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Optics & Laser Technology

Single-layer atom chip for continuous operation: Design, fabrication and performance

Anton E. Afanasiev, Alexey S. Kalmykov, Roman V. Kirtaev, Anna A. Kortel, P. I. Skakunenko, D. V. Negrov, V. I. Balykin

Published Nov 27, 2021• 23 citations
Publisher
DOI
10.1016/j.optlastec.2021.107698

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We describe the recent progress on a Nb nine-layer fabrication process for large-scale single flux quantum (SFQ) circuits. A device fabricated in this process is composed of an active layer including Josephson junctions (JJ) at the top, passive transmission line (PTL) layers in the middle, and a DC power layer at the bottom. We describe the process conditions and the fabrication equipment. We use both diagnostic chips and shift register (SR) chips to improve the fabrication process. The diagnostic chip was designed to evaluate the characteristics of basic elements such as junctions, contacts, resisters, and wiring, in addition to their defect evaluations. The SR chip was designed to evaluate defects depending on the size of the SFQ circuits. The results of a long-term evaluation of the diagnostic and SR chips showed that there was fairly good correlation between the defects of the diagnostic chips and yields of the SRs. We could obtain a yield of 100% for SRs including 70,000JJs. These results show that considerable progress has been made in reducing the number of defects and improving reliability.
We present a SNAIL-based parametric amplifier that integrates a lumped-element impedance matching network for increased bandwidth and an on-chip pump-port filter for efficient pump delivery. The amplifier is fabricated using a single-layer optical lithography step, followed by a single-layer electron beam lithography step. We measure a flat 20 dB gain profile with less than 1 dB ripple across a bandwidth of up to 250 MHz on multiple devices, demonstrating robust performance against variations arising from fabrication and packaging. We characterize the amplifier's linearity by analyzing gain compression and intermodulation distortion under simultaneous multi-tone excitation. We show that the intermodulation products remain suppressed by more than 23 dB relative to the signal tones, even at the 1 dB gain compression point. We further validate its utility by performing simultaneous high-fidelity readout of two transmon qubits, achieving state assignment fidelities of 99.51% and 98.55%. The combination of compact design, fabrication simplicity, and performance robustness makes this amplifier a practical device for quantum experiments with superconducting circuits.