We have first developed an all-solid-state 252 nm coherent light source for laser cooling of silicon atoms. This can give an impetus to research into the manipulation of the atomic motion of silicon atoms toward nanoprocess applications. Therefore, we developed an experimental setup for silicon atom manipulation. It was found that a high-quality silicon atomic beam, useful for nanoprocess applications, is obtainable with manipulation using the coherent light source in the system. With this unique apparatus, we continue the challenge to demonstrate the spatial design of nuclear spins of the family of isotopes with laser cooling of Si.