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Applied Physics Letters

High ODMR contrast and alignment of NV centers in microstructures grown on heteroepitaxial diamonds

Jan Engels, Jürgen Weippert, Tingpeng Luo, Jan Kustermann, Patricia Quellmalz, Niklas Mathes, Lukas Lindner, Christian Giese, Lutz Kirste, Peter Knittel, Jan Jeske, V. Lebedev

Published Apr 15, 2024• 10 citations

Abstract

Heteroepitaxial chemical vapor deposition is the most promising option to fabricate wafer-scale monocrystalline diamonds for quantum applications. Previously, we demonstrated the feasibility to manufacture functional micrometer-sized pyramids on as-grown heteroepitaxial diamond as well as their quantum optical characteristics. Due to high background signals and microfabrication challenges, these pyramids could not compete with homoepitaxially grown structures. In this study, we overcame these problems with a nominally undoped buffer layer between the heteroepitaxial substrate and the pyramidal microstructure to reduce the signal-to-noise ratio from the substrate on the spin measurements of the nitrogen-vacancy (NV) center. Moreover, the microfabrication was improved to reach a higher angle of the pyramidal side plane, corresponding to the {111} facets. These improvements lead to pyramids on which each facet contains almost purely only one of the four possible NV orientations as shown by optically detected magnetic resonance (ODMR). ODMR shows a very high contrast of 19% without an external magnet and of 13% for a single spin resonance in the presence of a magnetic field. The contrast is more than doubled compared to our previous study. The T2* dephasing time of the NV centers of the samples ranges from 0.02 to 0.16 μs. The P1 center is a single substitutional nitrogen center, and the P1 densities range from 1.8 to 5 ppm.

DOI: 10.1063/5.0209717

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Heteroepitaxial chemical vapor deposition is the most promising option to fabricate wafer-scale monocrystalline diamonds for quantum applications. Previously, we demonstrated the feasibility to manufacture functional micrometer-sized pyramids on as-grown heteroepitaxial diamond as well as their quantum optical characteristics. Due to high background signals and microfabrication challenges, these pyramids could not compete with homoepitaxially grown structures. In this study, we overcame these problems with a nominally undoped buffer layer between the heteroepitaxial substrate and the pyramidal microstructure to reduce the signal-to-noise ratio from the substrate on the spin measurements of the nitrogen-vacancy (NV) center. Moreover, the microfabrication was improved to reach a higher angle of the pyramidal side plane, corresponding to the {111} facets. These improvements lead to pyramids on which each facet contains almost purely only one of the four possible NV orientations as shown by optically detected magnetic resonance (ODMR). ODMR shows a very high contrast of 19% without an external magnet and of 13% for a single spin resonance in the presence of a magnetic field. The contrast is more than doubled compared to our previous study. The T2* dephasing time of the NV centers of the samples ranges from 0.02 to 0.16 μs. The P1 center is a single substitutional nitrogen center, and the P1 densities range from 1.8 to 5 ppm.

The negatively charged nitrogen-vacancy (${\mathrm{NV}}^{\ensuremath{-}}$) center in diamond is an attractive candidate for applications that range from magnetometry to quantum information processing. Here we show that only a fraction of the nitrogen (typically

<0.5

%) incorporated during homoepitaxial diamond growth by chemical vapor deposition (CVD) is in the form of undecorated ${\mathrm{NV}}^{\ensuremath{-}}$ centers. Furthermore, studies on CVD diamond grown on

(110)

-oriented substrates show a near 100% preferential orientation of NV centers along only the

[111]

and

[\overline{1}\overline{1}1]

directions, rather than the four possible orientations. The results indicate that NV centers grow in as units, as the diamond is deposited, rather than by migration and association of their components. The NV unit of the ${\mathrm{NVH}}^{\ensuremath{-}}$ is similarly preferentially oriented, but it is not possible to determine whether this defect was formed by H capture at a preferentially aligned NV center or as a complete unit. Reducing the number of NV orientations from four orientations to two orientations should lead to increased optically detected magnetic resonance contrast and thus improved magnetic sensitivity in ensemble-based magnetometry.

