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A bright metastable helium atomic beam for lithography and atom optics

Baldwin, KGH, Lu, W, Dragana Milic, R. M. S. Knops, Hoogerland, SJ Buckman

Published Jan 1, 1997• 0 citations
OpenAlex

Abstract

Intense, highly collimated sources of atoms have many potential applications. Bright beams will be important for competitive high flux and high resolution direct-write techniques in lithography, with the added advantage of parallel writing through laser manipulation. Intense sources will also be useful in other atom optic devices e.g. for loading atoms into hollow fiber waveguides. In atomic physics, many collision processes can only be measured with the sensitivity offered by such high flux sources. We report progress on the development of an intense, collimated beam of metastable helium atoms which improves the brightness generated by conventional nozzle discharge sources by several orders of magnitude. The system uses diode lasers to transversely collimate and then to longitudinally slow the atoms, using Zeeman tuning to compensate for the changing Doppler shift. The slowed, collimated beam is then compressed in a 2D magneto-optic trap before a final collimation stage, to achieve the required increase in intensity. Initial experiments using the helium source for some of the applications above are described.

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Intense, highly collimated sources of atoms have many potential applications. Bright beams will be important for competitive high flux and high resolution direct-write techniques in lithography, with the added advantage of parallel writing through laser manipulation. Intense sources will also be useful in other atom optic devices e.g. for loading atoms into hollow fiber waveguides. In atomic physics, many collision processes can only be measured with the sensitivity offered by such high flux sources. We report progress on the development of an intense, collimated beam of metastable helium atoms which improves the brightness generated by conventional nozzle discharge sources by several orders of magnitude. The system uses diode lasers to transversely collimate and then to longitudinally slow the atoms, using Zeeman tuning to compensate for the changing Doppler shift. The slowed, collimated beam is then compressed in a 2D magneto-optic trap before a final collimation stage, to achieve the required increase in intensity. Initial experiments using the helium source for some of the applications above are described.
Intense, highly collimated sources of atoms have many potential applications. Bright beams will be important for competitive high flux and high resolution direct-write techniques in lithography, with the added advantage of parallel writing through laser manipulation. Intense sources will also be useful in other atom optic devices e.g. for loading atoms into hollow fiber waveguides. In atomic physics, many collision processes can only be measured with the sensitivity offered by such high flux sources. We report progress on the development of an intense, collimated beam of metastable helium atoms which improves the brightness generated by conventional nozzle discharge sources by several orders of magnitude. The system uses diode lasers to transversely collimate and then to longitudinally slow the atoms, using Zeeman tuning to compensate for the changing Doppler shift. The slowed, collimated beam is then compressed in a 2D magneto-optic trap before a final collimation stage, to achieve the required increase in intensity. Initial experiments using the helium source for some of the applications above are described.
In this work I report on the development of a Magneto Optic Trap (MOT) for metastable helium atoms (He*). The metastable helium atoms are produced in a discharge nozzle source and collimated, slowed and compressed to provide a slow bright beam for loading the trap. The trap confines approximately 107 atoms, has a diameter of about 3 mm and with temperature approximately 1 mK. The trap is used for intra-trap and electron-atom scattering experiments. The results from these two experiments are reported. The electron scattering experiment is unique and employs a He* MOT for the first time, in combination with a new diagnostic technique (Phase Modulation Spectroscopy) to measure the trap loss. The results of these experiments have yielded the first total electron-metastable atom collision cross section measurements at intermediate (10-100 eV) electron energies.
Metastable noble gas atomic beam is widely used in atomic and molecular physics studies.Using radio-frequency discharge and transverse laser cooling, we produced a well-collimated intense meta-stable Krypton beam.Numerical simulation is also used to analyze the trajectories of atoms in an optic field produced by transverse cooling laser beams.The charactersisticl of the atomic beam are determined by measuring the laser induced fluorescence.The atomic beam flux measured at 230 cm downstream is 1.61016 atoms/(s*sr), which is enhanced by two orders of magnitude.The Kr atoms are finally trapped in a magneto-optic trap.A total of 1.31010 meta-stable 84Kr atoms can be simultaneously trapped with a loading rate of 3.01011 atoms/s.The same setup is also successfully used to obtain a bright metastable atomic argon beam and trap.
This article presents a new experiment aiming at BEC of metastable helium atoms. It describes the design of a high flux discharge source of atoms and a robust laser system using a DBR diode coupled with a high power Yb doped fiber amplifier for manipulating the beam of metastable atoms. The atoms are trapped in a small quartz cell in an extreme high vacuum. The trapping design uses an additional laser (repumper) and allows the capture of a large number of metastable helium atoms (approximately 10 9 ) in a geometry favorable for loading a tight magnetostatic trap.
This article presents a new experiment aiming at BEC of metastable helium atoms. It describes the design of a high flux discharge source of atoms and a robust laser system using a DBR diode coupled with a high power Yb doped fiber amplifier for manipulating the beam of metastable atoms. The atoms are trapped in a small quartz cell in an extreme high vacuum. The trapping design uses an additional laser (repumper) and allows the capture of a large number of metastable helium atoms (approximately 109) in a geometry favorable for loading a tight magnetostatic trap.