On-chip superconducting nanowire single-photon detectors (SNSPDs) are gaining traction in integrated quantum photonics due to their exceptional performance and the elimination of fiber coupling loss. However, off-chip high-rejection filters are commonly required to remove the intense pump light employed in quantum states generation, thus remaining the obstacle for embedding SNSPDs into quantum photonic circuits. Here, we explore the integration of SNSPDs with passive pump rejection filters, achieved by cascaded silicon Bragg gratings, on a single substrate. Serving as an entanglement receiver chip, the integrated components show a system detection efficiency of 20.1% and a pump rejection ratio of approximately 56 dB. We successfully verify energy-time entangled photon pairs from a microring resonator with raw visibilities of 92.85%±5.95% and 91.91%±7.34% under two nonorthogonal bases, with use of standard fiber wavelength demultiplexers. Our results pave the way for entanglement resource distribution, offering a promising approach toward the construction of large-scale quantum photonic systems.
On-chip superconducting nanowire single-photon detectors (SNSPDs) are gaining traction in integrated quantum photonics due to their exceptional performance and the elimination of fiber coupling loss. However, off-chip high-rejection filters are commonly required to remove the intense pump light employed in quantum states generation, thus remaining the obstacle for embedding SNSPDs into quantum photonic circuits. Here, we explore the integration of SNSPDs with passive pump rejection filters, achieved by cascaded silicon Bragg gratings, on a single substrate. Serving as an entanglement receiver chip, the integrated components show a system detection efficiency of 20.1% and a pump rejection ratio of approximately 56 dB. We successfully verify energy-time entangled photon pairs from a microring resonator with raw visibilities of 92.85%±5.95% and 91.91%±7.34% under two nonorthogonal bases, with use of standard fiber wavelength demultiplexers. Our results pave the way for entanglement resource distribution, offering a promising approach toward the construction of large-scale quantum photonic systems.
Superconducting Nanowire Single Photon Detectors (SNSPD) have set leading performance benchmarks in terms of detection efficiency, low noise operation, speed, and timing accuracy. Besides scaling up the numbers of individually addressable nanowire detector channels, integration with nanophotonic functionalities as well as optical and electrical multiplexing will be key to advance single photon counting applications, such as quantum key distribution, optical quantum information processing and simulations of sampling problems. Here we show how integration of SNSPDs with nanophotonic circuit components gives rise to novel use cases. We combine highperformance waveguide-integrated SNSPDs with nano-electromechanical phase-shifters, high speed electro-optic modulators, sub-wavelength grating structures, directional coupler networks, on-chip delay lines and highly efficient and broadband 3D-interconnects to optical fibers, achieving crucial active and passive functionalities for integrated quantum photonics. We showcase the capabilities and practical relevance of photonic integrated SNSPD solutions for the example of high-rate quantum key distribution receivers.
Abstract The fruitful association of quantum and integrated photonics holds the promise to produce, manipulate, and detect quantum states of light using compact and scalable systems. Integrating all the building blocks necessary to produce high-quality photonic entanglement in the telecom-wavelength range out of a single chip remains a major challenge, mainly due to the limited performance of on-chip light rejection filters. We report a stand-alone, telecom-compliant device that integrates, on a single substrate, a nonlinear photon-pair generator and a passive pump-rejection filter. Using standard channel-grid fiber demultiplexers, we demonstrate the first entanglement qualification of such an integrated circuit, showing the highest raw quantum interference visibility for time-energy entangled photons over two telecom-wavelength bands. Genuinely pure, maximally entangled states can therefore be generated thanks to the high-level of noise suppression obtained with the pump filter. These results will certainly further promote the development of more advanced and scalable photonic-integrated quantum systems compliant with telecommunication standards.
