Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

IEEE International Superconductive Electronics Conference (ISEC)

Mechanical Oscillators Based on Superconducting Membranes

Junliang Jiang, Yongchao Li, Jiazheng Pan, Huabing Wang, Guozhu Sun, Peiheng Wu

Published Jul 1, 2019• 1 citation
Publisher

Abstract

Mechanical oscillators can be implemented to store and/or transfer information. In order to couple a mechanical oscillator to a superconducting qubit, we fabricate a superconducting capacitor using the diluted photoresist or electron beam photoresist as a sacrificial layer. The upper plate of the capacitor, a suspended membrane, acts as a mechanical oscillator. We obtain its mechanical resonant frequency and response to the input microwave. Such mechanical oscillator can be used as the capacitor of a superconducting qubit to form a coupled system. Another way to transfer information between a mechanical oscillator and a superconducting qubit is to take advantage of a superconducting microwave resonator such as a coplanar waveguide resonator. In order to control the resonant frequency of the resonators, we introduce a DC voltage bias between the upper and lower plates of the capacitor. We demonstrate the dependence of the resonant frequency on the applied DC voltage.

DOI
10.1109/isec46533.2019.8990929

Related papers

Voltage-Controlled Mechanical Oscillator Based on Superconducting Membrane

Junliang Jiang, Jiazheng Pan, Yongchao Li +7 more

Mechanical oscillators can be implemented to store and transfer information or to build hybrid systems. In order to couple a mechanical oscillator to a superconducting qubit, we fabricate a superconducting capacitor, in which diluted photoresist or electron beam photoresist is used as sacrificial layers. The upper plate of the capacitor, a suspended membrane, acts as a mechanical oscillator. We obtain its mechanical resonant frequency and response to the input microwave. Such mechanical oscillators can be used as the capacitor of a superconducting qubit to form a coupled system. In order to control the resonant frequency of the mechanical oscillator and the microwave resonator, we introduce a dc voltage bias between the upper and lower plates of the capacitor. We analyze the electromechanical coupling such as pull-in effect and experimentally demonstrate the dependence of the resonant frequency on the applied dc voltage. These results will contribute to the design and fabrication of hybrid systems comprising voltage-controlled mechanical oscillators and other systems.

IEEE Transactions on Applied Superconductivity•May 1, 2020•1 citation

A controllable superconducting electromechanical oscillator with a suspended membrane

Yongchao Li, Jiang-Shan Tang, Junliang Jiang +10 more

We fabricate a microscale electromechanical system, in which a suspended superconducting membrane, treated as a mechanical oscillator, capacitively couples to a superconducting microwave resonator. As the microwave driving power increases, nonmonotonic dependence of the resonance frequency of the mechanical oscillator on the driving power has been observed. We also demonstrate the optical switching of the resonance frequency of the mechanical oscillator. Theoretical models for qualitative understanding of our experimental observations are presented. Our experiment may pave the way for the application of a mechanical oscillator with its resonance frequency controlled by the electromagnetic and/or optical fields, such as a microwave-optical interface and a controllable element in a superqubit-mechanical oscillator hybrid system.

arXiv:1902.10956•AIP Advances•Jan 1, 2019•7 citations

QUBIT COUPLED MECHANICAL RESONATOR IN AN ELECTROMECHANICAL SYSTEM

Y. L. Hao

This thesis describes the development of a hybrid quantum electromechanical system. In this system the mechanical resonator is capacitively coupled to a superconducting transmon which is embedded in a superconducting coplanar waveguide (CPW) cavity. The difficulty of achieving high quality of superconducting qubit in a high-quality voltage-biased cavity is overcome by integrating a superconducting reflective T-filter to the cavity. Further spectroscopic and pulsed measurements of the hybrid system demonstrate interactions between the ultra-high frequency mechanical resonator and transmon qubit. The noise of mechanical resonator close to ground state is measured by looking at the spectroscopy of the transmon. At last, fabrication and tests of membrane resonators are discussed.

