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Infrared, Millimeter-Wave, and Terahertz Technologies

High sensitivity mid-infrared superconducting single-photon detector with Mo0.8Si0.2 nanowire

Qi Henry Chen, Rui Ge, Labao Zhang, Feiyan Li, Biao Zhang, Feifei Jin, Hang Han, Yue Dai, Guanglong He, Yue Fei, Xiaohan Wang, Hao Wang, Xiaoqing Jia, Qingyuan Zhao, Xuecou Tu, Lin Kang, Jian Chen, Peiheng Wu

Published Oct 8, 2021• 0 citations
Publisher
DOI
10.1117/12.2602573

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High-performance mid-wave and long-wave infrared single-photon detectors not only have significant research value in the fields of infrared astronomy and defense technology, but are also challenging to be realized in the field of single-photon detection technology. Superconducting nanowire single-photon detectors (SNSPDs) have shown excellent performance in the near-infrared band. However, how to further improve the cutoff wavelength λc is a topic of widespread concern. In this paper, the method for improving λc by applying the regulation of the superconducting disorder is discussed, and a detector with an operating wavelength band of 5 - 10 μm is designed and fabricated. Studies have shown that the multiplication and diffusion behaviors of the quasiparticles always occur during the photon detection events, although the microscopic photodetection mechanism of SNSPD still lacks a perfect theoretical explanation. Therefore, the theoretical analysis mainly considers the influence of the quasiparticles in this paper, and the mathematical formula of the detection cutoff wavelength λc can be obtained based on the phenomenological quasiparticle diffusion model. Furthermore, the disorder-dependent superconducting phase transition temperature Tc, superconducting energy gap <teshuzifu>D, and electron thermalization time τth are also considered, in order to get more precise results. Theoretical analysis suggests that the increase in the sheet resistance Rs, which evaluates the disorder strength, will help to increase λc. For example, when the nanowire width is kept at 30 nm and Rs > 380 Ω/□, it can be deduced that λc is larger than 10 μm. Experimentally, the active area of the device consists of a straight superconducting nanowire with a length of 10 μm and a width of 30 nm, so that it can effectively reduce the probability of the defects on the nanowire and avoid the current crowding effect. We have fabricated a 30 nm-wide Mo0.8Si0.2 mid infrared SNSPD, which has a cutoff wavelength λc no more than 5 μm, the effective strength of the disorder - the film sheet resistance Rs = 248.6 Ω/□. As a comparison, the sheet resistance, which is controlled by the film thickness, is increased to about 320 Ω/□ in this experiment. It is demonstrated that the Mo0.8Si0.2 detector with Rs ~320 Ω/□ can achieve saturated quantum efficiency at a wavelength of 6 μm. Furthermore, 53% quantum efficiency at the wavelength of 10.2 μm can be obtained when the detector works at a bias current of 0.9 ISW (ISW is the superconducting transition current), and it can theoretically reach a maximum value of 92% if the compression of switching current is excluded. Therefore, it can be predicted that the disorder regulation may become another efficient approach for designing high-performance mid-wave and long-wave infrared SNSPDs, in addition to the optimization of the superconducting energy gap and the cross section of superconducting nanowire. However, the continuous increase in the disorder will cause a decrease in both the superconducting phase transition temperature Tc and ISW of the detector from the point of detector fabrication and application. This downward trend is especially pronounced when the nanowire width is ultranarrow, which is not conducive to the signal readout of the detector. Thus, exploring the optimal disorder regulation technology and balancing the relationship between the operating temperature, the signal-to-noise ratio, and the cutoff wavelength will have key scientific and application value for the development of high-performance mid-wave and long-wave infrared SNSPDs.

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Superconducting nanowire single-photon detectors (SNSPDs) are among the most sensitive single-photon detectors available and have the potential to transform fields ranging from infrared astrophysics to molecular spectroscopy. However, extending their performance into the mid-infrared spectral region - crucial for applications such as exoplanet transit spectroscopy and vibrational fingerprinting of molecules - has remained a major challenge, primarily due to material limitations and scalability constraints. Here, we report on the development of SNSPDs based on tungsten germanide, a novel material system that combines high mid-infrared sensitivity with compatibility for large-scale fabrication. Our detectors exhibit saturated internal detection efficiency at wavelengths up to 29 μm, while using 2.7x thicker films (8 nm vs 3 nm) and up to 4.5x wider nanowires (360 nm vs 80 nm) compared to mid-infrared-optimized SNSPDs fabricated from tungsten silicide. This advance will enable scalable, high-performance single-photon detection in a spectral region that was previously inaccessible, opening new frontiers in remote sensing, thermal imaging, environmental monitoring, molecular physics, and astronomy.

