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Optics and Precision Engineering

Development of a 220 GHz Ti superconducting TES detector array for CMB polarization experiment

Qianghui LUO, Wei MIAO, Feiming Li, Jiaqiang Zhong, Zheng Wang, Jiang‐Qiao Ding, Kangmin Zhou, Wen Zhang, Yuan Ren, Shengcai SHI

Published Jan 1, 2023• 0 citations

Abstract

高灵敏度超导相变边缘探测器（Transition Edge Sensor，TES）在宇宙微波背景（Cosmic Microwave Background，CMB）辐射B模偏振探测方面具有重要的应用前景。本文设计并制备了220 GHz频段8×8像元的天线耦合钛超导TES探测器，实验表征了刻蚀前钛超导TES探测器的低温热导和噪声特性。实验结果显示，钛超导TES探测器低温电声相互作用主导热导约为485.4 pW/K，同时钛超导TES探测器噪声等效功率优于5×10-17 W/Hz0.5。原理上，钛超导TES探测器热导在刻蚀后会进一步减小，理论计算出刻蚀后钛超导TES探测器的热导约为38 pW/K，同时，其热起伏等效噪声功率理论值约为9.2×10-18 W/Hz0.5，因此，钛超导TES探测器在刻蚀后的噪声等效功率性能会进一步提升。

DOI: 10.37188/ope.20233104.0442

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高灵敏度超导相变边缘探测器（Transition Edge Sensor，TES）在宇宙微波背景（Cosmic Microwave Background，CMB）辐射B模偏振探测方面具有重要的应用前景。本文设计并制备了220 GHz频段8×8像元的天线耦合钛超导TES探测器，实验表征了刻蚀前钛超导TES探测器的低温热导和噪声特性。实验结果显示，钛超导TES探测器低温电声相互作用主导热导约为485.4 pW/K，同时钛超导TES探测器噪声等效功率优于5×10-17 W/Hz0.5。原理上，钛超导TES探测器热导在刻蚀后会进一步减小，理论计算出刻蚀后钛超导TES探测器的热导约为38 pW/K，同时，其热起伏等效噪声功率理论值约为9.2×10-18 W/Hz0.5，因此，钛超导TES探测器在刻蚀后的噪声等效功率性能会进一步提升。

Abstract In this paper, we report on the design, fabrication, and characterization of a 220 GHz superconducting transition edge sensor (TES) array developed for ground-based cosmic microwave background (CMB) experiments. Unlike conventional TES arrays adopting thermometers made of bilayer superconducting films, the TES array has thermometers made of simpler single-layer titanium (Ti) film deposited on a suspended silicon nitride (SiN x ) membrane. The thermal weak link is realized by releasing the TES’s thermal island including the Ti thermometer by dry etching with xenon difluoride (XeF2), giving a typical thermal conductance of 25 pW K−1. Its thermal-conductance mechanism is further studied by fitting the measured TES’s complex impedance with a three-block thermal model. The dark and optical noise equivalent power (NEP) of a superconducting TES are both measured. Despite existing lens reflection and dielectric loss in the superconducting microstrip line, its typical optical NEP reaches 100 aW Hz−0.5, which meets the sensitivity requirement for ground-based CMB experiments.

Direct-current superconducting quantum interference devices (dc-SQUIDs) are one of the most sensitive magnetic detectors. These sensors are extensively used in the readout of superconducting transition edge sensors (TESs), which are used for the detection of weak signals. A cosmic microwave background (CMB) polarization telescope operating in 22-48 GHz is currently under developing. The TESs calorimeter of the telescope will be readout by a time-division multiplexer (TDM) SQUID readout system. We develop a two-stage dc-SQUID amplifier circuit, comprising an input-stage SQUID with 4 SQUID cells and a series SQUID array (SSA) with 100 SQUID cells. This configuration has been shown to achieve extremely high signal gain while effectively controlling system noise. We assess the system noise at

300

mK

in an adiabatic demagnetisation refrigerator (ADR). The the measured magnetic flux noise of the two-stage SQUID circuit system is approximately

0.3

μΦ_{0}/\sqrt{Hz}

at

10

kHz

. The current noise equivalent to the input coil of input SQUID is about

2.4

pA/\sqrt{Hz}

. This result meets the low-noise readout requirements of the CMB TES and other applications with TES detectors.