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The European Physical Journal B

On-chip high kinetic inductance LC filters modeled with a distributed circuit model

Yong-Qiang Xu, Rui Wu, Shun-Li Jiang, Shu-Kun Ye, Zi-Qing Huang, Ze-Cheng Wei, Bao‐Chuan Wang, Hai-Ou Li, Gang Cao, Guo‐Ping Guo

Published Dec 1, 2024• 1 citation
Publisher
DOI
10.1140/epjb/s10051-024-00836-8

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Superconducting planar resonators of thin molybdenum carbide (MoC) films were fabricated by optical lithography. The films were deposited via reactive magnetron sputtering and by changing the deposition parameters, the sheet resistance of the films was varied. The microwave properties of the resonators were studied by broadband coplanar waveguide spectroscopy in flip-chip configuration. The kinetic inductance of MoC films governs the high frequency response of the resonators and is determined by the complex conductivity of the superconducting film. Well below the critical temperature of transition, kinetic inductance is proportional to film sheet resistance in normal state. The temperature-dependent resonances in the broadband spectra below critical temperature are described by a lumped LC model, where the inductance consists of geometric and kinetic inductance of the resonator. The temperature and frequency dependent complex conductivity of the superconducting film is calculated by the Dynes model for dirty superconductors. Furthermore, a numerical model of the kinetic planar resonator in Sonnet software is presented, which can be utilized to design resonators with desired properties, based on highly disordered superconductors. An on-chip design of a kinetic planar resonator filter is presented. The high kinetic inductance of the superconducting films allows us to minimize microwave filter dimensions.
Spin-photon coupling presents an enticing opportunity for the long-range coupling of spin qubits. The spin-photon coupling rate, gs{g}_{s}gs​, is proportional to the charge-photon coupling rate, gc{g}_{c}gc​. To move deeper into the strong-coupling regime, gc{g}_{c}gc​ can be enhanced by fabricating high-impedance cavities using high-kinetic-inductance films. Here, we report dc transport and microwave response investigations of niobium nitride (NbN\mathrm{Nb}\mathrm{N}NbN) films of different thicknesses. The kinetic inductance increases rapidly as the film thickness is reduced below 50 nm and for 15-nm NbN\mathrm{Nb}\mathrm{N}NbN films we measure a sheet kinetic inductance Lk,S=41.2pH/◻{L}_{k,S}=41.2\phantom{\rule{0.2em}{0ex}}\text{pH}/◻Lk,S​=41.2pH/◻. As an application of the high-kinetic-inductance films, we fabricate compact LCLCLC filters that are commonly used to reduce microwave leakage in circuit quantum electrodynamics (cQED) devices. These filters feature up to 60 dB of attenuation near typical cavity resonance frequencies of fc=8{f}_{c}=8fc​=8 GHz.