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Classical and Quantum Lithography

Z. Ficek, Mohamed Ridza Wahiddin

Published Apr 19, 2016• 0 citations
Publisher

Abstract

We have learnt in Chapter 5 how to reduce fluctuations of an electromagnetic (EM) field below the quantum (Heisenberg) limit imposed by the quantum nature of light. It has been shown that the quantum limit can be beaten using non-classical squeezed light of reduced fluctuations. Another issue of significant interest in quantum optics is to beat the diffraction limit imposed on the resolution of measured objects by the wave nature of light. In this chapter, we will illustrate how one can beat the diffraction limit by using the quantumnature of entangled light beams.We shall see that entangled light can lead us to a new domain of quantum optics in which detectors can resolve two closely spaced objects or spectral lines with the minimal resolvable limit significantly reduced or even completely suppressed. This subject is generally known as quantum optical lithography and could be described in short as the ability to print patterns onto certain materials using non-classical light. The developments in this area are of fundamental interest, and they hold promise for advances in optical interferometry and in applications such as quantummetrology and gravitational wave studies.

DOI
10.1201/b16875-23

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We have learnt in Chapter 5 how to reduce fluctuations of an electromagnetic (EM) field below the quantum (Heisenberg) limit imposed by the quantum nature of light. It has been shown that the quantum limit can be beaten using non-classical squeezed light of reduced fluctuations. Another issue of significant interest in quantum optics is to beat the diffraction limit imposed on the resolution of measured objects by the wave nature of light. In this chapter, we will illustrate how one can beat the diffraction limit by using the quantumnature of entangled light beams.We shall see that entangled light can lead us to a new domain of quantum optics in which detectors can resolve two closely spaced objects or spectral lines with the minimal resolvable limit significantly reduced or even completely suppressed. This subject is generally known as quantum optical lithography and could be described in short as the ability to print patterns onto certain materials using non-classical light. The developments in this area are of fundamental interest, and they hold promise for advances in optical interferometry and in applications such as quantummetrology and gravitational wave studies.
The smallest spot in optical lithography and microscopy is generally limited by diffraction. Quantum lithography, which utilizes interference between groups of N entangled photons, was recently proposed to beat the diffraction limit by a factor N. Here we propose a simple method to obtain N photons interference with classical pulses that excite a narrow multiphoton transition, thus shifting the "quantum weight" from the electromagnetic field to the lithographic material. We show how a practical complete lithographic scheme can be developed and demonstrate the underlying principles experimentally by two-photon interference in atomic Rubidium, to obtain focal spots that beat the diffraction limit by a factor of 2.
As a direct result of the quantum nature of electromagnetic radiation, all forms of light exhibit inherent and unavoidable random fluctuations. Because these fluctuations reveal information about the nature of light and the underlying processes that generate it, they have received considerable attention since the time of Einstein. But they are also a source of noise that limits the accuracy with which information can be transmitted by a beam of light. Although experiments often still struggle with instrumental noise, some are quickly approaching the measurement limits set by the quantum-statistical nature of light. With the help of new techniques to “squeeze” the uncertainty of light, researchers can now conduct experiments with greater precision than possible with laser light. The generation of various forms of squeezed light in recent years has raised hopes for its application to such diverse areas as gravity-wave detection based on optical interferometry and reduced-error lightwave communications.
Quantum states of light, such as squeezed states or entangled states, can be used to make measurements (metrology), produce images, and sense objects with a precision that far exceeds what is possible classically, and also exceeds what was once thought to be possible quantum mechanically. The primary idea is to exploit quantum effects to beat the shot-noise limit in metrology and the Rayleigh diffraction limit in imaging and sensing. Quantum optical metrology has received a boost in recent years with an influx of ideas from the rapidly evolving field of optical quantum information processing. Both areas of research exploit the creation and manipulation of quantum-entangled states of light. We will review some of the recent theoretical and experimental advances in this exciting new field of quantum optical metrology, focusing on examples that exploit a particular two-mode entangled photon state – the High-N00N state.
Quantum optical sensing is a technique that utilizes quantum mechanics to enhance, sensitivity and precision to a level considered unparalleled so far. This chapter attempts to introduce the reader to the basics of this fast-growing field along with various technologies and applications. It begins with an explanation of quantum mechanics, superposition, entanglement, and quantum coherence that allow sensors to go beyond classical performance. One of the central technologies is quantum entanglement – the phenomenon whereby several particles become instantaneous spouses and are measured with utmost precision, for instance, distance, time, and magnetic fields. Entanglement Interferometry is entanglement applied in the detection of gravitational waves and high-resolution imaging. Squeezed light, the other area of interest, is a method that removes some of the fluctuations in one parameter of light, to increase the interferometer sensor, to measure small movements and low-frequency gravitational waves. Single photon emitting devices and detectors enable high-sensitivity measurements in applications such as bioimaging and quantum-securing communication. The chapter also illustrates the usage of this technology in practice in healthcare, environment, and navigation, like the examination of biomarkers and pollutants. Last is the discussion of issues such as quantum coherence and issues of scalability and development of QTs, as well as the proposed further development and more potential advances for QTs as a medium for mass use.
Quantum imaging can be defined as an area of quantum optics that investigates the ultimate performance limits of optical imaging allowed by the quantum nature of light. Quantum Imaging techniques possess a high potential for improving the performance in recording, storage, and readout of optical images beyond the limits set by the standard quantum level of fluctuations known as the shot noise. This talk aims at giving an overview of the fundamentals of Quantum Imaging as well as its most important directions. We shall discuss generation of the spatially multimode squeezed states of light be means of a travelling-wave optical parametric amplifier. We shall demonstrate that this kind of light allows us to reduce the spatial fluctuations of the photocurrent in a properly chosen homodyne detection scheme with a highly efficient CCD camera. It will be shown that using the amplified quadrature of the light wave in a travelling-wave optical parametric amplifier, one can perform noiseless amplification of optical images. We shall provide recent experimental results demonstrating a single-shot noiseless image amplification by a pulsed optical parametric amplifier. One of important experimental achievements of Quantum Imaging, coined in the literature as quantum laser pointer, is a precise measurement of position and transverse displacement of a laser beam with resolution beyond the limit imposed by the shot noise. We shall describe briefly the idea of the experiment in which the transverse displacement of a laser beam was measured with resolution of the order of Angstrom. The problem of precise measurement of transverse displacement of a light beam brings us to a more general question about the quantum limits of optical resolution. The classical resolution criterion, derived in the nineteen century by Abbe and Rayleigh, states that the resolution of an optical instrument is limited by diffraction and is related to the wavelength of the light used in the imaging scheme. However, it was for a long time recognised in the literature that in some cases when one has some a priori information about the object, one can improve the resolution beyond the Rayleigh limit using the so-called super-resolution techniques. As a final topic in this talk, we shall discuss the quantum limits of optical super-resolution. In particular, we shall formulate the standard quantum limit of super-resolution and demonstrate how one can go beyond this limit using specially designed multimode squeezed light.