We report the formation of perfectly aligned, high-density, shallow nitrogen vacancy (NV) centers on the (111) surface of a diamond. The study involved step-flow growth with a high flux of nitrogen during chemical vapor deposition (CVD) growth, which resulted in the formation of a highly concentrated (>1019 cm−3) nitrogen layer approximately 10 nm away from the substrate surface. Photon counts obtained from the NV centers indicated the presence of 6.1 × 1015–3.1 × 1016 cm−3 NV centers, which suggested the formation of an ensemble of NV centers. The optically detected magnetic resonance (ODMR) spectrum confirmed perfect alignment (more than 99%) for all the samples fabricated by step-flow growth via CVD. Perfectly aligned shallow ensemble NV centers indicated a high Rabi contrast of approximately 30% which is comparable to the values reported for a single NV center. Nanoscale nuclear magnetic resonance demonstrated surface-sensitive nuclear spin detection and provided a confirmation of the NV centers' depth. Single NV center approximation indicated that the depth of the NV centers was approximately 9–10.7 nm from the surface with error of less than ±0.8 nm. Thus, a route for material control of shallow NV centers has been developed by step-flow growth using a CVD system. Our finding pioneers on the atomic level control of NV center alignment for large area quantum magnetometry.

Here, we report the fabrication and characterization of single crystal diamond films on a two-inch wafer-scale containing three-dimensional layered structures of negatively charged nitrogen-vacancy color centers (NV

^{-}

). The (100)-oriented layered diamond films were grown by chemical vapor deposition (CVD) to create spatially separated regions of enhanced emission associated with NV

^{-}

centers. Such localized emission enhancement as well as 2D and 3D arrays of spins could enable close-packed architectures for emerging quantum devices, such as data processors, memory cells, and magnetic sensors. A cyclic sequence of CVD growth and oxygen-plasma etching is employed, resulting in the in-situ formation of layered inverted pyramidal structures with flat $\{

111

\}$ sidewalls. These pits are subsequently overgrown by nitrogen-doped diamond to achieve NV

^{-}

-rich facets with a uniform N-V bond arrangement and improved nitrogen incorporation efficiency.

Selective alignment of nitrogen-vacancy (NV) centers in diamond is an important technique towards its applications. Quantification of the alignment ratio is necessary to design the optimized diamond samples. However, this is not a straightforward problem for dense ensemble of the NV centers. We estimate the alignment ratio of ensemble NV centers along the [111] direction in (111) diamond by optically detected magnetic resonance measurements. Diamond films deposited by N2 doped chemical vapor deposition have NV center densities over 1 × 1015 cm−3 and alignment ratios over 75%. Although spin coherence time (T2) is limited to a few μs by electron spins of nitrogen impurities, the combination of the selective alignment and the high density can be a possible way to optimize NV-containing diamond samples for the sensing applications.

Nitrogen-vacancy (NV) centers in diamond have attracted significant interest because of their excellent spin and optical characteristics for quantum information and metrology. To exploit these characteristics, precise control of the orientation of the NV axis in the lattice is essential. Here we show that the orientation of more than 99% of the NV centers can be aligned along the [111] axis by chemical vapor deposition homoepitaxial growth on (111) substrates. We also discuss the alignment mechanisms. Our result enables a fourfold improvement in the magnetic field sensitivity and opens new avenues to the optimum design of NV center devices.

Nitrogen-vacancy (NV) color centers in diamond are excellent quantum sensors possessing high sensitivity and nano-scale spatial resolution. Their integration in photonic structures is often desired, since it leads to an increased photon emission and also allows the realization of solid-state quantum technology architectures. Here, we report the fabrication of diamond nano-pillars with diameters up to 1000 nm by electron beam lithography and inductively coupled plasma reactive ion etching in nitrogen-rich diamonds (type Ib) with [100] and [111] crystal orientations. The NV centers were created by keV-He ion bombardment and subsequent annealing, and we estimate an average number of NVs per pillar to be 4300 ± 300 and 520 ± 120 for the [100] and [111] samples, respectively. Lifetime measurements of the NVs’ excited state showed two time constants with average values of τ1 ≈ 2 ns and τ2 ≈ 8 ns, which are shorter as compared to a single color center in a bulk crystal (τ ≈ 10 ns). This is probably due to a coupling between the NVs as well as due to interaction with bombardment-induced defects and substitutional nitrogen (P1 centers). Optically detected magnetic resonance measurements revealed a contrast of about 5% and average coherence and relaxation times of T2 [100] = 420 ± 40 ns, T2 [111] = 560 ± 50 ns, and T1 [100] = 162 ± 11 μs, T1 [111] = 174 ± 24 μs. These pillars could find an application for scanning probe magnetic field imaging.