physics.ins-detCross-listedarXiv:2511.20868•Nov 27, 2025
High-performance mid-wave and long-wave infrared single-photon detectors not only have significant research value in the fields of infrared astronomy and defense technology, but are also challenging to be realized in the field of single-photon detection technology. Superconducting nanowire single-photon detectors (SNSPDs) have shown excellent performance in the near-infrared band. However, how to further improve the cutoff wavelength λc is a topic of widespread concern. In this paper, the method for improving λc by applying the regulation of the superconducting disorder is discussed, and a detector with an operating wavelength band of 5 - 10 μm is designed and fabricated. Studies have shown that the multiplication and diffusion behaviors of the quasiparticles always occur during the photon detection events, although the microscopic photodetection mechanism of SNSPD still lacks a perfect theoretical explanation. Therefore, the theoretical analysis mainly considers the influence of the quasiparticles in this paper, and the mathematical formula of the detection cutoff wavelength λc can be obtained based on the phenomenological quasiparticle diffusion model. Furthermore, the disorder-dependent superconducting phase transition temperature Tc, superconducting energy gap <teshuzifu>D, and electron thermalization time τth are also considered, in order to get more precise results. Theoretical analysis suggests that the increase in the sheet resistance Rs, which evaluates the disorder strength, will help to increase λc. For example, when the nanowire width is kept at 30 nm and Rs > 380 Ω/□, it can be deduced that λc is larger than 10 μm. Experimentally, the active area of the device consists of a straight superconducting nanowire with a length of 10 μm and a width of 30 nm, so that it can effectively reduce the probability of the defects on the nanowire and avoid the current crowding effect. We have fabricated a 30 nm-wide Mo0.8Si0.2 mid infrared SNSPD, which has a cutoff wavelength λc no more than 5 μm, the effective strength of the disorder - the film sheet resistance Rs = 248.6 Ω/□. As a comparison, the sheet resistance, which is controlled by the film thickness, is increased to about 320 Ω/□ in this experiment. It is demonstrated that the Mo0.8Si0.2 detector with Rs ~320 Ω/□ can achieve saturated quantum efficiency at a wavelength of 6 μm. Furthermore, 53% quantum efficiency at the wavelength of 10.2 μm can be obtained when the detector works at a bias current of 0.9 ISW (ISW is the superconducting transition current), and it can theoretically reach a maximum value of 92% if the compression of switching current is excluded. Therefore, it can be predicted that the disorder regulation may become another efficient approach for designing high-performance mid-wave and long-wave infrared SNSPDs, in addition to the optimization of the superconducting energy gap and the cross section of superconducting nanowire. However, the continuous increase in the disorder will cause a decrease in both the superconducting phase transition temperature Tc and ISW of the detector from the point of detector fabrication and application. This downward trend is especially pronounced when the nanowire width is ultranarrow, which is not conducive to the signal readout of the detector. Thus, exploring the optimal disorder regulation technology and balancing the relationship between the operating temperature, the signal-to-noise ratio, and the cutoff wavelength will have key scientific and application value for the development of high-performance mid-wave and long-wave infrared SNSPDs.
We present a break-through approach to mid-infrared single-photon detection based on nanowire NbN superconducting single-photon detectors (SSPD). Although SSPD became a mature technology for telecom wavelengths (1.3-1.55 μm) its further expansion to mid-infrared wavelength was hampered by low sensitivity above 2 μm. We managed to overcome this limit by reducing the nanowire width to 50 nm, while retaining high superconducting properties and connecting the wires in parallel to produce a voltage response of sufficient magnitude. The new device exhibits 10 times better quantum efficiency at 3.5 μm wavelength than the “standard” SSPD.
Superconducting nanowire single-photon detectors (SNSPDs) are among the most sensitive single-photon detectors available and have the potential to transform fields ranging from infrared astrophysics to molecular spectroscopy. However, extending their performance into the mid-infrared spectral region - crucial for applications such as exoplanet transit spectroscopy and vibrational fingerprinting of molecules - has remained a major challenge, primarily due to material limitations and scalability constraints. Here, we report on the development of SNSPDs based on tungsten germanide, a novel material system that combines high mid-infrared sensitivity with compatibility for large-scale fabrication. Our detectors exhibit saturated internal detection efficiency at wavelengths up to 29 μm, while using 2.7x thicker films (8 nm vs 3 nm) and up to 4.5x wider nanowires (360 nm vs 80 nm) compared to mid-infrared-optimized SNSPDs fabricated from tungsten silicide. This advance will enable scalable, high-performance single-photon detection in a spectral region that was previously inaccessible, opening new frontiers in remote sensing, thermal imaging, environmental monitoring, molecular physics, and astronomy.