Fast and efficient detection of single photons with high timing accuracy is a crucial requirement in most quantum optics experiments and enables novel sensing and imaging solutions. Superconducting nanowire single-photon detectors (SNSPD) achieve technology-leading performance in terms of detection efficiency, dark count rate, timing jitter, and detector dead times. However, conventional SNSPDs with high system detection efficiency typically rely on resonant enhancement of the absorption efficiency, thus only achieving attractive detector benchmarks over narrow spectral windows. Waveguide-integrated SNSPDs allow for leveraging the wideband material absorption in superconducting nanowires by absorbing light in a traveling-wave geometry but have been limited to low system detection efficiencies due to interface losses when coupling to optical fibers. Here, we show how high system detection efficiencies of 22%–73% are realized over a broad wavelength range from 532 nm to 1640 nm in a single waveguide-integrated SNSPD device. We accomplish efficient coupling between optical fibers and waveguide-integrated nanowire detectors by employing a 3D interface, produced in direct laser writing, that relies on total internal reflection for achieving a broad transmission bandwidth. We further find low timing jitter of 25.7 ps and detector decay times of 9.8 ns, allowing for single-photon counting with high repetition rates up to 100 MHz. Our work paves the way for an efficient single-photon detector solution that combines the spectral requirements of an extremely wide range of quantum optics experiments in a single device. The coupling approach and SNSPD-integration with nanophotonic circuits are further well-suited for realizing large-scale detector arrays.
Ever since superconducting nanowire single-photon detectors (SNSPDs or SSPDs) were demonstrated, they have attracted a considerable attention due to the detectors’ promising performance that includes high detection efficiency (DE), low dark count rate (DCR), broadband sensitivity, and low timing jitter. The system detection efficiency (SDE) has been improved to be over 90% with a wavelength of 1550 nm in a fiber-coupled system by embedding the SNSPD in optical cavities. However, the implementation of optical cavity usually reduces the bandwidth of SNSPDs. As a result, there are some recent works on increasing the bandwidth of SNSPD. Furthermore, the size of the active area of meandered nanowires has to be compatible with the core size of an optical fiber such that good optical coupling can be achieved; this setup requires a long nanowire with a large kinetic inductance, thus resulting in a small counting rate and a large timing jitter, particularly for multi-mode fiber-coupled devices. Nevertheless, a particularly impressive waveguide-coupled SNSPD has been developed in recent years. By placing an SNSPD atop an optical waveguide that has been fabricated on various substrate materials, photons propagating in the waveguide have been found to be evanescently absorbed by nanowires that are only a few tens of microns long. The on-chip DE of this device has been estimated to be over 90%, thus indicating that it has both high absorptance and high intrinsic DE. If the waveguide and the nanowire are correctly dimensioned, the absorptance of this device can reach over 90% for a wavelength range of more than 700 nm. Furthermore, the length of the nanowire is shorter than that of the fiber-coupled SNSPD, thus leading to a higher count rate and lower timing jitter (~18 ps). However, unsatisfactory coupling losses between the optical fiber and the waveguide in such devices can decrease its SDE (~10%), thus limiting its applicability to quantum photonic integrated circuits (QPIC). Recently, we proposed a type of SNSPD that was coupled with microfibers (MFs), and simulations for this SNSPD indicated that its absorption would be as high as 90%. Microfibers and nanofibers, tapered adiabatically from standard fibers, with diameters close to or smaller than the wavelength of the guided light were demonstrated to have low transmittance losses by Tong et al. in 2003. MFs have been shown to have many interesting properties, such as strong evanescent fields, tight optical confinement, wideband abilities, and small masses; these properties are appealing for applications such as optical sensing and coupling. MFs also provide seamless connections with high transmittance from standard fibers; therefore, MF-coupled SNSPDs can achieve both high SDEs and wideband compatibility. We proposed and demonstrated the MF-coupled SNSPDs successfully. The simulation results indicate that with optimal device structure, the optical absorption with efficiency < 90% can be realized over a wavelength range of 350 nm to 2150 nm. The fabricated MF-coupled SNSPD, shows unparalleled broadband system detection efficiencies (SDEs) of more than 50% from 630 nm to 1500 nm. The SDEs reach 66% at 785 nm and 45% at 1550 nm. These results pave the way for ultra-broadband weak light detection with quantum-limit sensitivity.
