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Fabrication of superconducting direct detectors in submillimeter-wave bands

Seiichiro Ariyoshi, Hiroshi Matsuo, Chiko Otani, Takahiro Morishima, Y. Satou, Hirohiko M. Shimizu, 誠一郎 有吉, 松尾 宏, 大谷 知行, 森嶋隆裕, 佐藤 広海, 裕彦 清水

Published Jul 1, 2002• 2 citations
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Employing an anodization method into our fabrication process, we have successfully fabricated STJs with size of 4 /spl mu/m in diameter, Josephson critical current density of 1000 A/cm/sup 2/, low leakage current of less than 10 pA at 0.3 K and high fabrication yield of more than 90 percent. These STJs were applied to fabricate submillimeter-wave direct detectors using 12 linearly distributed junctions, each circular junction having a current density of 600 A/cm/sup 2/ and size of 4 /spl mu/m in diameter. Direct detection of submillimeter-waves was measured using a Fourier transform spectrometer, which shows a maximum sensitivity at 440 GHz and a fractional bandwidth of 10 percent.
In this work we report the current status in our development of sensitive heterodyne detectors for efficient down-conversion of submillimeter-wave signals to D-band. These detectors use the strong non-linearity of Nb/Al-AlO/sub x//Nb tunnel junctions and employ preferably quasi-optical techniques to couple local-oscillator and radio-frequency signals to the superconducting junctions via a log-periodic antenna and hyper-hemispherical lens combination. Several devices have been fabricated and tested.