•Jan 1, 2017•0 citations

Hybrid optomechanical systems as transducers for quantum information

S. Deléglise, Thibault Capelle, T. Jacqmin +5 more

Summary form only given. The motion of a micromechanical resonator coupled simultaneously to a high-finesse optical cavity and a microwave resonator can be used to transduce the fragile quantum states generated in the realm of microwave superconducting circuits into optical photons that can transport quantum information over large distances in telecom optical fibers at room temperature. We have engineered the optical and mechanical properties of thin membranes patterned in a suspended high-stress Si3N4 film to realize such a hybrid opto-electro-mechanical system. An optical Fabry-Perot cavity with a finesse exceeding 12 000 was realized between a highly reflective photonic crystal patch realized on the suspended membrane and a conventional high-reflectivity mirror. The electromechanical coupling with a nearby planar superconducting circuit is achieved by approaching the membrane at a sub-micron distance from an on-chip interdigitated capacitor. By operating the hybrid opto-electro-mechanical system in a cryogenic environment, the photon-phonon swap rates between microwave, mechanical, and optical degrees of freedom is expected to overcome the mechanical decoherence rate. An artist view of the device envisioned is depicted on Figure 1.

Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)•Jun 1, 2017•0 citations

Probing the quantum coherence of a nanomechanical resonator using a superconducting qubit: II. Implementation

M. P. Blencowe, Andrew D. Armour

We describe a possible implementation of the nanomechanical quantum superposition generation and detection scheme described in the preceding, companion paper (Armour A D and Blencowe M P 2008 New. J. Phys. 10 095004). The implementation is based on the circuit quantum electrodynamics (QED) set-up, with the addition of a mechanical degree of freedom formed out of a suspended, doubly-clamped segment of the superconducting loop of a dc SQUID located directly opposite the centre conductor of a coplanar waveguide (CPW). The relative merits of two SQUID based qubit realizations are addressed, in particular a capacitively coupled charge qubit and inductively coupled flux qubit. It is found that both realizations are equally promising, with comparable qubit–mechanical resonator mode as well as qubit–microwave resonator mode coupling strengths.

arXiv:0804.2179•New Journal of Physics•Sep 30, 2008•15 citations

Hybrid optomechanical systems as transducers for quantum information

S. Deléglise, Thibault Capelle, Chen Xu +6 more

The motion of a micromechanical resonator coupled simultaneously to a high-finesse optical cavity and a microwave resonator can be used to transduce the fragile quantum states generated in the realm of microwave superconducting circuits into optical photons that can transport quantum information over large distances in telecom optical fibers at room temperature. We have engineered the optical and mechanical properties of thin membranes patterned in a suspended high-stress Si3N4 film to realize such a hybrid opto-electro-mechanical system. An optical Fabry-Perot cavity with a finesse exceeding 12 000 was realized between a highly reflective photonic crystal patch realized on the suspended membrane and a conventional high-reflectivity mirror. The electromechanical coupling with a nearby planar superconducting circuit is achieved by approaching the membrane at a sub-micron distance from an on-chip interdigitated capacitor. By operating the hybrid opto-electro-mechanical system in a cryogenic environment, the photon-phonon swap rates between microwave, mechanical, and optical degrees of freedom is expected to overcome the mechanical decoherence rate.

