Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

Method of making an improved superconducting quantum interference device

Cheng-Teh Wu

Published Jan 23, 2023• 0 citations
OpenAlex

Abstract

An improved superconducting quantum interference device is made by sputtering a thin film of an alloy of three parts niobium to one part tin in a pattern comprising a closed loop with a narrow region, depositing a thin film of a radiation shield such as copper over the niobium-tin, scribing a narrow line in the copper over the narrow region, exposing the structure at the scribed line to radiation and removing the deposited copper.

Related papers

Tantalum Thin Films Sputtered on Silicon and on Different Seed Layers: Material Characterization and Coplanar Waveguide Resonator Performance

Moritz Singer, Benedikt Schoof, H. M. Gupta +3 more

Superconducting qubits are a promising platform for large-scale quantum computing. Besides the Josephson junction, most parts of a superconducting qubit are made of a planar, patterned superconducting thin films. In the past, most qubit architectures have relied on niobium (Nb) as the material of choice for the superconducting layer. However, there is also a variety of alternative materials with potentially less losses, which may thereby result in increased qubit performance. One such material is tantalum (Ta), for which high-performance qubit components have already been demonstrated. In this study, we report the sputter-deposition of Ta thin films directly on heated and unheated silicon (Si) substrates as well as onto different, nanometer-thin seed layers from tantalum nitride (TaN), titanium nitride (TiN) or aluminum nitride (AIN) that were deposited first. The thin films are characterized in terms of surface morphology, crystal structure, phase composition, critical temperature, residual resistance ratio (RRR) and RF-performance. We obtain thin films indicative of pure alpha-Ta for high temperature (600°C) sputtering directly on silicon and for Ta deposited on TaN or TiN seed layers. Coplanar waveguide (CPW) resonator measurements show that the Ta deposited directly on the heated silicon substrate performs best with internal quality factors Qi reaching 1xl06in the single-photon regime, measured at T=100 mK.

arXiv:2409.06041•IEEE International Conference on Quantum Computing and Engineering (QCE)•Sep 15, 2024•3 citations

Narrowband high temperature superconducting receiver for low frequency radio waves

D. Reagor

An underground communicating device has a low-noise SQUID using high temperature superconductor components connected to detect a modulated external magnetic flux for outputting a voltage signal spectrum that is related to the varying magnetic flux. A narrow bandwidth filter may be used to select a portion of the voltage signal spectrum that is relatively free of power line noise to output a relatively low noise output signal when operating in a portion of the electromagnetic spectra where such power line noise exists. A demodulator outputs a communication signal, which may be an FM signal, indicative of a modulation on the modulated external magnetic flux.

•Jan 23, 2023•0 citations

Superconductivity device comprising a phononic crystal

Ihab Fathy El-Kady

The invention is directed to a device and method to engineer the superconducting transition width by suppressing the phonon populations responsible for the Cooper-pair decoherence below the superconducting transition temperature via phononic bandgap engineering. The device uses phononic crystals to engineer a phononic frequency gap that suppresses the decohering thermal phonon population just below the Cooper-frequency, and thus the normal conduction electron population. For example, such engineering can relax the cooling requirements for a variety of circuits yielding higher operational quality factors for superconducting electronics and interconnects.

•Feb 27, 2023•0 citations

NbTiN SQUID-on-tip fabricated by self-aligned deposition using reactive DC magnetron sputtering

N. Kokubo, B. Gerelkhuu

We fabricate superconducting quantum interference devices (SQUIDs) made of niobium-titanium nitride (NbTiN) thin films on the apex of sharp quartz capillaries. By incorporating reactive DC magnetron sputtering into the self-aligned deposition process for the SQUID-on-tip (SOT) fabrication, we produce NbTiN SOT devices with an effective diameter of ∼100 nm. The ø110 nm device has a superconducting transition temperature of 13.2 K, magnetic flux noise down to 0.7 μΦ0/Hz0.5 (4 K), and operating temperatures of 1.8–10 K. The developed technique enables the synthesis of nitride and other superconductors, thereby expanding the range of materials available for SOT devices.

Applied Physics Letters•Jun 24, 2024•1 citation

Optically pumped gradient magnetometer

Peter D. D. Schwindt

A method is provided for sensing a magnetic field in a magnetic gradiometer of the kind in which pump light and light constituting an optical carrier traverse first and second atomic vapor cells that contain host atoms and that are separated from each other by a known distance. According to such method, the host atoms are prepared in a coherent superposition of two quantum states that differ in energy by an amount that is sensitive to an ambient magnetic field. Modulation of the optical carrier in the respective cells gives rise to sidebands that interfere to generate a beat frequency indicative of the magnetic field gradient. The host atoms are prepared at least in a mode that allows measurement of ambient magnetic field components perpendicular to the axis of the pump light. In such mode, the host atoms are spin-polarized by pump light while subjected to a controlled magnetic field directed parallel to the pump beam, and then the controlled magnetic field is adiabatically extinguished.

