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Journal of Magnetism and Magnetic Materials

The micro-fabrication and performance analysis of non-magnetic heating chip for miniaturized SERF atomic magnetometer

Yintao Ma, Yao Chen, Libo Zhao, Guoxi Luo, Mingzhi Yu, Yanbin Wang, Ju Guo, Ping Yang, Qijing Lin, Zhuangde Jiang

Published May 19, 2022• 32 citations
Publisher
DOI
10.1016/j.jmmm.2022.169495

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With the continuous improvement of weak magnetic detection technology, there has been a growing trend towards more compact and integrated magnetometer. The SERF magnetometer and the Mz magnetometer have many common features in operation. Therefore, we design a new kind of miniaturized atomic sensors to integrate the SERF magnetometer and the Mz magnetometer based on micro-fabricated alkali vapor cell. The sensor structure consists of alkali vapor cell, three-axis magnetic field coils, heating module and optical module. This small size sensor has the potential to achieve a portable multi-function device.
Wafer-level integration of micro heater on an alkali vapor cell for chip-scale SERF magnetometers is presented. In order to obtain a suitable resistivity, polysilicon and aluminum are mixed as the target material. Magnetron sputtering is adopted to fabricate the heater on the surface of the alkali vapor cell. Various voltages are applied to the heater, of which the temperatures are measured by thermal sensitive sensors. Spin exchange relaxation free (SERF) atomic magnetometer with the heater integrated on the alkali vapor cell is characterized. Results show that the micro heater is successfully integrated on the alkali vapor cell. With the integrated heater, the rubidium vapor cell is heated up to 120°C by a 445kHz AC current. The sensitivity of the SERF magnetometer is 6.3pT/Hz1/2. Results also indicate that it provides an effective and low-cost solution for the miniaturization of atomic magnetometers.