Quantum Information and Measurement (QIM)•Jan 1, 2017•0 citations
Mechanical oscillators can be implemented to store and/or transfer information. In order to couple a mechanical oscillator to a superconducting qubit, we fabricate a superconducting capacitor using the diluted photoresist or electron beam photoresist as a sacrificial layer. The upper plate of the capacitor, a suspended membrane, acts as a mechanical oscillator. We obtain its mechanical resonant frequency and response to the input microwave. Such mechanical oscillator can be used as the capacitor of a superconducting qubit to form a coupled system. Another way to transfer information between a mechanical oscillator and a superconducting qubit is to take advantage of a superconducting microwave resonator such as a coplanar waveguide resonator. In order to control the resonant frequency of the resonators, we introduce a DC voltage bias between the upper and lower plates of the capacitor. We demonstrate the dependence of the resonant frequency on the applied DC voltage.
Mechanical oscillators can be implemented to store and transfer information or to build hybrid systems. In order to couple a mechanical oscillator to a superconducting qubit, we fabricate a superconducting capacitor, in which diluted photoresist or electron beam photoresist is used as sacrificial layers. The upper plate of the capacitor, a suspended membrane, acts as a mechanical oscillator. We obtain its mechanical resonant frequency and response to the input microwave. Such mechanical oscillators can be used as the capacitor of a superconducting qubit to form a coupled system. In order to control the resonant frequency of the mechanical oscillator and the microwave resonator, we introduce a dc voltage bias between the upper and lower plates of the capacitor. We analyze the electromechanical coupling such as pull-in effect and experimentally demonstrate the dependence of the resonant frequency on the applied dc voltage. These results will contribute to the design and fabrication of hybrid systems comprising voltage-controlled mechanical oscillators and other systems.
We fabricate a microscale electromechanical system, in which a suspended superconducting membrane, treated as a mechanical oscillator, capacitively couples to a superconducting microwave resonator. As the microwave driving power increases, nonmonotonic dependence of the resonance frequency of the mechanical oscillator on the driving power has been observed. We also demonstrate the optical switching of the resonance frequency of the mechanical oscillator. Theoretical models for qualitative understanding of our experimental observations are presented. Our experiment may pave the way for the application of a mechanical oscillator with its resonance frequency controlled by the electromagnetic and/or optical fields, such as a microwave-optical interface and a controllable element in a superqubit-mechanical oscillator hybrid system.
This thesis describes the development of a hybrid quantum electromechanical system. In this system the mechanical resonator is capacitively coupled to a superconducting transmon which is embedded in a superconducting coplanar waveguide (CPW) cavity. The difficulty of achieving high quality of superconducting qubit in a high-quality voltage-biased cavity is overcome by integrating a superconducting reflective T-filter to the cavity. Further spectroscopic and pulsed measurements of the hybrid system demonstrate interactions between the ultra-high frequency mechanical resonator and transmon qubit. The noise of mechanical resonator close to ground state is measured by looking at the spectroscopy of the transmon. At last, fabrication and tests of membrane resonators are discussed.
Summary form only given. The motion of a micromechanical resonator coupled simultaneously to a high-finesse optical cavity and a microwave resonator can be used to transduce the fragile quantum states generated in the realm of microwave superconducting circuits into optical photons that can transport quantum information over large distances in telecom optical fibers at room temperature. We have engineered the optical and mechanical properties of thin membranes patterned in a suspended high-stress Si3N4 film to realize such a hybrid opto-electro-mechanical system. An optical Fabry-Perot cavity with a finesse exceeding 12 000 was realized between a highly reflective photonic crystal patch realized on the suspended membrane and a conventional high-reflectivity mirror. The electromechanical coupling with a nearby planar superconducting circuit is achieved by approaching the membrane at a sub-micron distance from an on-chip interdigitated capacitor. By operating the hybrid opto-electro-mechanical system in a cryogenic environment, the photon-phonon swap rates between microwave, mechanical, and optical degrees of freedom is expected to overcome the mechanical decoherence rate. An artist view of the device envisioned is depicted on Figure 1.
We describe a possible implementation of the nanomechanical quantum superposition generation and detection scheme described in the preceding, companion paper (Armour A D and Blencowe M P 2008 New. J. Phys. 10 095004). The implementation is based on the circuit quantum electrodynamics (QED) set-up, with the addition of a mechanical degree of freedom formed out of a suspended, doubly-clamped segment of the superconducting loop of a dc SQUID located directly opposite the centre conductor of a coplanar waveguide (CPW). The relative merits of two SQUID based qubit realizations are addressed, in particular a capacitively coupled charge qubit and inductively coupled flux qubit. It is found that both realizations are equally promising, with comparable qubit–mechanical resonator mode as well as qubit–microwave resonator mode coupling strengths.
The motion of a micromechanical resonator coupled simultaneously to a high-finesse optical cavity and a microwave resonator can be used to transduce the fragile quantum states generated in the realm of microwave superconducting circuits into optical photons that can transport quantum information over large distances in telecom optical fibers at room temperature. We have engineered the optical and mechanical properties of thin membranes patterned in a suspended high-stress Si3N4 film to realize such a hybrid opto-electro-mechanical system. An optical Fabry-Perot cavity with a finesse exceeding 12 000 was realized between a highly reflective photonic crystal patch realized on the suspended membrane and a conventional high-reflectivity mirror. The electromechanical coupling with a nearby planar superconducting circuit is achieved by approaching the membrane at a sub-micron distance from an on-chip interdigitated capacitor. By operating the hybrid opto-electro-mechanical system in a cryogenic environment, the photon-phonon swap rates between microwave, mechanical, and optical degrees of freedom is expected to overcome the mechanical decoherence rate.