Advancements in integrated photonics have enabled the miniaturization and scaling of complex photonic circuits, providing stability and reliability beyond the capabilities of conventional bulk setups. A central component of quantum photonic circuits is the single-photon detector, responsible for quantum state measurement. Due to the stringent performance requirements of quantum applications, superconducting nanowire single-photon detectors (SNSPDs) have emerged as the preferred detection technology, offering superior efficiency, low noise, and high timing resolution. While tabletop SNSPDs are now mature, commercially available and contributed to significant progress in quantum computing and communication, their integration into photonic circuits is still in its infancy. Integrated SNSPDs have shown the potential to not only match but surpass tabletop detectors in several performance metrics. Nevertheless, demonstrations have largely focused on individual integrated detectors, with limited investigation into more complex integrated circuits and advanced functionalities. In this thesis, we present a novel integration platform based on photonic bound states in the continuum (BICs) to address a critical limitation of conventional SNSPD designs, where nanowires placed directly atop the waveguide core are constrained by the core geometry. The etchless nature of our BIC waveguides provides a flat surface that decouples the design of the electronic readout circuitry below from the optical circuit layer above, enabling innovative integrated-nanowire geometries and facilitating large-scale integration of SNSPDs with CMOS-compatible circuits. We established a complete fabrication and characterization workflow for integrating NbTiN-based superconducting nanowires with BIC waveguides. Our integrated detectors achieved state-of-the-art performance, including detection efficiencies exceeding 70%, intrinsic jitter below 70 ps, and ultrafast recovery times (~1.7 ns). These results pave the way toward GHz-rate quantum state measurements, essential for scalable quantum photonic processors. Leveraging the design flexibility of BIC waveguides, we introduce the concept of inline detection with SNSPDs which exploits their unique ability to precisely engineer absorption through nanowire length control. By cascading multiple partially absorbing SNSPDs, it is possible to significantly reduce the number of required optical components and miniaturize complex quantum measurement setups within an extremely compact footprint. Traditional integration geometries prevent such implementations due to significant scattering losses at nanowire terminations, which limit the feasibility of cascaded designs. On the other hand, the design flexibility provided by our BIC platform makes it ideal for development of inline detection schemes. As a proof-of-concept, we use inline detection to miniaturize two fundamental quantum optics tools: an integrated Hanbury Brown and Twiss (HBT) interferometer and a photon-number-resolving (PNR) detector. We replicated the functionalities of these setups using only two nanowires integrated along a single waveguide. These devices show extremely compact footprint, highlighting the scalability potential of our approach. We validated these devices through characterization of a single-photon source and the discrimination of collinear photon pairs. The experimental results aligned well with previous literature and theoretical predictions, confirming the reliability of our integration method. Overall, this work presents a novel approach to quantum measurements within integrated quantum photonic circuits. Inline detection represents a step forward in quantum integrated photonics, moving from individual device demonstrations toward functional quantum circuits. By introducing our BIC-based integration platform, we simplify detector design and fabrication, lowering barriers to the development of inline detection circuits and opening new opportunities in multiphoton quantum state measurements, single-photon spectroscopy, and multiphoton subtraction.
Integrated photon-pair sources are fundamental building blocks of any quantum circuit. Spontaneous four-wave mixing in Si micro-resonators has already shown efficient on-chip generation of entangled photon pairs. However, owing to the substantially higher pump intensity, compared to that of the photon-pair signal, suppression of the pump requires rejection levels exceeding 100 dB. Besides strong pump suppression, narrow rejection bandwidth (<; 10 nm) is particularly important to allow short wavelength separation of the paired photons, thereby minimizing dispersion effects in the micro-ring that may reduce the efficiency of the nonlinear process. Implementing such pump-rejection filter on chip remains a challenge. Indeed, the only demonstration of photon-pair generation with on-chip pump rejection required cascading two identical chips, compromising the feasibility of the solution. The main reason for this is the limited rejection achieved by state-of-the-art on-chip Bragg filters. Ultra-high rejection has been demonstrated in actively controlled filters at the expense of increased insertion loss and a high complexity, due to the control of all the filters. Nevertheless, photon-pair generation with effective pump rejection in a single chip has not been demonstrated yet.