We developed a monolithic integration process for a superconducting nanostrip single-photon detector (SNSPD) and a cryogenic signal processor based on a single-flux-quantum (SFQ) circuit. Sixteen-pixel SNSPDs consisting of a 10-nm-thick and 100-nm-wide NbTiN nanowire were fabricated on a 3-in. Si wafer with an SFQ merger fabricated by the National Institute of Advanced Industrial Science and Technology Nb 2.5 kA/cm2 standard process 2. Subsequently, we illuminated the photons on the 16-pixel SNSPD array through an optical fiber and obtained a similar bias-current dependence of the detection efficiency with a single-pixel SNSPD without the SFQ merger. This indicates that the SFQ merger works correctly, and that the power dissipation of the SFQ circuit, which is estimated to be 200 μW, does not deteriorate the photon detection of SNSPD fabricated on the same chip with a size of 5 × 5 mm2. Furthermore, we measured timing jitter using a pulsed laser as the photon source. Owing to the careful tuning of the wiring length between each pixel of the 16-pixel SNSPD and each input port of the SFQ merger, the obtained timing jitter was 41.4 ps, which is approximately equal to or less than that of the single-pixel SNSPD.
We developed a monolithic integration process for a superconducting nanostrip single-photon detector (SNSPD) and a cryogenic signal processor based on a single-flux-quantum (SFQ) circuit. Sixteen-pixel SNSPDs consisting of a 10-nm-thick and 100-nm-wide NbTiN nanowire were fabricated on a 3-in. Si wafer with an SFQ merger fabricated by the National Institute of Advanced Industrial Science and Technology Nb 2.5 kA/cm2 standard process 2. Subsequently, we illuminated the photons on the 16-pixel SNSPD array through an optical fiber and obtained a similar bias-current dependence of the detection efficiency with a single-pixel SNSPD without the SFQ merger. This indicates that the SFQ merger works correctly, and that the power dissipation of the SFQ circuit, which is estimated to be 200 μW, does not deteriorate the photon detection of SNSPD fabricated on the same chip with a size of 5 × 5 mm2. Furthermore, we measured timing jitter using a pulsed laser as the photon source. Owing to the careful tuning of the wiring length between each pixel of the 16-pixel SNSPD and each input port of the SFQ merger, the obtained timing jitter was 41.4 ps, which is approximately equal to or less than that of the single-pixel SNSPD.
A single-flux-quantum circuit is a promising device for a cryogenic signal processor for a superconducting nanostrip single photon detector （SNSPD） due to its high-speed operation, low power dissipation, and low timing jitter. The cryogenic signal processor based on the SFQ circuits can sense the output signals of multi-pixel SNSPDs with low timing jitter in a low temperature stage, which provides an advanced SNSPD system such as a high-count rate system, a two-photon coincidence system, a single-photon imaging system, and so forth. We have developed and demonstrated some SNSPD systems using an SFQ signal processor in a 0.1-W Gifford-McMahon （GM） cryocooler. In this review, we introduce a cryogenic signal processor based on SFQ circuits for advanced SNSPD systems.
A two-dimensional single-photon imaging system with high sensitivity and high time resolution is the ultimate camera and useful in a wide range of fields. A superconducting nanowire single-photon detector (SSPD or SNSPD) is one of the best candidates for realizing such an ultimate camera due to its high detection efficiency in a wide spectral range, low dark count rate without after-pulsing, and excellent time resolution. Here we propose a new readout scheme to realize a large-scale imaging array based on SSPD, where a row-column readout architecture is combined with a digital signal processor based on a single-flux-quantum (SFQ) circuit. A 16-pixel row-column readout SSPD array is fabricated and measured with an SFQ digital signal processor. We successfully acquired spatial information as encoded digital bit codes with the temporal information of the photon detection. The system timing jitter was measured as <80 ps for all 16 pixels even through the SFQ signal processor, indicating the potential for an imaging array with an extremely high time resolution.
We demonstrate the high-speed operation of a 16-element superconducting nanostrip single-photon detector (SNSPD) array with a single flux quantum (SFQ) multiplexer. The SFQ multiplexer can reshape the output signals from 16-element SNSPD into pulses with durations shorter than 1 ns and bundle these pulses into one output line, which is advantageous for high-speed operation of the SNSPD array system. We confirmed the correct operation of the 16-element SNSPD system with a system detection efficiency of 80% at a wavelength of 1550 nm, timing jitter of 45 ps, and successful observation of photons at 1 ns time intervals as distinguishable output pulses. The reduction in detection efficiency could also be suppressed to ∼ 0.93 during the dead time of ∼ 10 n s for each SNSPD pixel when the incident photon flux was relatively low at 0.1 photon/pulse.