•Apr 3, 2024•0 citations

Quantum interference devices made from superconducting oxide thin films

R. H. Koch, Corwin P. Umbach, G. J. Clark +2 more

We have fabricated superconducting quantum interference devices (dc SQUID’s) from thin films of the superconducting oxide YBa2Cu3Oy. The devices were made by first lithographically patterning an ion implant mask containing a 40 by 40 μm loop and two 17-μm-wide weak links over a ∼1-μm-thick oxide film. Ion implantation was then used to destroy the superconductivity in the film surrounding the device without actually removing material, resulting in a completely planar structure for the SQUID’s. The SQUID’s were operated in the temperature range from 4.2 to 68 K. The superconducting flux quantum was measured to be h/2e in these materials.

Applied Physics Letters•Jul 20, 1987•379 citations
An improved superconducting quantum interference device is made by sputtering a thin film of an alloy of three parts niobium to one part tin in a pattern comprising a closed loop with a narrow region, depositing a thin film of a radiation shield such as copper over the niobium-tin, scribing a narrow line in the copper over the narrow region, exposing the structure at the scribed line to radiation and removing the deposited copper.
Superconducting qubits are a promising platform for large-scale quantum computing. Besides the Josephson junction, most parts of a superconducting qubit are made of a planar, patterned superconducting thin films. In the past, most qubit architectures have relied on niobium (Nb) as the material of choice for the superconducting layer. However, there is also a variety of alternative materials with potentially less losses, which may thereby result in increased qubit performance. One such material is tantalum (Ta), for which high-performance qubit components have already been demonstrated. In this study, we report the sputter-deposition of Ta thin films directly on heated and unheated silicon (Si) substrates as well as onto different, nanometer-thin seed layers from tantalum nitride (TaN), titanium nitride (TiN) or aluminum nitride (AIN) that were deposited first. The thin films are characterized in terms of surface morphology, crystal structure, phase composition, critical temperature, residual resistance ratio (RRR) and RF-performance. We obtain thin films indicative of pure alpha-Ta for high temperature (600°C) sputtering directly on silicon and for Ta deposited on TaN or TiN seed layers. Coplanar waveguide (CPW) resonator measurements show that the Ta deposited directly on the heated silicon substrate performs best with internal quality factors Qi reaching 1xl06in the single-photon regime, measured at T=100 mK.
An underground communicating device has a low-noise SQUID using high temperature superconductor components connected to detect a modulated external magnetic flux for outputting a voltage signal spectrum that is related to the varying magnetic flux. A narrow bandwidth filter may be used to select a portion of the voltage signal spectrum that is relatively free of power line noise to output a relatively low noise output signal when operating in a portion of the electromagnetic spectra where such power line noise exists. A demodulator outputs a communication signal, which may be an FM signal, indicative of a modulation on the modulated external magnetic flux.
The invention is directed to a device and method to engineer the superconducting transition width by suppressing the phonon populations responsible for the Cooper-pair decoherence below the superconducting transition temperature via phononic bandgap engineering. The device uses phononic crystals to engineer a phononic frequency gap that suppresses the decohering thermal phonon population just below the Cooper-frequency, and thus the normal conduction electron population. For example, such engineering can relax the cooling requirements for a variety of circuits yielding higher operational quality factors for superconducting electronics and interconnects.
We fabricate superconducting quantum interference devices (SQUIDs) made of niobium-titanium nitride (NbTiN) thin films on the apex of sharp quartz capillaries. By incorporating reactive DC magnetron sputtering into the self-aligned deposition process for the SQUID-on-tip (SOT) fabrication, we produce NbTiN SOT devices with an effective diameter of ∼100 nm. The ø110 nm device has a superconducting transition temperature of 13.2 K, magnetic flux noise down to 0.7 μΦ0/Hz0.5 (4 K), and operating temperatures of 1.8–10 K. The developed technique enables the synthesis of nitride and other superconductors, thereby expanding the range of materials available for SOT devices.
A method is provided for sensing a magnetic field in a magnetic gradiometer of the kind in which pump light and light constituting an optical carrier traverse first and second atomic vapor cells that contain host atoms and that are separated from each other by a known distance. According to such method, the host atoms are prepared in a coherent superposition of two quantum states that differ in energy by an amount that is sensitive to an ambient magnetic field. Modulation of the optical carrier in the respective cells gives rise to sidebands that interfere to generate a beat frequency indicative of the magnetic field gradient. The host atoms are prepared at least in a mode that allows measurement of ambient magnetic field components perpendicular to the axis of the pump light. In such mode, the host atoms are spin-polarized by pump light while subjected to a controlled magnetic field directed parallel to the pump beam, and then the controlled magnetic field is adiabatically extinguished.
We have fabricated superconducting quantum interference devices (dc SQUID’s) from thin films of the superconducting oxide YBa2Cu3Oy. The devices were made by first lithographically patterning an ion implant mask containing a 40 by 40 μm loop and two 17-μm-wide weak links over a ∼1-μm-thick oxide film. Ion implantation was then used to destroy the superconductivity in the film surrounding the device without actually removing material, resulting in a completely planar structure for the SQUID’s. The SQUID’s were operated in the temperature range from 4.2 to 68 K. The superconducting flux quantum was measured to be h/2e in these materials.