented.

IEEE Electronic Components and Technology Conference (ECTC)•May 1, 2014•5 citations

Microfabricated alkali atom vapor cells

Li‐Anne Liew, Svenja A. Knappe, John Moreland +3 more

We describe the fabrication of chip-sized alkali atom vapor cells using silicon micromachining and anodic bonding technology. Such cells may find use in highly miniaturized atomic frequency references or magnetometers. The cells consist of cavities etched in silicon, with internal volumes as small as 1 mm3. Two techniques for introducing cesium and a buffer gas into the cells are described: one based on chemical reaction between cesium chloride and barium azide, and the other based on direct injection of elemental cesium within a controlled anaerobic environment. Cesium optical absorption and coherent population trapping resonances were measured in the cells.

Applied Physics Letters•Apr 1, 2004•374 citations
In this letter, we present a novel microfabricated shaped rubidium vapor cell with 3 cm optical path length for miniaturized atomic magnetometers. The novel shaped rubidium vapor cells are manufactured by a wafer-level fabrication process, and the process consists of the following three steps sequentially: first, wet etching to form oblong shallow cavity arrays; second, anodic bonding, glass reflowing, and wet etching to obtain a glass wafer with shaped structures; third, anodic bonding and chemical reaction to obtain the wafer-level shaped rubidium vapor cells. A miniaturized atomic magnetometer using the novel shaped rubidium vapor cell is characterized in the geomagnetic environment. The performance of the novel shaped rubidium vapor cell is compared with the traditional microfabricated rubidium vapor cell of a “glass–silicon–glass” sandwich structure. Results show that the measured geomagnetic field is 47.85 μT. It is demonstrated that the dispersive signal's slope of the novel shaped rubidium vapor cell is 15 times larger than that of the traditional one. Results also indicate that the miniaturized atomic magnetometer working in the geomagnetic environment has a magnetic noise spectral density of 3.5 pT/Hz1/2from 1 to 2 Hz.
This paper presents a novel method to measure the magnetic gradient by an Mz atomic magnetometer using a micro-fabricated shaped rubidium vapor cell. The shaped vapor cell is fabricated by a chemical foaming process. Four micro radio frequency (RF) coils are mounted on the shaped rubidium vapor cell. Magnetic fields at the four points corresponding to the RF coils along the laser beam propagation are obtained by measuring Larmor frequency of the rubidium atoms inside the vapor cell. The magnetic gradients are also acquired with the measured magnetic fields. The measurement is performed in a magnetic shield environment. A dc electrical coil is taken to produce an existed magnetic field for the measurement and the theoretical magnetic field distribution is calculated. It is demonstrated that the measured magnetic fields and magnetic gradients correspond well with the calculated ones. Results show that the absolute error of the magnetic field is less than 0.1 μT, the relative error of the magnetic field is below 0.8%, and the relative error of the magnetic gradient is below 5.5%. Results also indicate that the atomic magnetometer has a sensitivity of 5 pT/Hz1/2from 1 to 2 Hz. The Mz atomic magnetometer is potentially useful for applications requiring gradient field information.
Abstract Microfabricated alkali vapor cells enable the miniaturization of atomic sensors, but require collective wafer-level integration of complex features. In many applications-including magnetometers, gyroscopes, magneto-optical traps, and fluorescence imaging-multiple optical accesses are needed to enhance performance. Yet, achieving this without compromising manufacturability remains challenging. In this work, we present a wafer-level fabrication approach that enables three orthogonal optical pathways in microfabricated alkali vapor cells, using fully scalable and collective processes. Our method relies on the thermal reflow of glass preforms, shaped by laser-assisted etching (LAE) and bonded between silicon frames. The relatively low surface roughness produced by LAE allows for effective reflow, which further smooths the surfaces without significantly compromising the optical planarity of the windows. This process results in multi-axis vapor cells featuring embedded, optics-grade lateral windows. We evaluate the device performance through both single-beam and dual-beam atomic magnetometry measurements. Magnetic sensitivities better than 200 fT Hz − 1 are demonstrated along each of the three orthogonal axes, confirming the potential of the approach for tri-axis magnetic field sensing at sub-picotesla resolution. This fabrication strategy opens new perspectives for versatile, high-performance atomic sensors, fully compatible with wafer-level integration and mass production.
The designs of microfabricated alkali vapor cells play an important role when the atomic magnetometers are developing toward on-chip integration. This paper presents microfabricated spherical alkali vapor cells with improved sensitivity for chip-scale atomic magnetometers. A microfabricated spherical rubidium vapor cell and a traditional microfabricated planar rubidium vapor cell are designed for comparison, which are of the same volume and interconnected by a microchannel to acquire equal inner buffer gas pressure. In chip-scale spin-exchange relaxation-free (SERF) atomic magnetometers, the rubidium polarization lifetimes of three pairs of spherical and planar vapor cells at different buffer gas pressures of 0.35, 0.73, and 2.00 amg are measured, respectively. The sensitivity of SERF atomic magnetometers using the vapor cells at a 0.35-amg buffer gas pressure is also measured. The results show that the transverse polarization lifetime of the spherical vapor cell is 2.46, 1.44, and 1.05 times that of the planar one at 0.35-, 0.73-, and 2.00-amg buffer gas pressures, respectively. Combining the improved polarization lifetime and increased optical path length, chip-scale SERF atomic magnetometer using the microspherical vapor cell has the sensitivity of 60 fT/Hz1/2from 5 to 15 Hz, while that based on the planar one is demonstrated with the sensitivity of 400 fT/Hz1/2from 5 to 15 Hz.
Micro-fabricated vapor cells have applications in a number of emerging quantum technology-based devices including miniaturized atomic magnetometers, atomic clocks, and frequency references for laser systems. Increasing the cell optical path length (OPL) and smallest cell dimension are normally desirable to increase the signal to noise ratio (SNR) and minimize the de-polarization rate due to collisions between atomic or molecular species and the cell walls. This paper presents a fully wafer-level scalable fabrication process to manufacture vapor cells with dimensions approaching those of glass-blown cells. The fabrication process is described, and spectroscopic measurements (optical absorption and magnetic resonance) are reported. A magnetic resonance linewidth of 350 Hz is demonstrated, and this is the smallest linewidth reported to date for a micro-fabricated vapor cell.
Micro Rubidium vapor cell has very important research values in many fields including atomic magnetometer, atomic clock, atomic gyroscope and so on. In this study, a new method to fabricate the micro Rubidium vapor cell has been investigated and uniform wafer-level micro Rubidium vapor cells, which could be used in atomic devices, have been prepared successfully by the proposed process. First of all, the fabrication process is introduced. Then the prepared uniform wafer-level micro Rubidium vapor cell has been characterized by Energy Dispersive Spectroscopy (EDS) and Ultraviolet spectrophotometer. And the result demonstrates the existing of Rubidium and shows that the SNR (Signal to Noise Ratio) of the micro Rubidium vapor cell is high, which suits for atomic devices as well as other applications. At last, its integration in a Chip-Scale atomic magnetometer is presented.
We describe the fabrication of chip-sized alkali atom vapor cells using silicon micromachining and anodic bonding technology. Such cells may find use in highly miniaturized atomic frequency references or magnetometers. The cells consist of cavities etched in silicon, with internal volumes as small as 1 mm3. Two techniques for introducing cesium and a buffer gas into the cells are described: one based on chemical reaction between cesium chloride and barium azide, and the other based on direct injection of elemental cesium within a controlled anaerobic environment. Cesium optical absorption and coherent population trapping resonances were measured in the cells.