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Electron spin resonance spectroscopy with femtoliter detection volume

V. Ranjan, Probst, S, Bartolo Albanese, Schenkel, T, D. Vion, Esteve, D, John J. L. Morton, Patrice Bertet

Published Jan 1, 2020• 45 citations
OpenAlex

Abstract

We report electron spin resonance measurements of donors in silicon at millikelvin temperatures using a superconducting LC planar micro-resonator and a Josephson parametric amplifier. The resonator includes a nanowire inductor, defining a femtoliter detection volume. Due to strain in the substrate, the donor resonance lines are heavily broadened. Single-spin to photon coupling strengths up to ∼3 kHz are observed. The single shot sensitivity is 120 ± 24 spins/Hahn echo, corresponding to ≈12±3 spins / √Hz for repeated acquisition.

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We report electron spin resonance measurements of donors in silicon at millikelvin temperatures using a superconducting LC planar micro-resonator and a Josephson parametric amplifier. The resonator includes a nanowire inductor, defining a femtoliter detection volume. Due to strain in the substrate, the donor resonance lines are heavily broadened. Single-spin to photon coupling strengths up to ∼3 kHz are observed. The single shot sensitivity is 120 ± 24 spins/Hahn echo, corresponding to ≈12±3 spins / √Hz for repeated acquisition.
We report electron spin resonance measurements of donors in silicon at millikelvin temperatures using a superconducting LC planar micro-resonator and a Josephson parametric amplifier. The resonator includes a nanowire inductor, defining a femtoliter detection volume. Due to strain in the substrate, the donor resonance lines are heavily broadened. Single-spin to photon coupling strengths up to ∼3 kHz are observed. The single shot sensitivity is 120 ± 24 spins/Hahn echo, corresponding to ≈12±3 spins /Hz for repeated acquisition.
We report electron spin resonance spectroscopy measurements performed at millikelvin temperatures in a custom-built spectrometer comprising a superconducting micro-resonator at 7 GHz and a Josephson parametric amplifier. Owing to the small (∼10−12λ3∼10−12λ3) magnetic resonator mode volume and to the low noise of the parametric amplifier, the spectrometer's single shot sensitivity reaches 260 ± 40 spins/echo translating into 65±10 spins/Hz⎯⎯⎯⎯⎯√65±10 spins/Hz for repeated acquisition.
We report on electron spin resonance measurements of phosphorus donors localized in a 200 μm^{2} area below the inductive wire of a lumped element superconducting resonator. By combining quantum limited parametric amplification with a low impedance microwave resonator design, we are able to detect around 2×10^{4} spins with a signal-to-noise ratio of 1 in a single shot. The 150 Hz coupling strength between the resonator field and individual spins is significantly larger than the 1-10 Hz coupling rates obtained with typical coplanar waveguide resonator designs. Because of the larger coupling rate, we find that spin relaxation is dominated by radiative decay into the resonator and dependent upon the spin-resonator detuning, as predicted by Purcell.
The use of superconducting microresonators together with quantum-limited Josephson parametric amplifiers has enhanced the sensitivity of pulsed electron spin resonance (ESR) measurements by more than four orders of magnitude. So far, the microwave resonators and amplifiers have been designed as separate components due to the incompatibility of Josephson junction–based devices with magnetic fields. This has produced complex spectrometers and raised technical barriers toward adoption of the technique. Here, we circumvent this issue by coupling an ensemble of spins directly to a weakly nonlinear and magnetic field–resilient superconducting microwave resonator. We perform pulsed ESR measurements with a 1-pL mode volume containing 6 × 10 7 spins and amplify the resulting signals within the device. When considering only those spins that contribute to the detected signals, we find a sensitivity of 2.8 × 1 0 3 spins / Hz for a Hahn echo sequence at a temperature of 400 mK. In situ amplification is demonstrated at fields up to 254 mT, highlighting the technique’s potential for application under conventional ESR operating conditions.
We discuss the design and implementation of thin film superconducting coplanar waveguide micro-resonators for pulsed electron spin resonance experiments. The performance of the resonators with P doped Si epilayer samples is compared to waveguide resonators under equivalent conditions. The high achievable filling factor even for small sized samples and the relatively high Q-factor result in a sensitivity of 4.5 × 10(8) spins per shot, which is superior to that of conventional waveguide resonators, in particular to spins close to the sample surface. The peak microwave power is on the order of a few milliwatts, which is compatible with measurements at ultra-low temperatures. We also discuss the effect of the nonuniform microwave magnetic field on the Hahn echo power dependence.