Scalable superconducting nanowire single photon detector (SNSPDs) arrays require cryogenic digital circuits for multiplexing the output detection pulses. Among existing superconducting digital devices, superconducting nanowire cryotron (nTron) is a three-terminal device with an ultra-compact size, which is promising for large scale monolithic integration. In this report, in order to evaluate the potential and possibility of using nTrons for reading and digitizing SNSPD signals, we characterized the grey zone, speed, timing jitter and power dissipation of a proper designed nTron. With a DC bias on the gate, the nTron can be triggered by a few μA high and nanoseconds wide input signal, showing the nTron was capable of reading an SNSPD pulse at the same signal level. The timing jitter depended on the input signal level. For a 20 μA high and 5 ns wide input pulse, the timing jitter was 33.3 ps, while a typical SNSPD's jitter was around 50 ps. With removing the serial inductors and operating it in an AC bias mode. The nTron was demonstrated to be operated at a clock frequency of 615.4 MHz, which was faster than the maximum counting rate of a typical SNSPD. In additional, with a 50 Ω bias resistor and biased at 17.6 μA, the nTron had a total power dissipation of 19.7 nW. Although RSFQ circuits are faster than nTrons, for reading SNSPD or other detector arrays that demands less operation speed, our results suggest a digital circuit made from nTrons could be another promising alternative.
Superconducting nanowire single-photon detectors (SSPDs) with a system detection efficiency (SDE) of over 80% are now commercially available and being used in compact Gifford-McMahon refrigerators. However, not only high SDE, but also total performance including a low dark count rate, high maximum count rate and/or low timing jitter are important for many applications. A multi-pixel SSPD combined with signal processing using a single-flux-quantum (SFQ) circuit is a very promising approach to improve the system performance of SSPDs. In this review, we introduce our recent activities on cryogenic signal processing using SFQ circuits to realize high-performance multi-pixel SSPDs.
Optical quantum information processing, quantum key distribution (QKD), and linear optical quantum computing (LOQC) rely fundamentally on single-photon detectors capable of ultra-high system detection efficiency, low dark count rates, sub-nanosecond timing jitter, and high maximum count rates. Superconducting Nanowire Single-Photon Detectors (SNSPDs) have emerged as the gold-standard quantum light detection technology, outperforming semiconductor avalanche photodiodes (APDs) and transition-edge sensors (TES) across every major performance metric. By biasing ultrathin superconducting nanometric strips (e.g., NbN, WSi) close to their critical superconducting-to-normal transition temperature, the absorption of a single optical photon breaks Cooper pairs, creating a localized resistive hot spot that generates an electrical voltage pulse with near-unity quantum efficiency (>98%) and picosecond timing jitter (<10 ps). Integrating SNSPDs directly onto Quantum Photonic Integrated Circuits (QPICs) on silicon-on-insulator or lithium niobate substrates unlocks scalable, multi-channel quantum photonic processors. However, scaling SNSPDs from single-pixel devices to large multiplexed focal plane arrays introduces severe cryogenic and wiring bottlenecks: massive coaxial wiring heat leaks at millikelvin dilution refrigerator stages, complex radio-frequency (RF) readout multiplexing, spatial thermal quenching limits, and single-photon coupling losses across photonic interfaces. This paper delivers an exhaustive, mathematically formal technical investigation and empirical benchmark of SNSPD-integrated quantum photonic integrated circuits. We formalize hot-spot electrothermal hotspot formation equations, derive system detection efficiency (SDE) and timing jitter bounds, and model cryogenic CMOS readout multiplexing architectures. Furthermore, we construct an enterprise multi-physics co-simulation and cryogenic optical testbed evaluating 64-channel SNSPD arrays integrated with silicon nitride QPICs across high-rate QKD and boson sampling workloads. Our empirical findings demonstrate that our integrated NbN SNSPD arrays achieve a system detection efficiency of 99.4% at 1550 nm, a timing jitter of 6.2 ps, and a dark count rate below 10^-4 Hz while operating at 2.1 K, outperforming conventional semiconductor APDs by orders of magnitude. Finally, we formulate open challenges in cryo-CMOS multiplexer thermal dissipation, multi-channel array yield, and monolithic single-photon emitter integration.